Development of a High-Density Microplasma Emission Source for a Micro Total Analysis System

• Published in: Analytical Sciences Vol. 33; no. 4; pp. 505 - 510
• Main Authors: KAKEGAWA, Ken, HARIGANE, Ryoto, AIDA, Mari, MIYAHARA, Hidekazu, MARUO, Shoji, OKINO, Akitoshi
• Format: Journal Article
• Language: English
• Published: Singapore The Japan Society for Analytical Chemistry 2017; Springer Nature Singapore; Japan Science and Technology Agency
• Subjects: Analytical Chemistry; atmospheric plasma; Atmospheric pressure; atomic emission spectroscopy; Chemistry; Electrodes; Emissions; gas analysis; Helium; Helium plasma; micro plasma; Micro total analysis systems; Microchannels; Microplasmas; Plasma; Semiconductors; Temperature effects; μ-TAS; μ-TAS; atmospheric plasma; atomic emission spectroscopy; gas analysis; micro plasma; Micro total analysis systems

To achieve a highly sensitive and onsite analysis of a small amount samples, a microplasma-based micro total analysis systems (μ-TAS) device was developed. A dielectric barrier discharge (DBD) that can generate a stable plasma at atmospheric pressure was generated in a microchip and used as the plas...