A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

• Published in: Nanoscale research letters Vol. 16; no. 1; pp. 16 - 21
• Main Authors: Algamili, Abdullah Saleh, Khir, Mohd Haris Md, Dennis, John Ojur, Ahmed, Abdelaziz Yousif, Alabsi, Sami Sultan, Ba Hashwan, Saeed Salem, Junaid, Mohammed M.
• Format: Journal Article
• Language: English
• Published: New York Springer US 26.01.2021; Springer Nature B.V; SpringerOpen
• Subjects: Actuation; Actuators; Capacitive; Chemistry and Materials Science; Electromagnetic; Electrostatic; Electrothermal; Fabrication; Materials Science; Microelectromechanical systems; Miniaturization; Molecular Medicine; Nano Review; Nanochemistry; Nanoscale Science and Technology; Nanotechnology; Nanotechnology and Microengineering; Power consumption; Sensors; Fabrication; Actuators; Electrothermal; Electrostatic; Electromagnetic; Piezoresistive and sensors; MEMS; Capacitive; Piezoelectric

Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into a...