Integrated silicon photonic MEMS

• Published in: Microsystems & nanoengineering Vol. 9; no. 1; pp. 27 - 22
• Main Authors: Quack, Niels, Takabayashi, Alain Yuji, Sattari, Hamed, Edinger, Pierre, Jo, Gaehun, Bleiker, Simon J., Errando-Herranz, Carlos, Gylfason, Kristinn B., Niklaus, Frank, Khan, Umar, Verheyen, Peter, Mallik, Arun Kumar, Lee, Jun Su, Jezzini, Moises, Zand, Iman, Morrissey, Padraic, Antony, Cleitus, O’Brien, Peter, Bogaerts, Wim
• Format: Journal Article
• Language: English
• Published: London Nature Publishing Group UK 20.03.2023; Springer Nature B.V; Nature Publishing Group
• Subjects: 639/624/1111; 639/925/927; 639/925/927/359; Broadband; Component reliability; Data processing; Electromechanical devices; Engineering; Foundries; Germanium; Information processing; Integrated circuits; Interfaces; Large scale integration; Microelectromechanical systems; Modulators; Neuromodulation; Optical communication; Optics; Phase shifters; Photodiodes; Photonics; Power consumption; Power management; Quantum computing; Quantum phenomena; Silicon; Tuning; Very large scale integration; Wavelength division multiplexing; Other photonics; NEMS; Nanoscale devices

Silicon photonics has emerged as a mature technology that is expected to play a key role in critical emerging applications, including very high data rate optical communications, distance sensing for autonomous vehicles, photonic-accelerated computing, and quantum information processing. The success...