One-step sputtering of MoSSe metastable phase as thin film and predicted thermodynamic stability by computational methods

• Published in: Scientific reports Vol. 14; no. 1; pp. 7104 - 11
• Main Authors: López-Galán, Oscar A., Boll, Torben, Nogan, John, Chassaing, Delphine, Welle, Alexander, Heilmaier, Martin, Ramos, Manuel
• Format: Journal Article
• Language: English
• Published: London Nature Publishing Group UK 26.03.2024; Nature Publishing Group; Nature Portfolio
• Subjects: 639/301/1005/1007; 639/301/1034/1038; electronic devices; electronic structure; Fabrication; Humanities and Social Sciences; Mass spectroscopy; MATERIALS SCIENCE; Molybdenum; Molybdenum disulfide; multidisciplinary; Raman spectroscopy; Scanning electron microscopy; Science; Science (multidisciplinary); Selenium; Spectrum analysis; Sulfur; Thin films

We present the fabrication of a MoS 2−x Se x thin film from a co-sputtering process using MoS 2 and MoSe 2 commercial targets with 99.9% purity. The sputtering of the MoS 2 and MoSe 2 was carried out using a straight and low-cost magnetron radio frequency sputtering recipe to achieve a MoS 2−x Se x...