A practical guide for the fabrication of microfluidic devices using glass and silicon
This paper describes the main protocols that are used for fabricating microfluidic devices from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their limitations are discussed. Bonding methods that can be used for joining these materials are summarized and key proc...
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| Published in | Biomicrofluidics Vol. 6; no. 1; pp. 016505 - 016505-16 |
|---|---|
| Main Authors | , , , , |
| Format | Journal Article |
| Language | English |
| Published |
United States
American Institute of Physics
01.03.2012
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| Subjects | |
| Online Access | Get full text |
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| Abstract | This paper describes the main protocols that are used for fabricating microfluidic devices from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their limitations are discussed. Bonding methods that can be used for joining these materials are summarized and key process parameters are indicated. The paper also outlines techniques for forming electrical connections between microfluidic devices and external circuits. A framework is proposed for the synthesis of a complete glass/silicon device fabrication flow. |
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| AbstractList | This paper describes the main protocols that are used for fabricating microfluidic devices from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their limitations are discussed. Bonding methods that can be used for joining these materials are summarized and key process parameters are indicated. The paper also outlines techniques for forming electrical connections between microfluidic devices and external circuits. A framework is proposed for the synthesis of a complete glass/silicon device fabrication flow. This paper describes the main protocols that are used for fabricating microfluidic devices from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their limitations are discussed. Bonding methods that can be used for joining these materials are summarized and key process parameters are indicated. The paper also outlines techniques for forming electrical connections between microfluidic devices and external circuits. A framework is proposed for the synthesis of a complete glass/silicon device fabrication flow.This paper describes the main protocols that are used for fabricating microfluidic devices from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their limitations are discussed. Bonding methods that can be used for joining these materials are summarized and key process parameters are indicated. The paper also outlines techniques for forming electrical connections between microfluidic devices and external circuits. A framework is proposed for the synthesis of a complete glass/silicon device fabrication flow. |
| Author | Franssila, Sami Avram, Marioara Miao, Jianmin Taylor, Hayden Iliescu, Ciprian |
| Author_xml | – sequence: 1 givenname: Ciprian surname: Iliescu fullname: Iliescu, Ciprian email: ciliescu@ibn.a-star.edu.sg, hkt@ntu.edu.sg organization: Institute of Bioengineering and Nanotechnology – sequence: 2 givenname: Hayden surname: Taylor fullname: Taylor, Hayden email: ciliescu@ibn.a-star.edu.sg, hkt@ntu.edu.sg organization: 5Department of Materials Science and Engineering, School of Science and Technology, Aalto University, FI-00076 Aalto, Finland – sequence: 3 givenname: Marioara surname: Avram fullname: Avram, Marioara organization: National Institute for Research and Development in Microtechnologies – sequence: 4 givenname: Jianmin surname: Miao fullname: Miao, Jianmin organization: School of Mechanical and Aerospace Engineering, Nanyang Technological University – sequence: 5 givenname: Sami surname: Franssila fullname: Franssila, Sami organization: School of Science and Technology, Aalto University |
| BackLink | https://www.ncbi.nlm.nih.gov/pubmed/22662101$$D View this record in MEDLINE/PubMed |
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| Cites_doi | 10.1088/0960-1317/20/2/022001 10.1088/0960-1317/17/10/007 10.1088/0960-1317/18/1/015024 10.1088/0960-1317/18/6/064010 10.1016/S0924-4247(97)01360-5 10.1088/0960-1317/18/7/073001 10.1016/j.tibtech.2008.02.009 10.1063/1.3259624 10.1088/0960-1317/16/11/006 10.1016/0924-4247(94)00872-F 10.1039/b821324k 10.1109/84.825783 10.1126/science.261.5123.895 10.1039/b805554h 10.1063/1.2747187 10.1021/ac980656z 10.1016/j.sna.2007.11.022 10.1088/0960-1317/8/2/010 10.1088/0960-1317/15/3/009 10.1109/JMEMS.2006.883567 10.1016/j.sna.2005.11.003 10.1088/0960-1317/16/5/024 10.1109/JMEMS.2005.859102 10.1088/0960-1317/16/10/001 10.1016/S0924-4247(99)00299-X 10.1088/0960-1317/13/4/310 10.1016/j.sna.2006.10.009 10.1016/j.ijmachtools.2005.08.011 10.1039/b913331c 10.1088/0960-1317/19/7/075013 10.1126/science.288.5463.113 10.1088/0960-1317/17/4/014 10.1039/b820557b 10.1016/j.mee.2005.07.006 10.1088/0960-1317/15/11/019 10.1109/JMEMS.2009.2029976 10.1002/biot.v6.2 10.1109/JMEMS.2002.805211 10.1063/1.3515523 10.1039/b310866j 10.1007/s00339-007-4273-5 10.1007/s00542-008-0712-2 10.1088/0960-1317/16/5/R01 10.1039/c1lc20275h 10.1126/science.1076996 10.1016/j.snb.2004.12.069 10.1016/j.snb.2006.04.069 10.1016/j.sna.2009.01.018 10.1002/(ISSN)1522-2683 10.1016/j.surfcoat.2004.10.094 10.1063/1.3456626 10.1016/0925-4005(90)80210-Q 10.1016/S0042-207X(78)80514-4 10.1088/0960-1317/8/1/006 10.1016/j.sna.2003.12.013 10.1021/ac0703956 10.1088/0960-1317/17/9/002 10.1039/b925993g 10.1021/ac0494477 10.1063/1.3251125 10.1016/j.sna.2005.01.012 10.1021/ac801059h 10.3390/ijms10125411 10.1039/b912770d 10.1016/j.sna.2003.12.029 10.1038/nm1634 10.1149/1.3483163 10.1051/epjap:2008176 10.1088/0960-1317/14/6/R01 10.1016/j.electacta.2006.09.022 10.1063/1.3430542 10.1088/0960-1317/19/5/055001 10.1109/T-ED.1979.19791 10.1016/j.aca.2010.01.005 10.1039/b700101k 10.1007/s00542-006-0116-0 10.1016/j.sna.2004.03.004 10.1016/S0167-9317(03)00114-X 10.1088/0960-1317/17/1/006 10.1088/0960-1317/17/5/R01 10.1007/s00542-009-0879-1 10.1016/j.bios.2003.11.021 10.1016/j.sna.2006.06.044 10.1109/84.679398 10.1109/JMEMS.2011.2160043 10.1007/s00216-007-1692-2 10.1002/smll.v7.1 10.1039/c1lc20388f 10.1088/0960-1317/14/1/309 10.1109/JMEMS.2006.879671 10.1021/ac702296u 10.1016/j.talanta.2005.05.011 10.1002/1522-2683(200210)23:20<3511::AID-ELPS3511>3.0.CO;2-C 10.1088/0960-1317/13/4/305 10.1109/JMEMS.2003.820936 10.1109/JMEMS.2005.859200 10.1109/JMEMS.2006.879681 10.1088/0960-1317/11/2/303 10.1063/1.3474638 10.1073/pnas.0810903105 10.1016/j.sna.2004.09.004 10.1088/0960-1317/19/6/067001 10.1016/j.snb.2006.08.009 10.1088/0960-1317/21/3/035011 10.1109/JMEMS.2006.880292 10.1007/s10404-010-0580-9 10.1016/j.sna.2007.05.035 10.1016/j.snb.2005.06.009 10.1016/j.chroma.2009.12.009 10.1016/j.mee.2006.05.007 10.1088/0960-1317/19/3/033001 10.1088/1742-6596/34/1/128 10.1016/S0924-4247(98)80019-8 10.1109/JMEMS.2007.910258 10.1063/1.2168512 10.1149/1.2428090 10.1007/s10544-007-9159-y 10.1016/j.sna.2003.09.022 10.1039/b812812j |
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| PublicationDateYYYYMMDD | 2012-03-01 |
| PublicationDate_xml | – month: 03 year: 2012 text: 2012-03-01 day: 01 |
| PublicationDecade | 2010 |
| PublicationPlace | United States |
| PublicationPlace_xml | – name: United States |
| PublicationTitle | Biomicrofluidics |
| PublicationTitleAlternate | Biomicrofluidics |
| PublicationYear | 2012 |
| Publisher | American Institute of Physics |
| Publisher_xml | – name: American Institute of Physics |
| References | Grétillat, Paoletti, Thiébaud, Roth, Moudelka-Hep, de Rooij (c56) 1997; 60 Svarnas, Plecis, Nanteuil, Duong, David, Muller, Chen (c97) 2008; 44 Thorsen, Maerki, Quake (c10) 2002; 298 Tay, Iliescu, Jing, Miao (c49) 2006; 12 Terry, Jerman, Angell (c5) 1979; 26 Zhang, Bottausci, Rao, Parker, Mezic, MacDonald (c112) 2008; 10 Howlader, Suehara, Suga (c86) 2006; 127 Tay, Yu, Pang, Iliescu (c98) 2007; 52 Unger, Chou, Thorsen, Scherer, Quake (c11) 2000; 288 Friend, Yeo (c85) 2010; 4 Chen, Liu, Hromada, Tsao, Chang, DeVoe (c126) 2009; 9 Yu, Tay, Xu, Chen, Avram, Iliescu (c102) 2006; 34 Saarela, Franssila, Tuomikoski, Marttila, Östman, Sikanen, Kotiaho, Kostiainen (c131) 2005; 114 Abgrall, Gue (c7) 2007; 17 Han, Mao, Fu (c25) 2006; 602 Allen, Chiu (c84) 2008; 80 Chae, Giachino, Najafi (c123) 2008; 17 Lichtenberg, Verpoorte, de Rooij (c87) 2001; 22 Poenar, Iliescu, Carp, Pang, Leck (c105) 2007; 139 Resnik, Vrtacnik, Aljancic, Amon (c93) 2000; 80 Li, Abe, Esashi (c68) 2002; 1 Niklaus, Enoksson, Kälvesten, Stemme (c115) 2001; 11 Corman, Enokson, Stemme (c59) 1998; 8 Saarela, Haapala, Kostiainen, Kotiaho, Franssila (c88) 2009; 19 Sun, Morgan (c116) 2010; 8 Nguyen, Truong, Wong (c19) 2004; 14 Pipper, Inoue, Ng, Neuzil, Zhang, Novak (c26) 2007; 13 Martinez, Phillips, Whitesides (c23) 2008; 105 Schwartz, Robbins (c76) 1961; 108 Metz, Bertsch, Bertrand, Renaud (c114) 2004; 19 Jansen, de Boer, Unnikrishnan, Louwerse, Elwenspoek (c75) 2009; 19 Laser, Santiago (c28) 2004; 14 Iliescu, Chen (c53) 2008; 18 Quinn, Spearing, Ashby, Fleck (c43) 2006; 15 Haapala, Saarela, Pól, Kolari, Kotiaho, Franssila, Kostiainen (c92) 2010; 662 Steingoetter, Fouckhardt (c50) 2005; 15 Bhagat, Jothimuthu, Pais, Papautsky (c133) 2007; 17 Manz, Miyahara, Miura, Watanabe, Miyagi, Sato (c6) 1990; 1 Fu, Mao, Han (c24) 2008; 26 Carroll, Crain, Naber, Keynton, Walsh, Baldwin (c103) 2008; 8 Zhou, Virasawmy, Quan (c110) 2009; 15 Iliescu, Xu, Samper, Tay (c100) 2005; 15 Jia, Fang, Fang (c83) 2004; 76 Becker (c13) 2010; 10 Williams, Gupta, Wasilik (c48) 2003; 12 Marre, Jensen (c4) 2010; 39 Iliescu, Chen, Miao (c45) 2008; 143 Iliescu, Miao, Tay (c51) 2005; 117 Ciftlik, Gijs (c106) 2011; 21 Niklaus, Stemme, Lu, Gutmann (c101) 2006; 99 Nakashima, Yasuda (c31) 2007; 139 Liu, Shang, Tang, Huang (c90) 2011; 20 Wu, Lorenz, Hand (c109) 2009; 15 Mazurczyk, Vieillard, Bouchard, Hannes, Krawczyk (c58) 2006; 118 Valero, Braschler, Demierre, Renaud (c119) 2010; 4 Bu, Melvin, Ensell, Wilkinson, Evans (c64) 2004; 115 Iliescu., Poenar, Selvan (c95) 2010; 20 Yeo, Chang, Chan, Friend (c1) 2011; 7 Lewis, Hamilton, Rhodes, Halliday, Bartle, Homewood, Grenfell, Goody, Harling, Brewer, Vargha, Milton (c35) 2010; 1217 Paik, Byun, Lim, Park, Lee, Chung, Chang, Chun, Cho (c41) 2004; 114 Abgrall, Nguyen (c39) 2008; 80 Becker, Gärtner (c8) 2008; 390 Kim, Ahn, Lee, Kim (c81) 2006; 46 Oh, Ahn (c29) 2006; 16 Dijkstra, de Boer, Berenschot, Lammerink, Wiegerink, Elwenspoek (c42) 2007; 17 Carlborg, Haraldsson, Öberg, Malkoch, van der Wijngaart (c14) 2011; 11 Pethig (c118) 2010; 4 Tuomikoski, Franssila (c18) 2005; 120 Pawlowski, Belloy, Sayah, Gijs (c79) 2003; 67–68 Choi, Yeo, Kim, Ok, Kim, Kwon, Im (c111) 2009; 19 Datta, Gangopadhyay, Temkin, Pu, Liu (c96) 2006; 68 Harrison, Fluri, Seiler, Fan, Effenhauser, Manz (c33) 1993; 261 Iliescu, Poenar, Carp, Loe (c65) 2007; 123 Lee, Kjeang (c120) 2010; 4 Atencia, Cooksey, Jahn, Zook, Vreeland, Locascio (c134) 2010; 10 Haneveld, Jansen, Berenschot, Tas, Elwenspoek (c78) 2003; 13 Easley, Humphrey, Landers (c34) 2007; 17 Rogers, Kowal (c91) 1995; 46 Tiggelaar, van Male, Berenschot, Gardeniers, Oosterbroek, de Croon, Schouten, van den Berg, Elwenspoek (c27) 2005; 119 Ceyssens, Puers (c62) 2009; 19 Ni, Tong, Choudhury, Rahim, Iliescu, Yu (c3) 2009; 10 Sainiemi, Nissilä, Kostiainen, Ketola, Franssila (c32) 2011; 11 Metz, Jiguet, Bertsch, Renaud (c113) 2004; 4 Yilmaz, Ciftlik, Kulah (c108) 2011; 6 Iliescu, Tresset, Xu (c125) 2009; 3 Iliescu, Jing, Tay, Miao, Sun (c46) 2005; 198 Franssila, Marttila, Kolari, Östman, Kotiaho, Kostiainen, Lehtiniemi, Fager, Manninen (c30) 2006; 15 Papautsky, Brazzle, Swerdlow, Frazier (c38) 1998; 7 Zhang, Guo, Chen, Zhang, Li (c60) 2007; 17 de Boer, Tjerkstra, Berenschot, Jansen, Burger, Gardeniers, Elwenspoek, van den Berg (c40) 2000; 9 Corman, Enoksson, Stemme (c122) 1998; 66 Iliescu, Yu, Xu, Tay (c124) 2006; 15 James, Okandan, Mani, Galambos, Shul (c37) 2006; 16 Stjernströ, Roeraade (c55) 1998; 8 Bien, Rainey, Mitchel, Gamble (c57) 2003; 13 Park, Lee, Lee, Park, Park (c69) 2005; 82 Baram, Naftali (c71) 2006; 16 Saarela, Haapala, Kostiainen, Kotiaho, Franssila (c54) 2007; 7 Tuomikoski, Sikanen, Ketola, Kostiainen, Kotiaho, Franssila (c21) 2005; 26 Grossman (c82) 1978; 28 Esashi (c121) 2008; 18 Akashi, Yoshimura (c72) 2006; 16 Cheng, Lin, Lin, Chang (c117) 2010; 4 Lee, Bien, Badaruddin, Teh (c61) 2010; 13 Sikanen, Heikkilä, Tuomikoski, Ketola, Kostiainen, Franssila, Kotiaho (c20) 2007; 79 Youn, Takahashi, Goto, Maeda (c80) 2006; 83 Ziegler, Suzuki, Takeuchi (c107) 2006; 15 Mrozek (c94) 2009; 151 Mark, Haeberle, Roth, von Stetten, Zengerle (c2) 2010; 39 Kim, Cho, Lee, Kim (c36) 2005; 107 Kolari, Saarela, Franssila (c70) 2008; 18 Iliescu, Tresset, Xu (c99) 2007; 90 Duffy, McDonald, Schueller, Whitesides (c9) 1998; 70 Pekas, Zhang, Nannini, Juncker (c63) 2010; 10 Kim, Najafi (c104) 2005; 14 Pan, Baldi, Ziaie (c132) 2006; 15 Iliescu, Tay, Miao (c52) 2007; 133 Easter, O’Neal (c73) 2009; 18 Berthold, Laugere, Schellevis, de Boer, Laros, Guijt, Sarro, Vellekoop (c47) 2002; 23 Wang, Sugioka, Midorikawa (c67) 2007; 89 El-Ali, Perch-Nielsen, Poulsen, Bang, Telleman, Wolff (c22) 2004; 110 Mark, D.; Haeberle, S.; Roth, G.; von Stetten, F.; Zengerle, R. 2010; 39 Atencia, J.; Cooksey, G.; Jahn, A.; Zook, J.; Vreeland, W.; Locascio, L. 2010; 10 Howlader, M.; Suehara, S.; Suga, T. 2006; 127 Kim, D.; Ahn, Y.; Lee, S.; Kim, Y. 2006; 46 Martinez, A.; Phillips, S.; Whitesides, G. 2008; 105 Corman, T.; Enoksson, P.; Stemme, G. 1998; 66 Terry, S.; Jerman, J.; Angell, J. 1979; 26 Dijkstra, M.; de Boer, M.; Berenschot, J.; Lammerink, T.; Wiegerink, R.; Elwenspoek, M. 2007; 17 Franssila, S.; Marttila, S.; Kolari, K.; Östman, P.; Kotiaho, T.; Kostiainen, R.; Lehtiniemi, R.; Fager, C.-M.; Manninen, J. 2006; 15 Easter, C.; O'Neal, C. 2009; 18 Ni, M.; Tong, W.; Choudhury, D.; Rahim, N.; Iliescu, C.; Yu, H. 2009; 10 Wu, Q.; Lorenz, N.; Hand, D. 2009; 15 Thorsen, T.; Maerki, S.; Quake, S. 2002; 298 Pawlowski, A.; Belloy, E.; Sayah, A.; Gijs, M. 2003; 67-68 Yu, L.; Tay, F.; Xu, G.; Chen, B.; Avram, M.; Iliescu, C. 2006; 34 Duffy, D.; McDonald, J.; Schueller, O.; Whitesides, G. 1998; 70 Nguyen, N.-T.; Truong, T.-Q.; Wong, K.-K. 2004; 14 Schwartz, B.; Robbins, H. 1961; 108 Niklaus, F.; Stemme, G.; Lu, J.-Q.; Gutmann, R. 2006; 99 Akashi, T.; Yoshimura, Y. 2006; 16 Resnik, D.; Vrtacnik, D.; Aljancic, U.; Amon, S. 2000; 80 Esashi, M. 2008; 18 Liu, J.; Shang, J.; Tang, J.; Huang, Q.-A. 2011; 20 Han, J.; Mao, P.; Fu, J. 2006; 602 Zhang, H.; Guo, H.; Chen, Z.; Zhang, G.; Li, Z. 2007; 17 Haneveld, J.; Jansen, H.; Berenschot, E.; Tas, N.; Elwenspoek, M. 2003; 13 Tuomikoski, S.; Franssila, S. 2005; 120 Metz, S.; Bertsch, A.; Bertrand, D.; Renaud, P. 2004; 19 Berthold, A.; Laugere, F.; Schellevis, H.; de Boer, C.; Laros, M.; Guijt, R.; Sarro, P.; Vellekoop, M. 2002; 23 Saarela, V.; Haapala, M.; Kostiainen, R.; Kotiaho, T.; Franssila, S. 2007; 7 Becker, H.; Gärtner, C. 2008; 390 Jia, Z.-J.; Fang, Q.; Fang, Z.-L. 2004; 76 Iliescu., C.; Poenar, D.; Selvan, S. 2010; 20 Iliescu, C.; Yu, L.; Xu, G.; Tay, F. 2006; 15 Kim, H.; Najafi, K. 2005; 14 Yilmaz, G.; Ciftlik, A.; Kulah, H. 2011; 6 Marre, S.; Jensen, K. 2010; 39 Becker, H. 2010; 10 Iliescu, C.; Poenar, D.; Carp, M.; Loe, F. 2007; 123 Allen, P.; Chiu, D. 2008; 80 Grétillat, M.; Paoletti, F.; Thiébaud, P.; Roth, S.; Moudelka-Hep, M.; de Rooij, N. 1997; 60 Bu, M.; Melvin, T.; Ensell, G.; Wilkinson, J.; Evans, A. 2004; 115 Corman, T.; Enokson, P.; Stemme, G. 1998; 8 Youn, S.; Takahashi, M.; Goto, H.; Maeda, R. 2006; 83 Iliescu, C.; Chen, B. 2008; 18 Jansen, H.; de Boer, M.; Unnikrishnan, S.; Louwerse, M.; Elwenspoek, M. 2009; 19 Saarela, V.; Haapala, M.; Kostiainen, R.; Kotiaho, T.; Franssila, S. 2009; 19 Chen, C.; Liu, J.; Hromada, L.; Tsao, C.; Chang, C.; DeVoe, D. 2009; 9 Tuomikoski, S.; Sikanen, T.; Ketola, R.; Kostiainen, R.; Kotiaho, T.; Franssila, S. 2005; 26 Lewis, A.; Hamilton, J.; Rhodes, C.; Halliday, J.; Bartle, K.; Homewood, P.; Grenfell, R.; Goody, B.; Harling, A.; Brewer, P.; Vargha, G.; Milton, M. 2010; 1217 Stjernströ, M.; Roeraade, J. 1998; 8 Manz, A.; Miyahara, Y.; Miura, J.; Watanabe, Y.; Miyagi, H.; Sato, K. 1990; 1 Easley, C.; Humphrey, J.; Landers, J. 2007; 17 Unger, M.; Chou, P.; Thorsen, T.; Scherer, A.; Quake, S. 2000; 288 Iliescu, C.; Tresset, G.; Xu, G. 2007; 90 Iliescu, C.; Tresset, G.; Xu, G. 2009; 3 Ceyssens, F.; Puers, R. 2009; 19 Abgrall, P.; Nguyen, N.-T. 2008; 80 Pekas, N.; Zhang, Q.; Nannini, M.; Juncker, D. 2010; 10 Baram, A.; Naftali, M. 2006; 16 Oh, K.; Ahn, C. 2006; 16 Yeo, L.; Chang, H.-C.; Chan, P.; Friend, J. 2011; 7 Nakashima, Y.; Yasuda, T. 2007; 139 Sun, T.; Morgan, H. 2010; 8 Carlborg, C.; Haraldsson, T.; Öberg, K.; Malkoch, M.; van der Wijngaart, W. 2011; 11 Pan, T.; Baldi, A.; Ziaie, B. 2006; 15 Fu, J.; Mao, P.; Han, J. 2008; 26 Lee, H.; Bien, D.; Badaruddin, S.; Teh, A. 2010; 13 Tiggelaar, R.; van Male, P.; Berenschot, J.; Gardeniers, J.; Oosterbroek, R.; de Croon, M.; Schouten, J.; van den Berg, A.; Elwenspoek, M. 2005; 119 Saarela, V.; Franssila, S.; Tuomikoski, S.; Marttila, S.; Östman, P.; Sikanen, T.; Kotiaho, T.; Kostiainen, R. 2005; 114 Grossman, D. 1978; 28 Niklaus, F.; Enoksson, P.; Kälvesten, E.; Stemme, G. 2001; 11 Chae, J.; Giachino, J.; Najafi, K. 2008; 17 Metz, S.; Jiguet, S.; Bertsch, A.; Renaud, P. 2004; 4 Wang, Z.; Sugioka, K.; Midorikawa, K. 2007; 89 Park, J.; Lee, N.-E.; Lee, J.; Park, J.; Park, H. 2005; 82 Lee, J.; Kjeang, E. 2010; 4 Zhang, Y.; Bottausci, F.; Rao, M.; Parker, E.; Mezic, I.; MacDonald, N. 2008; 10 Poenar, D.; Iliescu, C.; Carp, M.; Pang, A.; Leck, K. 2007; 139 Rogers, T.; Kowal, J. 1995; 46 Datta, A.; Gangopadhyay, S.; Temkin, H.; Pu, Q.; Liu, S. 2006; 68 James, C.; Okandan, M.; Mani, S.; Galambos, P.; Shul, R. 2006; 16 Mazurczyk, R.; Vieillard, J.; Bouchard, A.; Hannes, B.; Krawczyk, S. 2006; 118 Harrison, D.; Fluri, K.; Seiler, K.; Fan, Z.; Effenhauser, C.; Manz, A. 1993; 261 Mrozek, P. 2009; 151 Tay, F.; Iliescu, C.; Jing, J.; Miao, J. 2006; 12 Li, X.; Abe, T.; Esashi, M. 2002; 1 Bien, D.; Rainey, P.; Mitchel, S.; Gamble, H. 2003; 13 Abgrall, P.; Gue, A.-M. 2007; 17 Choi, D.-H.; Yeo, C.-H.; Kim, J.-T.; Ok, C.-W.; Kim, J.-S.; Kwon, Y.; Im, Y.-H. 2009; 19 Svarnas, P.; Plecis, A.; Nanteuil, C.; Duong, D.; David, C.; Muller, M.; Chen, Y. 2008; 44 Ciftlik, A; Gijs, M. 2011; 21 Williams, K.; Gupta, K.; Wasilik, M. 2003; 12 Laser, D.; Santiago, J. 2004; 14 Pipper, J.; Inoue, M.; Ng, L.; Neuzil, P.; Zhang, Y.; Novak, L. 2007; 13 Papautsky, I.; Brazzle, J.; Swerdlow, H.; Frazier, A. 1998; 7 Iliescu, C.; Miao, J.; Tay, F. 2005; 117 Sikanen, T.; Heikkilä, L.; Tuomikoski, S.; Ketola, R.; Kostiainen, R.; Franssila, S.; Kotiaho, T. 2007; 79 Sainiemi, L.; Nissilä, T.; Kostiainen, R.; Ketola, R.; Franssila, S. 2011; 11 Valero, A.; Braschler, T.; Demierre, N.; Renaud, P. 2010; 4 Cheng, I.-F.; Lin, C.-C.; Lin, D.-Y.; Chang, H.-C. 2010; 4 Haapala, M.; Saarela, V.; Pól, J.; Kolari, K.; Kotiaho, T.; Franssila, S.; Kostiainen, R. 2010; 662 de Boer, M.; Tjerkstra, R.; Berenschot, J.; Jansen, H.; Burger, G.; Gardeniers, J.; Elwenspoek, M.; van den Berg, A. 2000; 9 Paik, S.-J.; Byun, S.; Lim, J.-M.; Park, Y.; Lee, A.; Chung, S.; Chang, J.; Chun, K.; Cho, D. 2004; 114 Steingoetter, I.; Fouckhardt, H. 2005; 15 Kolari, K.; Saarela, V.; Franssila, S. 2008; 18 Iliescu, C.; Xu, G.; Samper, V.; Tay, F. 2005; 15 Lichtenberg, J.; Verpoorte, E.; de Rooij, N. 2001; 22 Zhou, X.; Virasawmy, S.; Quan, C. 2009; 15 Iliescu, C.; Chen, B.; Miao, J. 2008; 143 Bhagat, A.; Jothimuthu, P.; Pais, A.; Papautsky, I. 2007; 17 Iliescu, C.; Jing, J.; Tay, F.; Miao, J.; Sun, T. 2005; 198 Ziegler, D.; Suzuki, T.; Takeuchi, S. 2006; 15 Iliescu, C.; Tay, F.; Miao, J. 2007; 133 Quinn, D.; Spearing, S.; Ashby, M.; Fleck, N. 2006; 15 Kim, M.-S.; Cho, S.; Lee, K.-N.; Kim, Y.-K. 2005; 107 Pethig, R. 2010; 4 El-Ali, J.; Perch-Nielsen, I.; Poulsen, C.; Bang, D.; Telleman, P.; Wolff, A. 2004; 110 Tay, F.; Yu, L.; Pang, A.; Iliescu, C. 2007; 52 Carroll, S.; Crain, M.; Naber, J.; Keynton, R.; Walsh, K.; Baldwin, R. 2008; 8 Friend, J.; Yeo, L. 2010; 4 (2023080105041423600_c81) 2006; 46 (2023080105041423600_c45) 2008; 143 (2023080105041423600_c111) 2009; 19 (2023080105041423600_c101) 2006; 99 (2023080105041423600_c18) 2005; 120 (2023080105041423600_c88) 2009; 19 (2023080105041423600_c92) 2010; 662 (2023080105041423600_c102) 2006; 34 (2023080105041423600_c76) 1961; 108 (2023080105041423600_c1) 2011; 7 (2023080105041423600_c106) 2011; 21 Vossen (2023080105041423600_c77) 1978 (2023080105041423600_c104) 2005; 14 (2023080105041423600_c107) 2006; 15 (2023080105041423600_c20) 2007; 79 (2023080105041423600_c7) 2007; 17 (2023080105041423600_c9) 1998; 70 (2023080105041423600_c79) 2003; 67–68 (2023080105041423600_c19) 2004; 14 (2023080105041423600_c51) 2005; 117 2023080105041423600_c66 (2023080105041423600_c95) 2010; 20 (2023080105041423600_c115) 2001; 11 (2023080105041423600_c132) 2006; 15 (2023080105041423600_c120) 2010; 4 (2023080105041423600_c63) 2010; 10 (2023080105041423600_c74) 1992 (2023080105041423600_c52) 2007; 133 (2023080105041423600_c23) 2008; 105 (2023080105041423600_c21) 2005; 26 (2023080105041423600_c59) 1998; 8 (2023080105041423600_c98) 2007; 52 2023080105041423600_c128 (2023080105041423600_c67) 2007; 89 2023080105041423600_c129 (2023080105041423600_c75) 2009; 19 (2023080105041423600_c5) 1979; 26 (2023080105041423600_c41) 2004; 114 (2023080105041423600_c113) 2004; 4 (2023080105041423600_c11) 2000; 288 (2023080105041423600_c85) 2010; 4 (2023080105041423600_c64) 2004; 115 (2023080105041423600_c50) 2005; 15 Lindroos (2023080105041423600_c17) 2010 (2023080105041423600_c116) 2010; 8 (2023080105041423600_c31) 2007; 139 (2023080105041423600_c53) 2008; 18 (2023080105041423600_c72) 2006; 16 (2023080105041423600_c4) 2010; 39 (2023080105041423600_c58) 2006; 118 (2023080105041423600_c68) 2002; 1 (2023080105041423600_c118) 2010; 4 (2023080105041423600_c35) 2010; 1217 (2023080105041423600_c38) 1998; 7 (2023080105041423600_c131) 2005; 114 (2023080105041423600_c91) 1995; 46 (2023080105041423600_c125) 2009; 3 (2023080105041423600_c47) 2002; 23 (2023080105041423600_c6) 1990; 1 (2023080105041423600_c22) 2004; 110 (2023080105041423600_c33) 1993; 261 (2023080105041423600_c26) 2007; 13 (2023080105041423600_c105) 2007; 139 (2023080105041423600_c16) 2008 (2023080105041423600_c44) 2002 (2023080105041423600_c97) 2008; 44 (2023080105041423600_c123) 2008; 17 2023080105041423600_c130 2023080105041423600_c135 (2023080105041423600_c70) 2008; 18 (2023080105041423600_c62) 2009; 19 (2023080105041423600_c61) 2010; 13 (2023080105041423600_c10) 2002; 298 (2023080105041423600_c2) 2010; 39 (2023080105041423600_c86) 2006; 127 (2023080105041423600_c46) 2005; 198 (2023080105041423600_c48) 2003; 12 (2023080105041423600_c69) 2005; 82 (2023080105041423600_c37) 2006; 16 (2023080105041423600_c55) 1998; 8 (2023080105041423600_c108) 2011; 6 (2023080105041423600_c29) 2006; 16 (2023080105041423600_c78) 2003; 13 (2023080105041423600_c8) 2008; 390 (2023080105041423600_c80) 2006; 83 (2023080105041423600_c56) 1997; 60 (2023080105041423600_c87) 2001; 22 (2023080105041423600_c112) 2008; 10 (2023080105041423600_c99) 2007; 90 (2023080105041423600_c119) 2010; 4 (2023080105041423600_c34) 2007; 17 (2023080105041423600_c100) 2005; 15 2023080105041423600_c15 (2023080105041423600_c121) 2008; 18 (2023080105041423600_c32) 2011; 11 (2023080105041423600_c42) 2007; 17 (2023080105041423600_c27) 2005; 119 (2023080105041423600_c109) 2009; 15 (2023080105041423600_c134) 2010; 10 (2023080105041423600_c3) 2009; 10 2023080105041423600_c12 (2023080105041423600_c127) 2000 (2023080105041423600_c65) 2007; 123 (2023080105041423600_c28) 2004; 14 (2023080105041423600_c40) 2000; 9 (2023080105041423600_c94) 2009; 151 (2023080105041423600_c90) 2011; 20 (2023080105041423600_c43) 2006; 15 (2023080105041423600_c103) 2008; 8 (2023080105041423600_c39) 2008; 80 (2023080105041423600_c60) 2007; 17 (2023080105041423600_c13) 2010; 10 (2023080105041423600_c24) 2008; 26 (2023080105041423600_c114) 2004; 19 (2023080105041423600_c14) 2011; 11 (2023080105041423600_c122) 1998; 66 (2023080105041423600_c30) 2006; 15 (2023080105041423600_c82) 1978; 28 (2023080105041423600_c57) 2003; 13 (2023080105041423600_c93) 2000; 80 2023080105041423600_c89 (2023080105041423600_c110) 2009; 15 (2023080105041423600_c133) 2007; 17 (2023080105041423600_c83) 2004; 76 (2023080105041423600_c71) 2006; 16 (2023080105041423600_c124) 2006; 15 (2023080105041423600_c117) 2010; 4 (2023080105041423600_c126) 2009; 9 (2023080105041423600_c84) 2008; 80 (2023080105041423600_c49) 2006; 12 (2023080105041423600_c25) 2006; 602 (2023080105041423600_c36) 2005; 107 (2023080105041423600_c54) 2007; 7 (2023080105041423600_c73) 2009; 18 (2023080105041423600_c96) 2006; 68 |
| References_xml | – volume: 1 start-page: 625 year: 2002 ident: c68 publication-title: J. Microelectromech. Syst. – volume: 108 start-page: 365 year: 1961 ident: c76 publication-title: J. Electrochem. Soc. – volume: 44 start-page: 245 year: 2008 ident: c97 publication-title: Eur. Phys. J.: Appl. Phys. – volume: 26 start-page: 4691 year: 2005 ident: c21 publication-title: Electrophoresis – volume: 662 start-page: 163 year: 2010 ident: c92 publication-title: Anal. Chim. Acta – volume: 12 start-page: 935 year: 2006 ident: c49 publication-title: Microsyst. Technol. – volume: 19 start-page: 067001 year: 2009 ident: c62 publication-title: J. Micromech. Microeng. – volume: 4 start-page: 041301 year: 2010 ident: c120 publication-title: Biomicrofluidics – volume: 80 start-page: 2326 year: 2008 ident: c39 publication-title: Anal. Chem. – volume: 11 start-page: 100 year: 2001 ident: c115 publication-title: J. Micromech. Microeng. – volume: 118 start-page: 11 year: 2006 ident: c58 publication-title: Sens. Actuators B – volume: 4 start-page: 114 year: 2004 ident: c113 publication-title: Lab Chip – volume: 46 start-page: 1064 year: 2006 ident: c81 publication-title: Int. J. Mach. Tools Manuf. – volume: 110 start-page: 3 year: 2004 ident: c22 publication-title: Sens. Actuators, A – volume: 18 start-page: 064010 year: 2008 ident: c70 publication-title: J. Micromech. Microeng. – volume: 139 start-page: 252 year: 2007 ident: c31 publication-title: Sens. Actuators, A – volume: 15 start-page: 1051 year: 2009 ident: c109 publication-title: Microsyst. Technol. – volume: 1217 start-page: 768 year: 2010 ident: c35 publication-title: J. Chromatogr. A – volume: 20 start-page: 909 year: 2011 ident: c90 publication-title: J. Microelectromech. Syst. – volume: 14 start-page: 1347 year: 2005 ident: c104 publication-title: J. Microelectromech. Syst. – volume: 16 start-page: 1051 year: 2006 ident: c72 publication-title: J. Micromech. Microeng. – volume: 4 start-page: 026502 year: 2010 ident: c85 publication-title: Biomicrofluidics – volume: 13 start-page: 1259 year: 2007 ident: c26 publication-title: Nat. Med. – volume: 20 start-page: 022001 year: 2010 ident: c95 publication-title: J. Micromech. Microeng. – volume: 80 start-page: 7153 year: 2008 ident: c84 publication-title: Anal. Chem. – volume: 198 start-page: 314 year: 2005 ident: c46 publication-title: Surf. Coat. Technol. – volume: 79 start-page: 6255 year: 2007 ident: c20 publication-title: Anal. Chem. – volume: 9 start-page: 94 year: 2000 ident: c40 publication-title: J. Microelectromech. Syst. – volume: 12 start-page: 761 year: 2003 ident: c48 publication-title: J. Microeletromech. Syst. – volume: 288 start-page: 113 year: 2000 ident: c11 publication-title: Science – volume: 21 start-page: 035011 year: 2011 ident: c106 publication-title: J. Micromech. Microeng. – volume: 114 start-page: 276 year: 2004 ident: c41 publication-title: Sens. Actuators, A – volume: 17 start-page: 775 year: 2007 ident: c60 publication-title: J. Micromech. Microeng. – volume: 99 start-page: 031101 year: 2006 ident: c101 publication-title: J. Appl. Phys. – volume: 17 start-page: 1971 year: 2007 ident: c42 publication-title: J. Micromech. Microeng. – volume: 17 start-page: 42 year: 2007 ident: c133 publication-title: J. Micromech. Microeng. – volume: 18 start-page: 15024 year: 2008 ident: c53 publication-title: J. Micromech. Microeng. – volume: 39 start-page: 1153 year: 2010 ident: c2 publication-title: Chem. Soc. Rev. – volume: 28 start-page: 55 year: 1978 ident: c82 publication-title: Vacuum – volume: 151 start-page: 77 year: 2009 ident: c94 publication-title: Sens. Actuators, A – volume: 298 start-page: 580 year: 2002 ident: c10 publication-title: Science – volume: 127 start-page: 31 year: 2006 ident: c86 publication-title: Sens. Actuators, A – volume: 26 start-page: 1880 year: 1979 ident: c5 publication-title: IEEE Trans. Electron Devices – volume: 9 start-page: 50 year: 2009 ident: c126 publication-title: Lab Chip – volume: 10 start-page: 246 year: 2010 ident: c134 publication-title: Lab Chip – volume: 70 start-page: 4974 year: 1998 ident: c9 publication-title: Anal. Chem. – volume: 15 start-page: 1477 year: 2006 ident: c107 publication-title: J. Microelectromech. Syst. – volume: 80 start-page: 68 year: 2000 ident: c93 publication-title: Sens. Actuators, A – volume: 10 start-page: 509 year: 2008 ident: c112 publication-title: Biomed. Microdevices – volume: 17 start-page: 193 year: 2008 ident: c123 publication-title: J. Microelectromech. Syst. – volume: 15 start-page: 494 year: 2005 ident: c100 publication-title: J. Micromech. Microeng. – volume: 89 start-page: 951 year: 2007 ident: c67 publication-title: Appl. Phys. A – volume: 34 start-page: 776 year: 2006 ident: c102 publication-title: J. Phys.: Conf. Ser. – volume: 26 start-page: 311 year: 2008 ident: c24 publication-title: Trends Biotechnol. – volume: 15 start-page: 1039 year: 2006 ident: c43 publication-title: J. Microelectromech. Syst. – volume: 11 start-page: 3136 year: 2011 ident: c14 publication-title: Lab Chip – volume: 7 start-page: 267 year: 1998 ident: c38 publication-title: J. Microelectromech. Syst. – volume: 19 start-page: 1309 year: 2004 ident: c114 publication-title: Biosens. Bioelectron. – volume: 14 start-page: 69 year: 2004 ident: c19 publication-title: J. Micromech. Microeng. – volume: 13 start-page: S34 year: 2003 ident: c57 publication-title: J. Micromech. Microeng. – volume: 15 start-page: 1251 year: 2006 ident: c30 publication-title: J. Microelectromech. Syst. – volume: 15 start-page: 573 year: 2009 ident: c110 publication-title: Microsyst. Technol. – volume: 8 start-page: 423 year: 2010 ident: c116 publication-title: Microfluid. Nanofluid. – volume: 8 start-page: 33 year: 1998 ident: c55 publication-title: J. Micromech. Microeng. – volume: 15 start-page: 1506 year: 2006 ident: c124 publication-title: J. Microelectromech. Syst. – volume: 7 start-page: 12 year: 2011 ident: c1 publication-title: Small – volume: 16 start-page: 2287 year: 2006 ident: c71 publication-title: J. Micromech. Microeng. – volume: 52 start-page: 2862 year: 2007 ident: c98 publication-title: Electrochim. Acta – volume: 6 start-page: 185 year: 2011 ident: c108 publication-title: Biotechnol. J. – volume: 16 start-page: R13 year: 2006 ident: c29 publication-title: J. Micromech. Microeng. – volume: 4 start-page: 034104 year: 2010 ident: c117 publication-title: Biomicrofluidics – volume: 83 start-page: 2482 year: 2006 ident: c80 publication-title: Microelectron. Eng. – volume: 14 start-page: R35 year: 2004 ident: c28 publication-title: J. Micromech. Microeng. – volume: 7 start-page: 644 year: 2007 ident: c54 publication-title: Lab Chip – volume: 4 start-page: 022811 year: 2010 ident: c118 publication-title: Biomicrofluidics – volume: 1 start-page: 249 year: 1990 ident: c6 publication-title: Sens. Actuators, B – volume: 19 start-page: 075013 year: 2009 ident: c111 publication-title: J. Micromech. Microeng. – volume: 18 start-page: 073001 year: 2008 ident: c121 publication-title: J. Micromech. Microeng. – volume: 82 start-page: 119 year: 2005 ident: c69 publication-title: Microelectron. Eng. – volume: 23 start-page: 3511 year: 2002 ident: c47 publication-title: Electrophoresis – volume: 602 start-page: 1194 year: 2006 ident: c25 publication-title: ECS Meeting Abstracts – volume: 39 start-page: 1183 year: 2010 ident: c4 publication-title: Chem. Soc. Rev. – volume: 17 start-page: R15 year: 2007 ident: c7 publication-title: J. Micromech. Microeng. – volume: 120 start-page: 408 year: 2005 ident: c18 publication-title: Sens. Actuators, A – volume: 123 start-page: 168 year: 2007 ident: c65 publication-title: Sens. Actuators B – volume: 68 start-page: 659 year: 2006 ident: c96 publication-title: Talanta – volume: 19 start-page: 055001 year: 2009 ident: c88 publication-title: J. Micromech. Microeng. – volume: 90 start-page: 234104 year: 2007 ident: c99 publication-title: Appl. Phys. Lett. – volume: 4 start-page: 022807 year: 2010 ident: c119 publication-title: Biomicrofluidics – volume: 117 start-page: 286 year: 2005 ident: c51 publication-title: Sens. Actuators, A – volume: 143 start-page: 154 year: 2008 ident: c45 publication-title: Sens. Actuators, A – volume: 15 start-page: 267 year: 2006 ident: c132 publication-title: J. Microelectromech. Syst. – volume: 107 start-page: 818 year: 2005 ident: c36 publication-title: Sens. Actuators B – volume: 17 start-page: 1758 year: 2007 ident: c34 publication-title: J. Micromech. Microeng. – volume: 115 start-page: 476 year: 2004 ident: c64 publication-title: Sens. Actuators, A – volume: 13 start-page: S62 year: 2003 ident: c78 publication-title: J. Micromech. Microeng. – volume: 133 start-page: 395 year: 2007 ident: c52 publication-title: Sens. Actuators, A – volume: 46 start-page: 113 year: 1995 ident: c91 publication-title: Sens. Actuators, A – volume: 67–68 start-page: 557 year: 2003 ident: c79 publication-title: Microelectron. Eng. – volume: 60 start-page: 219 year: 1997 ident: c56 publication-title: Sens. Actuators, A – volume: 139 start-page: 162 year: 2007 ident: c105 publication-title: Sens. Actuators, A – volume: 18 start-page: 1054 year: 2009 ident: c73 publication-title: J. Microelectromech. Syst. – volume: 10 start-page: 5411 year: 2009 ident: c3 publication-title: Int. J. Mol. Sci. – volume: 15 start-page: 2130 year: 2005 ident: c50 publication-title: J. Micromech. Microeng. – volume: 10 start-page: 271 year: 2010 ident: c13 publication-title: Lab Chip – volume: 10 start-page: 494 year: 2010 ident: c63 publication-title: Lab Chip – volume: 390 start-page: 89 year: 2008 ident: c8 publication-title: Anal. Bioanal. Chem. – volume: 119 start-page: 196 year: 2005 ident: c27 publication-title: Sens. Actuators, A – volume: 22 start-page: 258 year: 2001 ident: c87 publication-title: Electrophoresis – volume: 261 start-page: 895 year: 1993 ident: c33 publication-title: Science – volume: 16 start-page: 1909 year: 2006 ident: c37 publication-title: J. Micromech. Microeng. – volume: 105 start-page: 19606 year: 2008 ident: c23 publication-title: Proc. Natl. Acad. Sci. U.S.A. – volume: 13 start-page: H399 year: 2010 ident: c61 publication-title: Electrochem. Solid-State Lett. – volume: 66 start-page: 160 year: 1998 ident: c122 publication-title: Sens. Actuators, A – volume: 11 start-page: 3011 year: 2011 ident: c32 publication-title: Lab Chip – volume: 8 start-page: 1564 year: 2008 ident: c103 publication-title: Lab Chip – volume: 19 start-page: 033001 year: 2009 ident: c75 publication-title: J. Micromech. Microeng. – volume: 76 start-page: 5597 year: 2004 ident: c83 publication-title: Anal. Chem. – volume: 114 start-page: 552 year: 2005 ident: c131 publication-title: Sens. Actuators B – volume: 8 start-page: 84 year: 1998 ident: c59 publication-title: J. Micromech. Microeng. – volume: 3 start-page: 044104 year: 2009 ident: c125 publication-title: Biomicrofluidics – volume: 20 start-page: 022001 year: 2010 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/20/2/022001 – volume: 17 start-page: 1971 year: 2007 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/17/10/007 – volume: 18 start-page: 15024 year: 2008 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/18/1/015024 – volume: 18 start-page: 064010 year: 2008 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/18/6/064010 – volume: 60 start-page: 219 year: 1997 publication-title: Sens. Actuators, A doi: 10.1016/S0924-4247(97)01360-5 – volume: 18 start-page: 073001 year: 2008 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/18/7/073001 – volume: 26 start-page: 311 year: 2008 publication-title: Trends Biotechnol. doi: 10.1016/j.tibtech.2008.02.009 – volume: 4 start-page: 026502 year: 2010 publication-title: Biomicrofluidics doi: 10.1063/1.3259624 – volume: 16 start-page: 2287 year: 2006 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/16/11/006 – volume: 46 start-page: 113 year: 1995 publication-title: Sens. Actuators, A doi: 10.1016/0924-4247(94)00872-F – volume: 39 start-page: 1183 year: 2010 publication-title: Chem. Soc. Rev. doi: 10.1039/b821324k – volume: 9 start-page: 94 year: 2000 publication-title: J. Microelectromech. Syst. doi: 10.1109/84.825783 – volume: 261 start-page: 895 year: 1993 publication-title: Science doi: 10.1126/science.261.5123.895 – volume: 8 start-page: 1564 year: 2008 publication-title: Lab Chip doi: 10.1039/b805554h – volume: 90 start-page: 234104 year: 2007 publication-title: Appl. Phys. Lett. doi: 10.1063/1.2747187 – volume: 70 start-page: 4974 year: 1998 publication-title: Anal. Chem. doi: 10.1021/ac980656z – volume: 143 start-page: 154 year: 2008 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2007.11.022 – volume: 8 start-page: 84 year: 1998 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/8/2/010 – volume: 15 start-page: 494 year: 2005 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/15/3/009 – volume: 15 start-page: 1506 year: 2006 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2006.883567 – volume: 127 start-page: 31 year: 2006 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2005.11.003 – volume: 16 start-page: 1051 year: 2006 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/16/5/024 – volume: 14 start-page: 1347 year: 2005 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2005.859102 – volume: 16 start-page: 1909 year: 2006 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/16/10/001 – volume: 80 start-page: 68 year: 2000 publication-title: Sens. Actuators, A doi: 10.1016/S0924-4247(99)00299-X – volume: 13 start-page: S62 year: 2003 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/13/4/310 – volume: 139 start-page: 162 year: 2007 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2006.10.009 – volume: 46 start-page: 1064 year: 2006 publication-title: Int. J. Mach. Tools Manuf. doi: 10.1016/j.ijmachtools.2005.08.011 – volume: 10 start-page: 246 year: 2010 publication-title: Lab Chip doi: 10.1039/b913331c – volume: 19 start-page: 075013 year: 2009 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/19/7/075013 – volume: 288 start-page: 113 year: 2000 publication-title: Science doi: 10.1126/science.288.5463.113 – volume: 17 start-page: 775 year: 2007 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/17/4/014 – volume: 39 start-page: 1153 year: 2010 publication-title: Chem. Soc. Rev. doi: 10.1039/b820557b – volume: 82 start-page: 119 year: 2005 publication-title: Microelectron. Eng. doi: 10.1016/j.mee.2005.07.006 – volume: 15 start-page: 2130 year: 2005 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/15/11/019 – volume: 18 start-page: 1054 year: 2009 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2009.2029976 – volume: 6 start-page: 185 year: 2011 publication-title: Biotechnol. J. doi: 10.1002/biot.v6.2 – volume: 1 start-page: 625 year: 2002 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2002.805211 – volume: 4 start-page: 041301 year: 2010 publication-title: Biomicrofluidics doi: 10.1063/1.3515523 – volume: 4 start-page: 114 year: 2004 publication-title: Lab Chip doi: 10.1039/b310866j – volume: 89 start-page: 951 year: 2007 publication-title: Appl. Phys. A doi: 10.1007/s00339-007-4273-5 – volume: 15 start-page: 573 year: 2009 publication-title: Microsyst. Technol. doi: 10.1007/s00542-008-0712-2 – volume: 16 start-page: R13 year: 2006 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/16/5/R01 – volume: 11 start-page: 3011 year: 2011 publication-title: Lab Chip doi: 10.1039/c1lc20275h – volume: 298 start-page: 580 year: 2002 publication-title: Science doi: 10.1126/science.1076996 – volume: 107 start-page: 818 year: 2005 publication-title: Sens. Actuators B doi: 10.1016/j.snb.2004.12.069 – volume: 118 start-page: 11 year: 2006 publication-title: Sens. Actuators B doi: 10.1016/j.snb.2006.04.069 – volume: 151 start-page: 77 year: 2009 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2009.01.018 – volume: 26 start-page: 4691 year: 2005 publication-title: Electrophoresis doi: 10.1002/(ISSN)1522-2683 – volume: 198 start-page: 314 year: 2005 publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2004.10.094 – volume: 4 start-page: 022811 year: 2010 publication-title: Biomicrofluidics doi: 10.1063/1.3456626 – volume: 1 start-page: 249 year: 1990 publication-title: Sens. Actuators, B doi: 10.1016/0925-4005(90)80210-Q – volume: 28 start-page: 55 year: 1978 publication-title: Vacuum doi: 10.1016/S0042-207X(78)80514-4 – volume: 8 start-page: 33 year: 1998 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/8/1/006 – volume: 115 start-page: 476 year: 2004 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2003.12.013 – volume: 79 start-page: 6255 year: 2007 publication-title: Anal. Chem. doi: 10.1021/ac0703956 – volume: 17 start-page: 1758 year: 2007 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/17/9/002 – volume: 10 start-page: 271 year: 2010 publication-title: Lab Chip doi: 10.1039/b925993g – volume: 76 start-page: 5597 year: 2004 publication-title: Anal. Chem. doi: 10.1021/ac0494477 – volume: 3 start-page: 044104 year: 2009 publication-title: Biomicrofluidics doi: 10.1063/1.3251125 – volume: 120 start-page: 408 year: 2005 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2005.01.012 – volume: 80 start-page: 7153 year: 2008 publication-title: Anal. Chem. doi: 10.1021/ac801059h – volume: 10 start-page: 5411 year: 2009 publication-title: Int. J. Mol. Sci. doi: 10.3390/ijms10125411 – volume: 10 start-page: 494 year: 2010 publication-title: Lab Chip doi: 10.1039/b912770d – volume: 114 start-page: 276 year: 2004 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2003.12.029 – volume: 13 start-page: 1259 year: 2007 publication-title: Nat. Med. doi: 10.1038/nm1634 – volume: 13 start-page: H399 year: 2010 publication-title: Electrochem. Solid-State Lett. doi: 10.1149/1.3483163 – volume: 44 start-page: 245 year: 2008 publication-title: Eur. Phys. J.: Appl. Phys. doi: 10.1051/epjap:2008176 – volume: 14 start-page: R35 year: 2004 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/14/6/R01 – volume: 52 start-page: 2862 year: 2007 publication-title: Electrochim. Acta doi: 10.1016/j.electacta.2006.09.022 – volume: 4 start-page: 022807 year: 2010 publication-title: Biomicrofluidics doi: 10.1063/1.3430542 – volume: 19 start-page: 055001 year: 2009 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/19/5/055001 – volume: 26 start-page: 1880 year: 1979 publication-title: IEEE Trans. Electron Devices doi: 10.1109/T-ED.1979.19791 – volume: 662 start-page: 163 year: 2010 publication-title: Anal. Chim. Acta doi: 10.1016/j.aca.2010.01.005 – volume: 7 start-page: 644 year: 2007 publication-title: Lab Chip doi: 10.1039/b700101k – volume: 12 start-page: 935 year: 2006 publication-title: Microsyst. Technol. doi: 10.1007/s00542-006-0116-0 – volume: 117 start-page: 286 year: 2005 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2004.03.004 – volume: 67-68 start-page: 557 year: 2003 publication-title: Microelectron. Eng. doi: 10.1016/S0167-9317(03)00114-X – volume: 17 start-page: 42 year: 2007 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/17/1/006 – volume: 17 start-page: R15 year: 2007 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/17/5/R01 – volume: 15 start-page: 1051 year: 2009 publication-title: Microsyst. Technol. doi: 10.1007/s00542-009-0879-1 – volume: 19 start-page: 1309 year: 2004 publication-title: Biosens. Bioelectron. doi: 10.1016/j.bios.2003.11.021 – volume: 602 start-page: 1194 year: 2006 publication-title: ECS Meeting Abstracts – volume: 133 start-page: 395 year: 2007 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2006.06.044 – volume: 7 start-page: 267 year: 1998 publication-title: J. Microelectromech. Syst. doi: 10.1109/84.679398 – volume: 20 start-page: 909 year: 2011 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2011.2160043 – volume: 390 start-page: 89 year: 2008 publication-title: Anal. Bioanal. Chem. doi: 10.1007/s00216-007-1692-2 – volume: 7 start-page: 12 year: 2011 publication-title: Small doi: 10.1002/smll.v7.1 – volume: 11 start-page: 3136 year: 2011 publication-title: Lab Chip doi: 10.1039/c1lc20388f – volume: 14 start-page: 69 year: 2004 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/14/1/309 – volume: 15 start-page: 1251 year: 2006 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2006.879671 – volume: 80 start-page: 2326 year: 2008 publication-title: Anal. Chem. doi: 10.1021/ac702296u – volume: 68 start-page: 659 year: 2006 publication-title: Talanta doi: 10.1016/j.talanta.2005.05.011 – volume: 23 start-page: 3511 year: 2002 publication-title: Electrophoresis doi: 10.1002/1522-2683(200210)23:20<3511::AID-ELPS3511>3.0.CO;2-C – volume: 13 start-page: S34 year: 2003 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/13/4/305 – volume: 12 start-page: 761 year: 2003 publication-title: J. Microeletromech. Syst. doi: 10.1109/JMEMS.2003.820936 – volume: 15 start-page: 267 year: 2006 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2005.859200 – volume: 15 start-page: 1477 year: 2006 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2006.879681 – volume: 11 start-page: 100 year: 2001 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/11/2/303 – volume: 4 start-page: 034104 year: 2010 publication-title: Biomicrofluidics doi: 10.1063/1.3474638 – volume: 105 start-page: 19606 year: 2008 publication-title: Proc. Natl. Acad. Sci. U.S.A. doi: 10.1073/pnas.0810903105 – volume: 119 start-page: 196 year: 2005 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2004.09.004 – volume: 19 start-page: 067001 year: 2009 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/19/6/067001 – volume: 123 start-page: 168 year: 2007 publication-title: Sens. Actuators B doi: 10.1016/j.snb.2006.08.009 – volume: 21 start-page: 035011 year: 2011 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/21/3/035011 – volume: 15 start-page: 1039 year: 2006 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2006.880292 – volume: 8 start-page: 423 year: 2010 publication-title: Microfluid. Nanofluid. doi: 10.1007/s10404-010-0580-9 – volume: 139 start-page: 252 year: 2007 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2007.05.035 – volume: 114 start-page: 552 year: 2005 publication-title: Sens. Actuators B doi: 10.1016/j.snb.2005.06.009 – volume: 1217 start-page: 768 year: 2010 publication-title: J. Chromatogr. A doi: 10.1016/j.chroma.2009.12.009 – volume: 83 start-page: 2482 year: 2006 publication-title: Microelectron. Eng. doi: 10.1016/j.mee.2006.05.007 – volume: 19 start-page: 033001 year: 2009 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/19/3/033001 – volume: 34 start-page: 776 year: 2006 publication-title: J. Phys.: Conf. Ser. doi: 10.1088/1742-6596/34/1/128 – volume: 66 start-page: 160 year: 1998 publication-title: Sens. Actuators, A doi: 10.1016/S0924-4247(98)80019-8 – volume: 17 start-page: 193 year: 2008 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2007.910258 – volume: 22 start-page: 258 year: 2001 publication-title: Electrophoresis doi: 10.1002/(ISSN)1522-2683 – volume: 99 start-page: 031101 year: 2006 publication-title: J. Appl. Phys. doi: 10.1063/1.2168512 – volume: 108 start-page: 365 year: 1961 publication-title: J. Electrochem. Soc. doi: 10.1149/1.2428090 – volume: 10 start-page: 509 year: 2008 publication-title: Biomed. Microdevices doi: 10.1007/s10544-007-9159-y – volume: 110 start-page: 3 year: 2004 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2003.09.022 – volume: 9 start-page: 50 year: 2009 publication-title: Lab Chip doi: 10.1039/b812812j – volume: 261 start-page: 895 year: 1993 ident: 2023080105041423600_c33 publication-title: Science doi: 10.1126/science.261.5123.895 – ident: 2023080105041423600_c135 – volume: 288 start-page: 113 issue: 5463 year: 2000 ident: 2023080105041423600_c11 publication-title: Science doi: 10.1126/science.288.5463.113 – volume: 80 start-page: 7153 year: 2008 ident: 2023080105041423600_c84 publication-title: Anal. Chem. doi: 10.1021/ac801059h – volume: 1 start-page: 249 issue: 1–6 year: 1990 ident: 2023080105041423600_c6 publication-title: Sens. Actuators, B doi: 10.1016/0925-4005(90)80210-Q – volume: 4 start-page: 022811 year: 2010 ident: 2023080105041423600_c118 publication-title: Biomicrofluidics doi: 10.1063/1.3456626 – volume: 390 start-page: 89 year: 2008 ident: 2023080105041423600_c8 publication-title: Anal. Bioanal. Chem. doi: 10.1007/s00216-007-1692-2 – volume: 115 start-page: 476 year: 2004 ident: 2023080105041423600_c64 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2003.12.013 – volume: 7 start-page: 12 year: 2011 ident: 2023080105041423600_c1 publication-title: Small doi: 10.1002/smll.v7.1 – volume: 19 start-page: 033001 year: 2009 ident: 2023080105041423600_c75 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/19/3/033001 – volume-title: Handbook of Silicon Based MEMS Materials and Technologies year: 2010 ident: 2023080105041423600_c17 article-title: MEMS lithography – ident: 2023080105041423600_c129 – volume: 9 start-page: 94 year: 2000 ident: 2023080105041423600_c40 publication-title: J. Microelectromech. Syst. doi: 10.1109/84.825783 – volume: 7 start-page: 644 year: 2007 ident: 2023080105041423600_c54 publication-title: Lab Chip doi: 10.1039/b700101k – volume: 105 start-page: 19606 issue: 50 year: 2008 ident: 2023080105041423600_c23 publication-title: Proc. Natl. Acad. Sci. U.S.A. doi: 10.1073/pnas.0810903105 – volume: 18 start-page: 064010 year: 2008 ident: 2023080105041423600_c70 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/18/6/064010 – volume: 17 start-page: 193 year: 2008 ident: 2023080105041423600_c123 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2007.910258 – volume: 602 start-page: 1194 issue: 24 year: 2006 ident: 2023080105041423600_c25 publication-title: ECS Meeting Abstracts – volume-title: Fundamentals of Microfabrication year: 2002 ident: 2023080105041423600_c44 – volume: 16 start-page: 2287 year: 2006 ident: 2023080105041423600_c71 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/16/11/006 – volume: 11 start-page: 100 year: 2001 ident: 2023080105041423600_c115 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/11/2/303 – volume: 143 start-page: 154 year: 2008 ident: 2023080105041423600_c45 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2007.11.022 – volume: 10 start-page: 271 year: 2010 ident: 2023080105041423600_c13 publication-title: Lab Chip doi: 10.1039/b925993g – volume: 90 start-page: 234104 year: 2007 ident: 2023080105041423600_c99 publication-title: Appl. Phys. Lett. doi: 10.1063/1.2747187 – volume: 139 start-page: 162 year: 2007 ident: 2023080105041423600_c105 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2006.10.009 – volume: 133 start-page: 395 year: 2007 ident: 2023080105041423600_c52 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2006.06.044 – volume: 151 start-page: 77 year: 2009 ident: 2023080105041423600_c94 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2009.01.018 – volume: 18 start-page: 073001 year: 2008 ident: 2023080105041423600_c121 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/18/7/073001 – start-page: 674 volume-title: Proceedings of IEEE MEMS year: 2000 ident: 2023080105041423600_c127 – volume: 11 start-page: 3011 year: 2011 ident: 2023080105041423600_c32 publication-title: Lab Chip doi: 10.1039/c1lc20275h – volume: 13 start-page: H399 year: 2010 ident: 2023080105041423600_c61 publication-title: Electrochem. Solid-State Lett. doi: 10.1149/1.3483163 – volume: 107 start-page: 818 year: 2005 ident: 2023080105041423600_c36 publication-title: Sens. Actuators B doi: 10.1016/j.snb.2004.12.069 – volume: 60 start-page: 219 year: 1997 ident: 2023080105041423600_c56 publication-title: Sens. Actuators, A doi: 10.1016/S0924-4247(97)01360-5 – volume: 114 start-page: 276 year: 2004 ident: 2023080105041423600_c41 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2003.12.029 – ident: 2023080105041423600_c66 – volume: 4 start-page: 114 year: 2004 ident: 2023080105041423600_c113 publication-title: Lab Chip doi: 10.1039/b310866j – volume: 67–68 start-page: 557 year: 2003 ident: 2023080105041423600_c79 publication-title: Microelectron. Eng. doi: 10.1016/S0167-9317(03)00114-X – volume: 114 start-page: 552 year: 2005 ident: 2023080105041423600_c131 publication-title: Sens. Actuators B doi: 10.1016/j.snb.2005.06.009 – volume: 10 start-page: 494 year: 2010 ident: 2023080105041423600_c63 publication-title: Lab Chip doi: 10.1039/b912770d – volume: 18 start-page: 15024 year: 2008 ident: 2023080105041423600_c53 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/18/1/015024 – volume: 8 start-page: 84 year: 1998 ident: 2023080105041423600_c59 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/8/2/010 – volume: 21 start-page: 035011 year: 2011 ident: 2023080105041423600_c106 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/21/3/035011 – volume: 15 start-page: 1039 issue: 5 year: 2006 ident: 2023080105041423600_c43 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2006.880292 – volume: 89 start-page: 951 year: 2007 ident: 2023080105041423600_c67 publication-title: Appl. Phys. A doi: 10.1007/s00339-007-4273-5 – volume: 20 start-page: 022001 issue: 2 year: 2010 ident: 2023080105041423600_c95 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/20/2/022001 – volume: 17 start-page: 775 year: 2007 ident: 2023080105041423600_c60 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/17/4/014 – year: 1992 ident: 2023080105041423600_c74 – volume: 15 start-page: 573 year: 2009 ident: 2023080105041423600_c110 publication-title: Microsyst. Technol. doi: 10.1007/s00542-008-0712-2 – volume: 14 start-page: 1347 year: 2005 ident: 2023080105041423600_c104 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2005.859102 – volume: 17 start-page: 42 year: 2007 ident: 2023080105041423600_c133 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/17/1/006 – volume: 6 start-page: 185 year: 2011 ident: 2023080105041423600_c108 publication-title: Biotechnol. J. doi: 10.1002/biot.v6.2 – volume: 14 start-page: 69 year: 2004 ident: 2023080105041423600_c19 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/14/1/309 – volume: 19 start-page: 075013 year: 2009 ident: 2023080105041423600_c111 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/19/7/075013 – volume: 13 start-page: S62 year: 2003 ident: 2023080105041423600_c78 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/13/4/310 – volume: 10 start-page: 5411 issue: 12 year: 2009 ident: 2023080105041423600_c3 publication-title: Int. J. Mol. Sci. doi: 10.3390/ijms10125411 – volume: 76 start-page: 5597 year: 2004 ident: 2023080105041423600_c83 publication-title: Anal. Chem. doi: 10.1021/ac0494477 – volume-title: Thin Film Processes year: 1978 ident: 2023080105041423600_c77 article-title: Chemical etching – volume: 34 start-page: 776 year: 2006 ident: 2023080105041423600_c102 publication-title: J. Phys.: Conf. Ser. doi: 10.1088/1742-6596/34/1/128 – volume: 123 start-page: 168 year: 2007 ident: 2023080105041423600_c65 publication-title: Sens. Actuators B doi: 10.1016/j.snb.2006.08.009 – volume: 23 start-page: 3511 year: 2002 ident: 2023080105041423600_c47 publication-title: Electrophoresis doi: 10.1002/1522-2683(200210)23:20<3511::AID-ELPS3511>3.0.CO;2-C – volume: 8 start-page: 33 year: 1998 ident: 2023080105041423600_c55 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/8/1/006 – volume: 70 start-page: 4974 issue: 23 year: 1998 ident: 2023080105041423600_c9 publication-title: Anal. Chem. doi: 10.1021/ac980656z – volume: 108 start-page: 365 year: 1961 ident: 2023080105041423600_c76 publication-title: J. Electrochem. Soc. doi: 10.1149/1.2428090 – volume: 4 start-page: 022807 year: 2010 ident: 2023080105041423600_c119 publication-title: Biomicrofluidics doi: 10.1063/1.3430542 – volume: 10 start-page: 246 year: 2010 ident: 2023080105041423600_c134 publication-title: Lab Chip doi: 10.1039/b913331c – ident: 2023080105041423600_c89 – volume: 15 start-page: 1477 year: 2006 ident: 2023080105041423600_c107 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2006.879681 – ident: 2023080105041423600_c128 – volume: 46 start-page: 113 year: 1995 ident: 2023080105041423600_c91 publication-title: Sens. Actuators, A doi: 10.1016/0924-4247(94)00872-F – volume: 15 start-page: 494 year: 2005 ident: 2023080105041423600_c100 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/15/3/009 – volume: 15 start-page: 267 year: 2006 ident: 2023080105041423600_c132 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2005.859200 – volume: 8 start-page: 423 year: 2010 ident: 2023080105041423600_c116 publication-title: Microfluid. Nanofluid. doi: 10.1007/s10404-010-0580-9 – volume: 1217 start-page: 768 year: 2010 ident: 2023080105041423600_c35 publication-title: J. Chromatogr. A doi: 10.1016/j.chroma.2009.12.009 – volume: 83 start-page: 2482 issue: 11–12 year: 2006 ident: 2023080105041423600_c80 publication-title: Microelectron. Eng. doi: 10.1016/j.mee.2006.05.007 – volume: 82 start-page: 119 year: 2005 ident: 2023080105041423600_c69 publication-title: Microelectron. Eng. doi: 10.1016/j.mee.2005.07.006 – volume: 127 start-page: 31 year: 2006 ident: 2023080105041423600_c86 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2005.11.003 – volume: 4 start-page: 026502 year: 2010 ident: 2023080105041423600_c85 publication-title: Biomicrofluidics doi: 10.1063/1.3259624 – volume: 99 start-page: 031101 year: 2006 ident: 2023080105041423600_c101 publication-title: J. Appl. Phys. doi: 10.1063/1.2168512 – volume: 120 start-page: 408 year: 2005 ident: 2023080105041423600_c18 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2005.01.012 – volume: 19 start-page: 1309 year: 2004 ident: 2023080105041423600_c114 publication-title: Biosens. Bioelectron. doi: 10.1016/j.bios.2003.11.021 – volume: 15 start-page: 2130 year: 2005 ident: 2023080105041423600_c50 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/15/11/019 – volume: 7 start-page: 267 issue: 2 year: 1998 ident: 2023080105041423600_c38 publication-title: J. Microelectromech. Syst. doi: 10.1109/84.679398 – volume: 10 start-page: 509 year: 2008 ident: 2023080105041423600_c112 publication-title: Biomed. Microdevices doi: 10.1007/s10544-007-9159-y – volume: 46 start-page: 1064 year: 2006 ident: 2023080105041423600_c81 publication-title: Int. J. Mach. Tools Manuf. doi: 10.1016/j.ijmachtools.2005.08.011 – volume: 52 start-page: 2862 year: 2007 ident: 2023080105041423600_c98 publication-title: Electrochim. Acta doi: 10.1016/j.electacta.2006.09.022 – volume: 3 start-page: 044104 year: 2009 ident: 2023080105041423600_c125 publication-title: Biomicrofluidics doi: 10.1063/1.3251125 – volume: 28 start-page: 55 issue: 2 year: 1978 ident: 2023080105041423600_c82 publication-title: Vacuum doi: 10.1016/S0042-207X(78)80514-4 – volume: 16 start-page: 1909 issue: 10 year: 2006 ident: 2023080105041423600_c37 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/16/10/001 – volume: 22 start-page: 258 year: 2001 ident: 2023080105041423600_c87 publication-title: Electrophoresis doi: 10.1002/(ISSN)1522-2683 – volume: 44 start-page: 245 year: 2008 ident: 2023080105041423600_c97 publication-title: Eur. Phys. J.: Appl. Phys. doi: 10.1051/epjap:2008176 – volume: 4 start-page: 034104 year: 2010 ident: 2023080105041423600_c117 publication-title: Biomicrofluidics doi: 10.1063/1.3474638 – volume: 662 start-page: 163 year: 2010 ident: 2023080105041423600_c92 publication-title: Anal. Chim. Acta doi: 10.1016/j.aca.2010.01.005 – volume: 118 start-page: 11 year: 2006 ident: 2023080105041423600_c58 publication-title: Sens. Actuators B doi: 10.1016/j.snb.2006.04.069 – volume: 19 start-page: 055001 year: 2009 ident: 2023080105041423600_c88 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/19/5/055001 – volume-title: International Symposium on Nanomanufacturing (ISNM 2008) year: 2008 ident: 2023080105041423600_c16 – volume: 26 start-page: 4691 year: 2005 ident: 2023080105041423600_c21 publication-title: Electrophoresis doi: 10.1002/(ISSN)1522-2683 – volume: 117 start-page: 286 year: 2005 ident: 2023080105041423600_c51 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2004.03.004 – volume: 1 start-page: 625 year: 2002 ident: 2023080105041423600_c68 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2002.805211 – volume: 17 start-page: 1971 year: 2007 ident: 2023080105041423600_c42 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/17/10/007 – volume: 4 start-page: 041301 year: 2010 ident: 2023080105041423600_c120 publication-title: Biomicrofluidics doi: 10.1063/1.3515523 – volume: 26 start-page: 311 issue: 6 year: 2008 ident: 2023080105041423600_c24 publication-title: Trends Biotechnol. doi: 10.1016/j.tibtech.2008.02.009 – volume: 14 start-page: R35 year: 2004 ident: 2023080105041423600_c28 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/14/6/R01 – volume: 19 start-page: 067001 year: 2009 ident: 2023080105041423600_c62 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/19/6/067001 – volume: 18 start-page: 1054 year: 2009 ident: 2023080105041423600_c73 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2009.2029976 – volume: 15 start-page: 1506 year: 2006 ident: 2023080105041423600_c124 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2006.883567 – volume: 39 start-page: 1183 issue: 3 year: 2010 ident: 2023080105041423600_c4 publication-title: Chem. Soc. Rev. doi: 10.1039/b821324k – volume: 80 start-page: 2326 year: 2008 ident: 2023080105041423600_c39 publication-title: Anal. Chem. doi: 10.1021/ac702296u – volume: 15 start-page: 1051 year: 2009 ident: 2023080105041423600_c109 publication-title: Microsyst. Technol. doi: 10.1007/s00542-009-0879-1 – volume: 66 start-page: 160 year: 1998 ident: 2023080105041423600_c122 publication-title: Sens. Actuators, A doi: 10.1016/S0924-4247(98)80019-8 – volume: 26 start-page: 1880 issue: 12 year: 1979 ident: 2023080105041423600_c5 publication-title: IEEE Trans. Electron Devices doi: 10.1109/T-ED.1979.19791 – volume: 110 start-page: 3 year: 2004 ident: 2023080105041423600_c22 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2003.09.022 – volume: 12 start-page: 761 year: 2003 ident: 2023080105041423600_c48 publication-title: J. Microeletromech. Syst. doi: 10.1109/JMEMS.2003.820936 – volume: 16 start-page: 1051 year: 2006 ident: 2023080105041423600_c72 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/16/5/024 – volume: 13 start-page: S34 year: 2003 ident: 2023080105041423600_c57 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/13/4/305 – volume: 17 start-page: R15 year: 2007 ident: 2023080105041423600_c7 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/17/5/R01 – volume: 16 start-page: R13 year: 2006 ident: 2023080105041423600_c29 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/16/5/R01 – ident: 2023080105041423600_c130 – volume: 68 start-page: 659 year: 2006 ident: 2023080105041423600_c96 publication-title: Talanta doi: 10.1016/j.talanta.2005.05.011 – volume: 39 start-page: 1153 issue: 3 year: 2010 ident: 2023080105041423600_c2 publication-title: Chem. Soc. Rev. doi: 10.1039/b820557b – volume: 20 start-page: 909 issue: 4 year: 2011 ident: 2023080105041423600_c90 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2011.2160043 – volume: 119 start-page: 196 year: 2005 ident: 2023080105041423600_c27 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2004.09.004 – volume-title: Proceedings of MicroTAS 2011 ident: 2023080105041423600_c15 – volume: 298 start-page: 580 issue: 5593 year: 2002 ident: 2023080105041423600_c10 publication-title: Science doi: 10.1126/science.1076996 – volume: 17 start-page: 1758 year: 2007 ident: 2023080105041423600_c34 publication-title: J. Micromech. Microeng. doi: 10.1088/0960-1317/17/9/002 – volume: 9 start-page: 50 year: 2009 ident: 2023080105041423600_c126 publication-title: Lab Chip doi: 10.1039/b812812j – volume: 198 start-page: 314 year: 2005 ident: 2023080105041423600_c46 publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2004.10.094 – volume: 80 start-page: 68 year: 2000 ident: 2023080105041423600_c93 publication-title: Sens. Actuators, A doi: 10.1016/S0924-4247(99)00299-X – volume: 13 start-page: 1259 year: 2007 ident: 2023080105041423600_c26 publication-title: Nat. Med. doi: 10.1038/nm1634 – volume: 139 start-page: 252 year: 2007 ident: 2023080105041423600_c31 publication-title: Sens. Actuators, A doi: 10.1016/j.sna.2007.05.035 – volume: 8 start-page: 1564 year: 2008 ident: 2023080105041423600_c103 publication-title: Lab Chip doi: 10.1039/b805554h – volume: 79 start-page: 6255 issue: 16 year: 2007 ident: 2023080105041423600_c20 publication-title: Anal. Chem. doi: 10.1021/ac0703956 – volume: 12 start-page: 935 year: 2006 ident: 2023080105041423600_c49 publication-title: Microsyst. Technol. doi: 10.1007/s00542-006-0116-0 – ident: 2023080105041423600_c12 – volume: 15 start-page: 1251 year: 2006 ident: 2023080105041423600_c30 publication-title: J. Microelectromech. Syst. doi: 10.1109/JMEMS.2006.879671 – volume: 11 start-page: 3136 year: 2011 ident: 2023080105041423600_c14 publication-title: Lab Chip doi: 10.1039/c1lc20388f |
| SSID | ssj0051722 |
| Score | 2.4357138 |
| Snippet | This paper describes the main protocols that are used for fabricating microfluidic devices from glass and silicon. Methods for micropatterning glass and... |
| SourceID | pubmedcentral proquest pubmed crossref scitation |
| SourceType | Open Access Repository Aggregation Database Index Database Enrichment Source Publisher |
| StartPage | 016505 |
| SubjectTerms | Fabrication and Laboratory Methods |
| Title | A practical guide for the fabrication of microfluidic devices using glass and silicon |
| URI | http://dx.doi.org/10.1063/1.3689939 https://www.ncbi.nlm.nih.gov/pubmed/22662101 https://www.proquest.com/docview/1018634446 https://pubmed.ncbi.nlm.nih.gov/PMC3365353 |
| Volume | 6 |
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