A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices

Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into a...

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Published inNanoscale research letters Vol. 16; no. 1; pp. 16 - 21
Main Authors Algamili, Abdullah Saleh, Khir, Mohd Haris Md, Dennis, John Ojur, Ahmed, Abdelaziz Yousif, Alabsi, Sami Sultan, Ba Hashwan, Saeed Salem, Junaid, Mohammed M.
Format Journal Article
LanguageEnglish
Published New York Springer US 26.01.2021
Springer Nature B.V
SpringerOpen
Subjects
Actuation
Actuators
Capacitive
Chemistry and Materials Science
Electromagnetic
Electrostatic
Electrothermal
Fabrication
Materials Science
Microelectromechanical systems
Miniaturization
Molecular Medicine
Nano Review
Nanochemistry
Nanoscale Science and Technology
Nanotechnology
Nanotechnology and Microengineering
Power consumption
Sensors
Fabrication
Actuators
Electrothermal
Electrostatic
Electromagnetic
Piezoresistive and sensors
MEMS
Capacitive
Piezoelectric
Online AccessGet full text
ISSN1556-276X
1931-7573
1556-276X
DOI10.1186/s11671-021-03481-7

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Abstract Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.
AbstractList Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.
Abstract Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.
Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.
ArticleNumber 16
Author Ba Hashwan, Saeed Salem
Algamili, Abdullah Saleh
Ahmed, Abdelaziz Yousif
Junaid, Mohammed M.
Khir, Mohd Haris Md
Dennis, John Ojur
Alabsi, Sami Sultan
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  orcidid: 0000-0001-6647-440X
  surname: Algamili
  fullname: Algamili, Abdullah Saleh
  email: aalgamili@gmail.com
  organization: Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS
– sequence: 2
  givenname: Mohd Haris Md
  surname: Khir
  fullname: Khir, Mohd Haris Md
  organization: Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS
– sequence: 3
  givenname: John Ojur
  surname: Dennis
  fullname: Dennis, John Ojur
  organization: Department of Fundamental and Applied Sciences, Universiti Teknologi PETRONAS
– sequence: 4
  givenname: Abdelaziz Yousif
  surname: Ahmed
  fullname: Ahmed, Abdelaziz Yousif
  organization: Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS
– sequence: 5
  givenname: Sami Sultan
  surname: Alabsi
  fullname: Alabsi, Sami Sultan
  organization: Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS
– sequence: 6
  givenname: Saeed Salem
  surname: Ba Hashwan
  fullname: Ba Hashwan, Saeed Salem
  organization: Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS
– sequence: 7
  givenname: Mohammed M.
  surname: Junaid
  fullname: Junaid, Mohammed M.
  organization: Department of Electrical and Electronic Engineering, Universiti Teknologi PETRONAS
BackLink https://www.ncbi.nlm.nih.gov/pubmed/33496852$$D View this record in MEDLINE/PubMed
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Issue 1
Keywords Fabrication
Actuators
Electrothermal
Electrostatic
Electromagnetic
Piezoresistive and sensors
MEMS
Capacitive
Piezoelectric
Language English
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Snippet Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically...
Abstract Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically...
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SubjectTerms Actuation
Actuators
Capacitive
Chemistry and Materials Science
Electromagnetic
Electrostatic
Electrothermal
Fabrication
Materials Science
Microelectromechanical systems
Miniaturization
Molecular Medicine
Nano Review
Nanochemistry
Nanoscale Science and Technology
Nanotechnology
Nanotechnology and Microengineering
Power consumption
Sensors
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Title A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor Devices
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Volume 16
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