APA (7th ed.) Citation

Song, M., & Furuya, K. (2008). Fabrication and characterization of nanostructures on insulator substrates by electron-beam-induced deposition. Science and Technology of Advanced Materials, 9(2), 023002. https://doi.org/10.1088/1468-6996/9/2/023002

Chicago Style (17th ed.) Citation

Song, Minghui, and Kazuo Furuya. "Fabrication and Characterization of Nanostructures on Insulator Substrates by Electron-beam-induced Deposition." Science and Technology of Advanced Materials 9, no. 2 (2008): 023002. https://doi.org/10.1088/1468-6996/9/2/023002.

MLA (9th ed.) Citation

Song, Minghui, and Kazuo Furuya. "Fabrication and Characterization of Nanostructures on Insulator Substrates by Electron-beam-induced Deposition." Science and Technology of Advanced Materials, vol. 9, no. 2, 2008, p. 023002, https://doi.org/10.1088/1468-6996/9/2/023002.