Fabrication and characterization of nanostructures on insulator substrates by electron-beam-induced deposition - Song, Minghui; Furuya, Kazuo (Science and Technology of Advanced Materials, 2008)
Keywords: beam-induced effect; electron-beam-induced deposition; nanofabrication; nanostructure; Topical Review; beam-induced effect; nanostructure; electron-beam-induced deposition; nanofabrication