二次离子质谱仪中二次中性粒子空间分布研究

为提高二次离子质谱仪（secondary ion mass spectrometer,SIMS）的灵敏度,引入了飞秒激光电离一次离子轰击溅射产生的二次中性粒子。实验以纯银、纯铜为目标样品,利用自主研制的飞行时间质谱仪分析二次后电离的离子,研究二次中性粒子的后电离效率和空间分布。结果表明：飞秒激光电离技术可将仪器的灵敏度提高70倍以上;飞秒激光电离出的^107 Ag＋和^109 Ag＋的同位素丰度比值误差为0.8%;二次中性粒子的空间分布符合Maxwell-Boltzmann模型。该结果可为在设计方法上提高SIMS仪器灵敏度提供依据。...

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Bibliographic Details
Published in质谱学报 Vol. 37; no. 3; pp. 222 - 228
Main Author 王培智 田地 龙涛 王利 包泽民 邱春玲 刘敦一
Format Journal Article
LanguageChinese
Published 吉林大学仪器科学与电气工程学院,吉林 长春,130021%中国地质科学院地质研究所,北京离子探针中心,北京 100037%大连民族大学,辽宁 大连,116600 2016
Subjects
中性粒子
二次离子质谱（SIMS）
飞秒激光后电离
neutral particles
femtosecond post-ionization
中性粒子
secondary ion mass spectrometer (SIMS)
二次离子质谱(SIMS)
飞秒激光后电离
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ISSN1004-2997
DOI10.7538/zpxb.2016.37.03.0222

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Summary:为提高二次离子质谱仪（secondary ion mass spectrometer,SIMS）的灵敏度,引入了飞秒激光电离一次离子轰击溅射产生的二次中性粒子。实验以纯银、纯铜为目标样品,利用自主研制的飞行时间质谱仪分析二次后电离的离子,研究二次中性粒子的后电离效率和空间分布。结果表明：飞秒激光电离技术可将仪器的灵敏度提高70倍以上;飞秒激光电离出的^107 Ag＋和^109 Ag＋的同位素丰度比值误差为0.8%;二次中性粒子的空间分布符合Maxwell-Boltzmann模型。该结果可为在设计方法上提高SIMS仪器灵敏度提供依据。
Bibliography:To improve the sensitivity of the secondary ion mass spectrometer （SIMS）, the secondary neutral particles was introduced, which was generated by the femtosecond laser ionizing the primary ion bombardment with the instantaneous power of 7 × 10^18 W/cm^2. In this experiment, the primary ion of oxygen shotted the surface of the sample with 15 keV energy and 45° angle, which was made of pure silver and pure copper. About 1.2 mm above the sample surface, the femtosecond laser was introduced and the secondary neutral particles were ionized by the former. With the impact of the extraction electrode electric field, the ion was bombarded by the primary ion and the remarkably improved by the femtosecond laser post-ionization counting. The error of the isotope ratio of the ^107Ag^＋ and ^109Ag^＋ ionized by the femtoseeond laser was 0.8%, while that of the ^107Ag^2＋ and ^109Ag^2＋ was 5.8%, and that of ^107Ag^＋ and ^109Ag^＋ ionized by the primary ion bombardment was 5.7%. It was because the femtosecond laser ionized the Ag
ISSN:1004-2997
DOI:10.7538/zpxb.2016.37.03.0222