Electrical and Optical Characterization of GeON Layers with high-k Gate Stacks on Germanium for Future MOSFETs
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Published in | Meeting abstracts (Electrochemical Society) Vol. MA2012-01; no. 16; p. 690 |
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Main Authors | , , , , , , |
Format | Journal Article |
Language | English |
Published |
15.02.2012
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Online Access | Get full text |
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ISSN: | 2151-2043 2151-2035 |
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DOI: | 10.1149/MA2012-01/16/690 |