Integrated silicon photonic MEMS - Quack, Niels; Takabayashi, Alain Yuji; Sattari, Hamed; Edinger, Pierre; Jo, Gaehun; Bleiker, Simon J.; Errando-Herranz, Carlos; Gylfason, Kristinn B.; Niklaus, Frank; Khan, Umar; Verheyen, Peter; Mallik, Arun Kumar; et al. (Microsystems & nanoengineering, 2023)
Keywords: 639/624/1111; 639/925/927; 639/925/927/359; Broadband; Component reliability; Data processing; Electromechanical devices; Engineering; Foundries; Germanium; Information processing; Integrated circuits; Interfaces; Large scale integration; Microelectromechanical systems; Modulators; Neuromodulation; Optical communication; Optics; Phase shifters; Photodiodes; Photonics; Power consumption; Power management; Quantum computing; Quantum phenomena; Silicon; Tuning; Very large scale integration; Wavelength division multiplexing; Other photonics; NEMS; Nanoscale devices