Analytical Research of Temperature Distribution and Thermal Stresses within Circular Micro-hotplates

• Published in: 东华大学学报（英文版） Vol. 33; no. 6; pp. 997 - 1006
• Main Author: 于慧俐 李绪泉 胡松涛
• Format: Journal Article
• Language: English
• Published: School of Environmental and Municipal Engineering, Qingdao Technological University, Qingdao 266033, China 2016
• Subjects: von Mises stress; numerical solution; temperature distribution; micro-hotplate (MHP); analytical solutions; thermal analysis

Micro-hotplate （MHP） technology is one key part in the manufacturing of gas sensors. The pursuit of analytical solutions for the temperature distribution and also thermal stresses within the MHP is of intrinsic scientific interest. In this study, analytical solutions for the temperature field, and b...