APA (7th ed.) Citation

Quack, N., Takabayashi, A. Y., Sattari, H., Edinger, P., Jo, G., Bleiker, S. J., . . . Bogaerts, W. (2023). Integrated silicon photonic MEMS. Microsystems & nanoengineering, 9(1), 27-22. https://doi.org/10.1038/s41378-023-00498-z

Chicago Style (17th ed.) Citation

Quack, Niels, et al. "Integrated Silicon Photonic MEMS." Microsystems & Nanoengineering 9, no. 1 (2023): 27-22. https://doi.org/10.1038/s41378-023-00498-z.

MLA (9th ed.) Citation

Quack, Niels, et al. "Integrated Silicon Photonic MEMS." Microsystems & Nanoengineering, vol. 9, no. 1, 2023, pp. 27-22, https://doi.org/10.1038/s41378-023-00498-z.