Tunable vibration control in a microelectromechanical resonator array by means of parametric coupling between mechanical and electrical modes
Vibration control in flexible structures at both the micro and macro scale has been a subject of considerable research interest over the last few decades. Various active, semi-active and passive vibration control schemes have been proposed for applications ranging from attenuating unwanted vibration...
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| Published in | The Journal of the Acoustical Society of America Vol. 148; no. 4; p. 2719 |
|---|---|
| Main Authors | , |
| Format | Journal Article |
| Language | English |
| Published |
01.10.2020
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| Online Access | Get full text |
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