A practical guide for the fabrication of microfluidic devices using glass and silicon

• Published in: Biomicrofluidics Vol. 6; no. 1; pp. 016505 - 016505-16
• Main Authors: Iliescu, Ciprian, Taylor, Hayden, Avram, Marioara, Miao, Jianmin, Franssila, Sami
• Format: Journal Article
• Language: English
• Published: United States American Institute of Physics 01.03.2012
• Subjects: Fabrication and Laboratory Methods

This paper describes the main protocols that are used for fabricating microfluidic devices from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their limitations are discussed. Bonding methods that can be used for joining these materials are summarized and key proc...