Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres - Franz, Robert; Polcik, Peter; Anders, André (Surface & coatings technology, 2015)
Keywords: AlCr; Aluminium; Aluminum; Atmospheres; Background gas; Cathodes; Cathodic arc; Chromium; CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; Coatings; Composite cathode; Energy distribution; Ion energy distribution function; MATERIALS SCIENCE; Spots; Cathodic arc; Background gas; Ion energy distribution function; AlCr; Composite cathode