A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices - Algamili, Abdullah Saleh; Khir, Mohd Haris Md; Dennis, John Ojur; Ahmed, Abdelaziz Yousif; Alabsi, Sami Sultan; Ba Hashwan, Saeed Salem; Junaid, Mohammed M. (Nanoscale research letters, 2021)
Keywords: Actuation; Actuators; Capacitive; Chemistry and Materials Science; Electromagnetic; Electrostatic; Electrothermal; Fabrication; Materials Science; Microelectromechanical systems; Miniaturization; Molecular Medicine; Nano Review; Nanochemistry; Nanoscale Science and Technology; Nanotechnology; Nanotechnology and Microengineering; Power consumption; Sensors; Fabrication; Actuators; Electrothermal; Electrostatic; Electromagnetic; Piezoresistive and sensors; MEMS; Capacitive; Piezoelectric