Sensing Characteristics and Transduction Mechanism of WO3-based Si FET-type Humidity Sensor Using Pulse Measurement

As accurate humidity monitoring and control are critical in both home and factory environments, the recent interest in Internet of Things-based smart humidity sensors has rapidly increased. However, conventional humidity sensors have disadvantages of large size, output signal drift, and hysteresis....

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Bibliographic Details
Published inJournal of semiconductor technology and science Vol. 25; no. 3; pp. 325 - 334
Main Authors Hong, Yoonki, Yun, Jonghyun, Han, Dongjin, Lee, Sung-Tae, Woo, Sung-Yun
Format Journal Article
LanguageEnglish
Published 대한전자공학회 30.06.2025
Subjects
전기공학
Online AccessGet full text
ISSN1598-1657
2233-4866
DOI10.5573/JSTS.2025.25.3.325

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