Nanophotonic Pockels modulators on a silicon nitride platform

Silicon nitride (SiN) is emerging as a competitive platform for CMOS-compatible integrated photonics. However, active devices such as modulators are scarce and still lack in performance. Ideally, such a modulator should have a high bandwidth, good modulation efficiency, low loss, and cover a wide wa...

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Published inNature communications Vol. 9; no. 1; pp. 3444 - 6
Main Authors Alexander, Koen, George, John P, Verbist, Jochem, Neyts, Kristiaan, Kuyken, Bart, Van Thourhout, Dries, Beeckman, Jeroen
Format Journal Article
LanguageEnglish
Published England Nature Publishing Group 27.08.2018
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Abstract Silicon nitride (SiN) is emerging as a competitive platform for CMOS-compatible integrated photonics. However, active devices such as modulators are scarce and still lack in performance. Ideally, such a modulator should have a high bandwidth, good modulation efficiency, low loss, and cover a wide wavelength range. Here, we demonstrate the first electro-optic modulators based on ferroelectric lead zirconate titanate (PZT) films on SiN, in both the O-band and C-band. Bias-free operation, bandwidths beyond 33 GHz and data rates of 40 Gbps are shown, as well as low propagation losses (α ≈ 1 dB cm ). A half-wave voltage-length product of 3.2 V cm is measured. Simulations indicate that further improvement is possible. This approach offers a much-anticipated route towards high-performance phase modulators on SiN.
AbstractList Abstract Silicon nitride (SiN) is emerging as a competitive platform for CMOS-compatible integrated photonics. However, active devices such as modulators are scarce and still lack in performance. Ideally, such a modulator should have a high bandwidth, good modulation efficiency, low loss, and cover a wide wavelength range. Here, we demonstrate the first electro-optic modulators based on ferroelectric lead zirconate titanate (PZT) films on SiN, in both the O-band and C-band. Bias-free operation, bandwidths beyond 33 GHz and data rates of 40 Gbps are shown, as well as low propagation losses ( α  ≈ 1 dB cm −1 ). A half-wave voltage-length product of 3.2 V cm is measured. Simulations indicate that further improvement is possible. This approach offers a much-anticipated route towards high-performance phase modulators on SiN.
Silicon nitride (SiN) is emerging as a competitive platform for CMOS-compatible integrated photonics. However, active devices such as modulators are scarce and still lack in performance. Ideally, such a modulator should have a high bandwidth, good modulation efficiency, low loss, and cover a wide wavelength range. Here, we demonstrate the first electro-optic modulators based on ferroelectric lead zirconate titanate (PZT) films on SiN, in both the O-band and C-band. Bias-free operation, bandwidths beyond 33 GHz and data rates of 40 Gbps are shown, as well as low propagation losses (α ≈ 1 dB cm ). A half-wave voltage-length product of 3.2 V cm is measured. Simulations indicate that further improvement is possible. This approach offers a much-anticipated route towards high-performance phase modulators on SiN.
Active devices such as modulators made of silicon nitride still lack performance. Here, the authors demonstrate electro-optic modulators based on ferroelectric lead zirconate titanate films on silicon nitride, in both the O- and the C-band with a modulation bandwidth beyond 33 GHz and with data rates of 40 Gbps.
Silicon nitride (SiN) is emerging as a competitive platform for CMOS-compatible integrated photonics. However, active devices such as modulators are scarce and still lack in performance. Ideally, such a modulator should have a high bandwidth, good modulation efficiency, low loss, and cover a wide wavelength range. Here, we demonstrate the first electro-optic modulators based on ferroelectric lead zirconate titanate (PZT) films on SiN, in both the O-band and C-band. Bias-free operation, bandwidths beyond 33 GHz and data rates of 40 Gbps are shown, as well as low propagation losses ( α  ≈ 1 dB cm −1 ). A half-wave voltage-length product of 3.2 V cm is measured. Simulations indicate that further improvement is possible. This approach offers a much-anticipated route towards high-performance phase modulators on SiN. Active devices such as modulators made of silicon nitride still lack performance. Here, the authors demonstrate electro-optic modulators based on ferroelectric lead zirconate titanate films on silicon nitride, in both the O- and the C-band with a modulation bandwidth beyond 33 GHz and with data rates of 40 Gbps.
Silicon nitride (SiN) is emerging as a competitive platform for CMOS-compatible integrated photonics. However, active devices such as modulators are scarce and still lack in performance. Ideally, such a modulator should have a high bandwidth, good modulation efficiency, low loss, and cover a wide wavelength range. Here, we demonstrate the first electro-optic modulators based on ferroelectric lead zirconate titanate (PZT) films on SiN, in both the O-band and C-band. Bias-free operation, bandwidths beyond 33 GHz and data rates of 40 Gbps are shown, as well as low propagation losses (α ≈ 1 dB cm−1). A half-wave voltage-length product of 3.2 V cm is measured. Simulations indicate that further improvement is possible. This approach offers a much-anticipated route towards high-performance phase modulators on SiN.
ArticleNumber 3444
Author Neyts, Kristiaan
George, John P
Van Thourhout, Dries
Kuyken, Bart
Verbist, Jochem
Alexander, Koen
Beeckman, Jeroen
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BackLink https://www.ncbi.nlm.nih.gov/pubmed/30150757$$D View this record in MEDLINE/PubMed
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Cites_doi 10.1109/JLT.2016.2617624
10.1038/nphoton.2015.122
10.1515/nanoph-2013-0016
10.1142/9789814740487_0010
10.1038/nphoton.2013.183
10.1364/OE.26.003174
10.1038/nature03569
10.1002/chem.201701136
10.1038/nature02310
10.1038/nature16454
10.1364/OPTICA.2.000854
10.1364/OL.42.000021
10.1016/j.physb.2005.08.024
10.3389/fphy.2014.00077
10.1038/nature10067
10.1038/nphoton.2017.120
10.1364/OE.19.003163
10.1109/JLT.2015.2478601
10.1021/nl3011885
10.1021/acsami.5b01781
10.1038/nphoton.2017.122
10.1038/srep10941
10.1109/IEDM.2017.8268454
10.1364/OE.23.014018
10.1038/s41566-017-0071-6
10.1038/srep27465
10.1038/nphoton.2009.259
10.1364/OE.20.007915
10.1038/ncomms2695
10.1038/lsa.2015.28
10.1007/978-3-642-71907-3_1
10.1038/lsa.2014.54
10.1021/nl404513p
10.1364/OE.26.001547
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References A Rahim (5846_CR2) 2017; 35
C Xiong (5846_CR22) 2012; 12
T Hiraki (5846_CR13) 2017; 11
V Sorianello (5846_CR16) 2018; 12
CT Phare (5846_CR24) 2015; 9
JF Bauters (5846_CR4) 2011; 19
W Jin (5846_CR26) 2018; 26
5846_CR6
C Xiong (5846_CR20) 2014; 14
JH Han (5846_CR14) 2017; 11
M Liu (5846_CR15) 2011; 474
5846_CR30
J Cho (5846_CR32) 2012; 20
A Srinivasan (5846_CR18) 2016; 34
5846_CR31
5846_CR29
CV Poulton (5846_CR9) 2017; 42
GT Reed (5846_CR10) 2014; 2
JS Levy (5846_CR3) 2010; 4
R Asif (5846_CR33) 2016; 6
L Alloatti (5846_CR17) 2014; 3
A Liu (5846_CR12) 2004; 427
J George (5846_CR27) 2015; 7
C Sun (5846_CR1) 2015; 528
W Gu (5846_CR35) 2017; 23
C Wang (5846_CR23) 2018; 26
S Abel (5846_CR19) 2013; 4
L Zhuang (5846_CR8) 2015; 2
5846_CR21
DJ Moss (5846_CR5) 2013; 7
Q Xu (5846_CR11) 2005; 435
N Hosseini (5846_CR25) 2015; 23
GT Reed (5846_CR28) 2014; 3
S Pandey (5846_CR34) 2005; 369
O Kahl (5846_CR7) 2015; 5
S Koeber (5846_CR36) 2015; 4
References_xml – volume: 35
  start-page: 639
  year: 2017
  ident: 5846_CR2
  publication-title: J. Light. Technol.
  doi: 10.1109/JLT.2016.2617624
  contributor:
    fullname: A Rahim
– volume: 9
  start-page: 511
  year: 2015
  ident: 5846_CR24
  publication-title: Nat. Photonics
  doi: 10.1038/nphoton.2015.122
  contributor:
    fullname: CT Phare
– volume: 3
  start-page: 229
  year: 2014
  ident: 5846_CR28
  publication-title: Nanophotonics
  doi: 10.1515/nanoph-2013-0016
  contributor:
    fullname: GT Reed
– ident: 5846_CR30
  doi: 10.1142/9789814740487_0010
– volume: 7
  start-page: 597
  year: 2013
  ident: 5846_CR5
  publication-title: Nat. Photonics
  doi: 10.1038/nphoton.2013.183
  contributor:
    fullname: DJ Moss
– volume: 26
  start-page: 3174
  year: 2018
  ident: 5846_CR26
  publication-title: Opt. Express
  doi: 10.1364/OE.26.003174
  contributor:
    fullname: W Jin
– volume: 435
  start-page: 325
  year: 2005
  ident: 5846_CR11
  publication-title: Nature
  doi: 10.1038/nature03569
  contributor:
    fullname: Q Xu
– volume: 23
  start-page: 10126
  year: 2017
  ident: 5846_CR35
  publication-title: Chem. Eur. J.
  doi: 10.1002/chem.201701136
  contributor:
    fullname: W Gu
– volume: 427
  start-page: 615
  year: 2004
  ident: 5846_CR12
  publication-title: Nature
  doi: 10.1038/nature02310
  contributor:
    fullname: A Liu
– volume: 528
  start-page: 534
  year: 2015
  ident: 5846_CR1
  publication-title: Nature
  doi: 10.1038/nature16454
  contributor:
    fullname: C Sun
– volume: 2
  start-page: 854
  year: 2015
  ident: 5846_CR8
  publication-title: Optica
  doi: 10.1364/OPTICA.2.000854
  contributor:
    fullname: L Zhuang
– volume: 42
  start-page: 21
  year: 2017
  ident: 5846_CR9
  publication-title: Opt. Lett.
  doi: 10.1364/OL.42.000021
  contributor:
    fullname: CV Poulton
– volume: 369
  start-page: 135
  year: 2005
  ident: 5846_CR34
  publication-title: Phys. B
  doi: 10.1016/j.physb.2005.08.024
  contributor:
    fullname: S Pandey
– volume: 2
  start-page: 77
  year: 2014
  ident: 5846_CR10
  publication-title: Front. Phys.
  doi: 10.3389/fphy.2014.00077
  contributor:
    fullname: GT Reed
– volume: 474
  start-page: 64
  year: 2011
  ident: 5846_CR15
  publication-title: Nature
  doi: 10.1038/nature10067
  contributor:
    fullname: M Liu
– volume: 11
  start-page: 482
  year: 2017
  ident: 5846_CR13
  publication-title: Nat. Photonics
  doi: 10.1038/nphoton.2017.120
  contributor:
    fullname: T Hiraki
– volume: 19
  start-page: 3163
  year: 2011
  ident: 5846_CR4
  publication-title: Opt. Express
  doi: 10.1364/OE.19.003163
  contributor:
    fullname: JF Bauters
– volume: 34
  start-page: 419
  year: 2016
  ident: 5846_CR18
  publication-title: J. Light Technol.
  doi: 10.1109/JLT.2015.2478601
  contributor:
    fullname: A Srinivasan
– volume: 12
  start-page: 3562
  year: 2012
  ident: 5846_CR22
  publication-title: Nano Lett.
  doi: 10.1021/nl3011885
  contributor:
    fullname: C Xiong
– volume: 7
  start-page: 13350
  year: 2015
  ident: 5846_CR27
  publication-title: ACS Appl. Mater. Interfaces
  doi: 10.1021/acsami.5b01781
  contributor:
    fullname: J George
– volume: 11
  start-page: 486
  year: 2017
  ident: 5846_CR14
  publication-title: Nat. Photonics
  doi: 10.1038/nphoton.2017.122
  contributor:
    fullname: JH Han
– volume: 5
  year: 2015
  ident: 5846_CR7
  publication-title: Sci. Rep.
  doi: 10.1038/srep10941
  contributor:
    fullname: O Kahl
– ident: 5846_CR21
  doi: 10.1109/IEDM.2017.8268454
– volume: 23
  start-page: 14018
  year: 2015
  ident: 5846_CR25
  publication-title: Opt. Express
  doi: 10.1364/OE.23.014018
  contributor:
    fullname: N Hosseini
– volume: 12
  start-page: 40
  year: 2018
  ident: 5846_CR16
  publication-title: Nat. Photonics
  doi: 10.1038/s41566-017-0071-6
  contributor:
    fullname: V Sorianello
– volume: 6
  year: 2016
  ident: 5846_CR33
  publication-title: Sci. Rep.
  doi: 10.1038/srep27465
  contributor:
    fullname: R Asif
– volume: 4
  start-page: 37
  year: 2010
  ident: 5846_CR3
  publication-title: Nat. Photonics
  doi: 10.1038/nphoton.2009.259
  contributor:
    fullname: JS Levy
– volume: 20
  start-page: 7915
  year: 2012
  ident: 5846_CR32
  publication-title: Opt. Express
  doi: 10.1364/OE.20.007915
  contributor:
    fullname: J Cho
– volume: 4
  year: 2013
  ident: 5846_CR19
  publication-title: Nat. Commun.
  doi: 10.1038/ncomms2695
  contributor:
    fullname: S Abel
– volume: 4
  start-page: e255
  year: 2015
  ident: 5846_CR36
  publication-title: Light Sci. Appl.
  doi: 10.1038/lsa.2015.28
  contributor:
    fullname: S Koeber
– ident: 5846_CR29
  doi: 10.1007/978-3-642-71907-3_1
– volume: 3
  start-page: e173
  year: 2014
  ident: 5846_CR17
  publication-title: Light Sci. Appl.
  doi: 10.1038/lsa.2014.54
  contributor:
    fullname: L Alloatti
– volume: 14
  start-page: 1419
  year: 2014
  ident: 5846_CR20
  publication-title: Nano Lett.
  doi: 10.1021/nl404513p
  contributor:
    fullname: C Xiong
– ident: 5846_CR6
– volume: 26
  start-page: 1547
  year: 2018
  ident: 5846_CR23
  publication-title: Opt. Express
  doi: 10.1364/OE.26.001547
  contributor:
    fullname: C Wang
– ident: 5846_CR31
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Snippet Silicon nitride (SiN) is emerging as a competitive platform for CMOS-compatible integrated photonics. However, active devices such as modulators are scarce and...
Abstract Silicon nitride (SiN) is emerging as a competitive platform for CMOS-compatible integrated photonics. However, active devices such as modulators are...
Active devices such as modulators made of silicon nitride still lack performance. Here, the authors demonstrate electro-optic modulators based on ferroelectric...
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StartPage 3444
SubjectTerms C band
CMOS
Ferroelectric materials
Ferroelectricity
Lead
Lead zirconate titanates
Modulators
Photonics
Silicon
Silicon nitride
Wave propagation
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Title Nanophotonic Pockels modulators on a silicon nitride platform
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