MEMS-Based Micro Sensors for Measuring the Tiny Forces Acting on Insects

Small insects perform agile locomotion, such as running, jumping, and flying. Recently, many robots, inspired by such insect performance, have been developed and are expected to be smaller and more maneuverable than conventional robots. For the development of insect-inspired robots, understanding th...

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Published inSensors (Basel, Switzerland) Vol. 22; no. 20; p. 8018
Main Author Takahashi, Hidetoshi
Format Journal Article
LanguageEnglish
Published Basel MDPI AG 20.10.2022
MDPI
Subjects
Commercialization
Design
Etching
flight force
force plate
Force plates
ground reaction force
Hydrogels
insect
Insects
Locomotion
Measurement
Measurement methods
Measuring instruments
MEMS
Microelectromechanical systems
probe sensor
Review
Robots
Semiconductors
Sensors
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Abstract Small insects perform agile locomotion, such as running, jumping, and flying. Recently, many robots, inspired by such insect performance, have been developed and are expected to be smaller and more maneuverable than conventional robots. For the development of insect-inspired robots, understanding the mechanical dynamics of the target insect is important. However, evaluating the dynamics via conventional commercialized force sensors is difficult because the exerted force and insect itself are tiny in strength and size. Here, we review force sensor devices, especially fabricated for measuring the tiny forces acting on insects during locomotion. As the force sensor, micro-force plates for measuring the ground reaction force and micro-force probes for measuring the flying force have mainly been developed. In addition, many such sensors have been fabricated via a microelectromechanical system (MEMS) process, due to the process precision and high sensitivity. In this review, we focus on the sensing principle, design guide, fabrication process, and measurement method of each sensor, as well as the technical challenges in each method. Finally, the common process flow of the development of specialized MEMS sensors is briefly discussed.
AbstractList Small insects perform agile locomotion, such as running, jumping, and flying. Recently, many robots, inspired by such insect performance, have been developed and are expected to be smaller and more maneuverable than conventional robots. For the development of insect-inspired robots, understanding the mechanical dynamics of the target insect is important. However, evaluating the dynamics via conventional commercialized force sensors is difficult because the exerted force and insect itself are tiny in strength and size. Here, we review force sensor devices, especially fabricated for measuring the tiny forces acting on insects during locomotion. As the force sensor, micro-force plates for measuring the ground reaction force and micro-force probes for measuring the flying force have mainly been developed. In addition, many such sensors have been fabricated via a microelectromechanical system (MEMS) process, due to the process precision and high sensitivity. In this review, we focus on the sensing principle, design guide, fabrication process, and measurement method of each sensor, as well as the technical challenges in each method. Finally, the common process flow of the development of specialized MEMS sensors is briefly discussed.
Audience Academic
Author Takahashi, Hidetoshi
AuthorAffiliation Department of Mechanical Engineering, Faculty of Science and Technology, Keio University, 3-14-1 Hiyoshi, Kouhoku-ku, Yokohama 223-8522, Japan; htakahashi@mech.keio.ac.jp ; Tel.: +81-4-5566-1847
AuthorAffiliation_xml – name: Department of Mechanical Engineering, Faculty of Science and Technology, Keio University, 3-14-1 Hiyoshi, Kouhoku-ku, Yokohama 223-8522, Japan; htakahashi@mech.keio.ac.jp ; Tel.: +81-4-5566-1847
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  givenname: Hidetoshi
  surname: Takahashi
  fullname: Takahashi, Hidetoshi
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Cites_doi 10.1088/1748-3182/5/3/036005
10.1109/TRANSDUCERS.2017.7994235
10.1126/scirobotics.aax1594
10.1137/S0036144504445133
10.1126/science.284.5422.1954
10.1088/0960-1317/20/2/025011
10.1126/science.288.5463.100
10.1242/jeb.200.7.1133
10.1016/j.jbiomech.2008.11.017
10.1371/journal.pone.0152072
10.1016/j.sna.2020.112355
10.1088/1748-3190/10/1/016019
10.1038/s41578-018-0016-9
10.1088/1748-3190/aaa1c2
10.1109/MEMSYS.2013.6474162
10.1249/JSR.0b013e3181a6187a
10.1088/1748-3182/7/3/036020
10.3390/s19112641
10.3390/aerospace5030083
10.1016/0021-9290(87)90306-X
10.1088/0960-1317/23/3/035027
10.1088/1748-3182/9/4/046011
10.1242/jeb.205.5.627
10.3390/s21020593
10.1126/science.aat0350
10.1111/j.1469-7998.1973.tb05341.x
10.1007/s00114-011-0781-4
10.1109/JSEN.2020.3006316
10.1109/JMEMS.2009.2013387
10.1007/978-3-540-77457-0_42
10.1109/MEMSYS.2018.8346684
10.1242/jeb.148.1.129
10.1109/MEMSYS.2016.7421584
10.1088/0964-1726/6/5/004
10.1149/1945-7111/ab6828
10.1088/0957-0233/20/9/092001
10.1242/jeb.01980
10.1109/JSEN.2020.2994129
10.1088/0964-1726/10/6/301
10.1242/jeb.02322
10.1039/C3LC51414E
10.1021/acsami.8b19824
10.1098/rsif.2009.0200
10.1016/j.cophys.2020.11.004
10.1109/5.704269
10.1016/0021-9290(80)90033-0
10.5772/198
10.1371/journal.pone.0081943
10.3390/aerospace3010004
10.1088/1361-6501/ac83e1
10.1109/TRANSDUCERS.2019.8808537
10.1016/j.jbiomech.2012.06.005
10.1088/1748-3190/10/3/036008
10.1109/MEMSYS.2012.6170113
10.1016/j.asd.2004.05.005
10.1088/0960-1317/26/10/105006
10.1002/aisy.202000095
10.1098/rsif.2012.0838
10.1088/0957-0233/22/5/055802
10.1242/jeb.90.1.163
10.1007/BF02447343
10.1098/rspb.2016.2867
10.1021/acsami.9b04915
10.1038/s41467-019-10549-7
10.1152/jappl.1975.39.1.174
10.1038/35015073
10.1098/rsif.2008.0124
10.1002/(SICI)1522-2683(20000101)21:1<27::AID-ELPS27>3.0.CO;2-C
10.1126/science.7701346
10.1111/j.1748-1716.1989.tb08655.x
10.1109/IROS.2011.6048792
10.1038/nature21727
10.1088/1361-6439/ab093d
10.1088/1674-1056/abb7ff
10.1038/nature14542
10.1016/j.jbiomech.2010.11.011
10.1088/1748-3182/4/1/015002
10.1088/0022-3735/13/1/017
10.1088/0960-1317/25/3/033001
10.1109/TRANSDUCERS.2019.8808200
10.1088/1742-6596/1837/1/012010
10.1098/rsif.2010.0040
10.1088/1748-3190/ab4467
10.1242/jeb.026880
10.1098/rspb.2019.1327
10.1109/MEMSYS.2018.8346695
10.1088/1748-6041/2/1/S03
10.1109/JPROC.2009.2013612
10.1088/1748-3190/10/1/016013
10.1242/jeb.158.1.369
10.1088/1748-3190/aafff5
10.1109/JSEN.2020.3012484
10.1098/rspb.2007.1660
10.3390/s17102431
10.1016/j.robot.2005.09.021
10.2460/ajvr.1993.54.04.612
10.1155/2017/4780160
10.1021/acs.langmuir.6b02922
10.1126/science.1231806
10.1242/jeb.156.1.215
10.1063/1.121064
10.1088/0960-1317/24/6/065014
10.1109/JMEMS.2007.893677
10.3390/app10238607
10.1016/0021-9290(80)90185-2
10.1016/j.tibtech.2013.03.002
10.1126/science.1175928
10.1242/jeb.01181
10.1016/j.sna.2015.09.028
10.1007/s00359-006-0150-5
10.1242/jeb.020941
10.1016/j.carbon.2015.09.076
10.1242/jeb.199.2.281
10.1109/BIOROB.2008.4762802
10.1007/s00170-012-4605-2
10.1242/jeb.037796
10.1088/0960-1317/22/5/055015
10.1371/journal.pone.0141269
10.1109/JSEN.2022.3161963
10.1109/JSEN.2021.3094565
10.1242/jeb.93.1.333
10.1063/1.5012578
10.1098/rsif.2014.0499
10.1242/jeb.199.9.2085
10.1038/nmeth.3834
10.1088/1748-3190/ab1d11
10.1109/JMEMS.2004.839028
10.1242/jeb.051144
10.1021/acsami.0c21295
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References Jun (ref_49) 2014; 14
ref_136
Drechsler (ref_68) 2006; 192
McDonald (ref_47) 2000; 21
Usherwood (ref_19) 2008; 5
Zhou (ref_74) 2014; 11
Full (ref_64) 1991; 156
Tadigadapa (ref_42) 2009; 20
ref_11
Liu (ref_15) 2009; 4
Wang (ref_80) 2015; 10
Brown (ref_67) 2020; 15
ref_95
Holmes (ref_60) 2006; 48
Li (ref_46) 2020; 167
Graetzel (ref_35) 2010; 7
Zhao (ref_20) 2010; 7
Endlein (ref_82) 2013; 10
Dickinson (ref_14) 2000; 288
Autumn (ref_61) 2008; 366
Asadnia (ref_135) 2015; 10
Heglund (ref_58) 1981; 93
Manske (ref_81) 2011; 44
Clemente (ref_70) 2008; 275
Lehmann (ref_111) 1997; 200
Hu (ref_125) 2019; 11
ref_129
Inagaki (ref_1) 2006; 54
ref_120
Floreano (ref_3) 2015; 521
ref_122
ref_121
Autumn (ref_66) 2006; 209
Reinhardt (ref_77) 2014; 217
ref_123
Takahashi (ref_117) 2012; 7
Reinhardt (ref_76) 2014; 217
Brackenbury (ref_130) 2002; 205
Kishimoto (ref_132) 2021; 21
ref_29
ref_28
ref_26
Yazdi (ref_39) 1998; 86
Dickinson (ref_110) 1995; 268
Yoshida (ref_13) 2020; 2
Sun (ref_91) 2018; 8
Asadnia (ref_133) 2014; 9
Zhang (ref_4) 2017; 2017
Zill (ref_137) 2004; 33
Judy (ref_44) 2001; 10
ref_72
ref_71
Lywood (ref_59) 1987; 25
Eric (ref_94) 2015; 10
Truong (ref_10) 2019; 14
Birkelund (ref_131) 2011; 22
Cavanagh (ref_50) 1980; 13
Zumstein (ref_90) 2004; 207
Bullock (ref_69) 2008; 211
Autumn (ref_87) 2000; 405
Barlian (ref_43) 2009; 97
Palagi (ref_5) 2018; 3
Dickinson (ref_18) 1999; 284
Reinhardt (ref_75) 2009; 212
Sun (ref_31) 2005; 14
Labonte (ref_73) 2019; 286
ref_83
Reinhardt (ref_78) 2017; 220
Bartsch (ref_24) 2007; 16
Ji (ref_84) 2019; 14
Calow (ref_55) 1973; 171
Chhetry (ref_127) 2019; 11
Narasimhan (ref_40) 2015; 25
Chateau (ref_103) 2009; 42
Eaton (ref_38) 1997; 6
Young (ref_16) 2009; 325
Dickerson (ref_138) 2021; 19
Luo (ref_128) 2016; 96
Takahashi (ref_27) 2016; 26
Wang (ref_100) 2020; 20
Lin (ref_85) 2010; 213
Bullock (ref_89) 2011; 98
Takahashi (ref_25) 2014; 24
Kamat (ref_126) 2021; 13
Lin (ref_86) 2012; 45
Jevens (ref_53) 1993; 54
Bora (ref_134) 2018; 13
Wang (ref_41) 2021; 21
Zheng (ref_96) 2020; 29
Munro (ref_51) 1987; 20
Wei (ref_21) 2015; 234
Gola (ref_57) 1980; 13
Full (ref_62) 1990; 148
Beyeler (ref_113) 2009; 18
Ren (ref_12) 2019; 10
Afsarimanesh (ref_45) 2020; 315
Cavagna (ref_56) 1975; 39
Dai (ref_79) 2011; 214
BUCKHOLZ (ref_108) 1981; 90
Higginson (ref_98) 2009; 8
Ma (ref_7) 2013; 340
Nilsson (ref_52) 1989; 136
Muzaffar (ref_99) 2020; 20
Kan (ref_115) 2013; 23
Dickinson (ref_109) 1996; 199
Bomphrey (ref_17) 2017; 544
Gan (ref_22) 2022; 22
ref_119
Chui (ref_88) 1998; 72
ref_36
ref_34
Vaezi (ref_48) 2013; 67
ref_30
Goldman (ref_65) 2006; 209
ref_112
Muijres (ref_8) 2018; 361
Sun (ref_32) 2007; 2
ref_37
Zheng (ref_97) 2016; 32
Budsberg (ref_54) 1987; 48
Full (ref_63) 1991; 158
Matsudaira (ref_92) 2019; 29
Takahashi (ref_118) 2010; 5
Khatib (ref_33) 2008; Volume 39
Muntwyler (ref_114) 2010; 20
ref_104
Polacheck (ref_93) 2016; 13
ref_105
Kim (ref_2) 2013; 31
Hricko (ref_124) 2021; 1837
Yang (ref_23) 2022; 33
ref_102
ref_101
Buckholz (ref_107) 1980; 13
Wu (ref_9) 2019; 4
Okamoto (ref_106) 1996; 199
Takahashi (ref_116) 2012; 22
ref_6
References_xml – volume: 5
  start-page: 036005
  year: 2010
  ident: ref_118
  article-title: Differential pressure measurement using a free-flying insect-like ornithopter with an MEMS sensor
  publication-title: Bioinspir. Biomim.
  doi: 10.1088/1748-3182/5/3/036005
  contributor:
    fullname: Takahashi
– ident: ref_28
  doi: 10.1109/TRANSDUCERS.2017.7994235
– volume: 4
  start-page: eaax1594
  year: 2019
  ident: ref_9
  article-title: Insect-scale fast moving and ultrarobust soft robot
  publication-title: Sci. Robot.
  doi: 10.1126/scirobotics.aax1594
  contributor:
    fullname: Wu
– volume: 48
  start-page: 207
  year: 2006
  ident: ref_60
  article-title: The dynamics of legged locomotion: Models, analyses, and challenges
  publication-title: SIAM Rev.
  doi: 10.1137/S0036144504445133
  contributor:
    fullname: Holmes
– volume: 284
  start-page: 1954
  year: 1999
  ident: ref_18
  article-title: Wing rotation and the aerodynamic basis of insect flight
  publication-title: Science
  doi: 10.1126/science.284.5422.1954
  contributor:
    fullname: Dickinson
– volume: 20
  start-page: 025011
  year: 2010
  ident: ref_114
  article-title: Three-axis micro-force sensor with sub-micro-Newton measurement uncertainty and tunable force range
  publication-title: J. Micromech. Microeng.
  doi: 10.1088/0960-1317/20/2/025011
  contributor:
    fullname: Muntwyler
– volume: 288
  start-page: 100
  year: 2000
  ident: ref_14
  article-title: How animals move: An integrative view
  publication-title: Science
  doi: 10.1126/science.288.5463.100
  contributor:
    fullname: Dickinson
– volume: 200
  start-page: 1133
  year: 1997
  ident: ref_111
  article-title: The changes in power requirements and muscle efficiency during elevated force production in the fruit fly Drosophila melanogaster
  publication-title: J. Exp. Biol.
  doi: 10.1242/jeb.200.7.1133
  contributor:
    fullname: Lehmann
– volume: 42
  start-page: 336
  year: 2009
  ident: ref_103
  article-title: Design and validation of a dynamometric horseshoe for the measurement of three-dimensional ground reaction force on a moving horse
  publication-title: J. Biomech.
  doi: 10.1016/j.jbiomech.2008.11.017
  contributor:
    fullname: Chateau
– ident: ref_122
  doi: 10.1371/journal.pone.0152072
– volume: 48
  start-page: 915
  year: 1987
  ident: ref_54
  article-title: Force plate analysis of the walking gait in healthy dogs
  publication-title: Am. J. Vet. Res.
  contributor:
    fullname: Budsberg
– volume: 315
  start-page: 112355
  year: 2020
  ident: ref_45
  article-title: A review on fabrication, characterization and implementation of wearable strain sensors
  publication-title: Sens. Actuators A Phys.
  doi: 10.1016/j.sna.2020.112355
  contributor:
    fullname: Afsarimanesh
– volume: 10
  start-page: 016019
  year: 2015
  ident: ref_80
  article-title: Biomechanics of gecko locomotion: The patterns of reaction forces on inverted, vertical and horizontal substrates
  publication-title: Bioinspir. Biomim.
  doi: 10.1088/1748-3190/10/1/016019
  contributor:
    fullname: Wang
– volume: 3
  start-page: 113
  year: 2018
  ident: ref_5
  article-title: Bioinspired microrobots
  publication-title: Nat. Rev. Mater.
  doi: 10.1038/s41578-018-0016-9
  contributor:
    fullname: Palagi
– volume: 13
  start-page: 025002
  year: 2018
  ident: ref_134
  article-title: Sensing the flow beneath the fins
  publication-title: Bioinspir. Biomim.
  doi: 10.1088/1748-3190/aaa1c2
  contributor:
    fullname: Bora
– ident: ref_37
  doi: 10.1109/MEMSYS.2013.6474162
– volume: 8
  start-page: 136
  year: 2009
  ident: ref_98
  article-title: Methods of Running Gait Analysis
  publication-title: Curr. Sport. Med. Rep.
  doi: 10.1249/JSR.0b013e3181a6187a
  contributor:
    fullname: Higginson
– volume: 7
  start-page: 036020
  year: 2012
  ident: ref_117
  article-title: Differential pressure distribution measurement with an MEMS sensor on a free-flying butterfly wing
  publication-title: Bioinspir. Biomim.
  doi: 10.1088/1748-3182/7/3/036020
  contributor:
    fullname: Takahashi
– ident: ref_102
  doi: 10.3390/s19112641
– ident: ref_120
  doi: 10.3390/aerospace5030083
– volume: 20
  start-page: 147
  year: 1987
  ident: ref_51
  article-title: Ground reaction forces in running: A reexamination
  publication-title: J. Biomech.
  doi: 10.1016/0021-9290(87)90306-X
  contributor:
    fullname: Munro
– volume: 23
  start-page: 035027
  year: 2013
  ident: ref_115
  article-title: Design of a piezoresistive triaxial force sensor probe using the sidewall doping method
  publication-title: J. Micromech. Microeng.
  doi: 10.1088/0960-1317/23/3/035027
  contributor:
    fullname: Kan
– volume: 9
  start-page: 046011
  year: 2014
  ident: ref_133
  article-title: Touch at a distance sensing: Lateral-line inspired MEMS flow sensors
  publication-title: Bioinspir. Biomim.
  doi: 10.1088/1748-3182/9/4/046011
  contributor:
    fullname: Asadnia
– volume: 205
  start-page: 627
  year: 2002
  ident: ref_130
  article-title: Kinematics and hydrodynamics of an invertebrate undulatory swimmer: The damsel-fly larva
  publication-title: J. Exp. Biol.
  doi: 10.1242/jeb.205.5.627
  contributor:
    fullname: Brackenbury
– ident: ref_123
  doi: 10.3390/s21020593
– volume: 361
  start-page: 1089
  year: 2018
  ident: ref_8
  article-title: A tailless aerial robotic flapper reveals that flies use torque coupling in rapid banked turns
  publication-title: Science
  doi: 10.1126/science.aat0350
  contributor:
    fullname: Muijres
– volume: 171
  start-page: 293
  year: 1973
  ident: ref_55
  article-title: A mechanical analysis of a hind leg of a frog (Rana temporaria)
  publication-title: J. Zool.
  doi: 10.1111/j.1469-7998.1973.tb05341.x
  contributor:
    fullname: Calow
– volume: 98
  start-page: 381
  year: 2011
  ident: ref_89
  article-title: Beetle adhesive hairs differ in stiffness and stickiness: In vivo adhesion measurements on individual setae
  publication-title: Naturwissenschaften
  doi: 10.1007/s00114-011-0781-4
  contributor:
    fullname: Bullock
– volume: 20
  start-page: 13318
  year: 2020
  ident: ref_100
  article-title: An Inductive Force Sensor for In-Shoe Plantar Normal and Shear Load Measurement
  publication-title: IEEE Sens. J.
  doi: 10.1109/JSEN.2020.3006316
  contributor:
    fullname: Wang
– volume: 18
  start-page: 433
  year: 2009
  ident: ref_113
  article-title: A Six-Axis MEMS Force-Torque Sensor with Micro-Newton and Nano-Newtonmeter Resolution
  publication-title: J. Microelectromech. Syst.
  doi: 10.1109/JMEMS.2009.2013387
  contributor:
    fullname: Beyeler
– volume: Volume 39
  start-page: 451
  year: 2008
  ident: ref_33
  article-title: Real-Time Microforce Sensors and High Speed Vision System for Insect Flight Control Analysis
  publication-title: Experimental Robotics
  doi: 10.1007/978-3-540-77457-0_42
  contributor:
    fullname: Khatib
– ident: ref_121
  doi: 10.1109/MEMSYS.2018.8346684
– volume: 148
  start-page: 129
  year: 1990
  ident: ref_62
  article-title: Mechanics of six-legged runners
  publication-title: J. Exp. Biol.
  doi: 10.1242/jeb.148.1.129
  contributor:
    fullname: Full
– ident: ref_26
  doi: 10.1109/MEMSYS.2016.7421584
– ident: ref_30
– volume: 6
  start-page: 530
  year: 1997
  ident: ref_38
  article-title: Micromachined pressure sensors: Review and recent developments
  publication-title: Smart Mater. Struct.
  doi: 10.1088/0964-1726/6/5/004
  contributor:
    fullname: Eaton
– volume: 167
  start-page: 037561
  year: 2020
  ident: ref_46
  article-title: Review—Recent Progress in Flexible and Stretchable Piezoresistive Sensors and Their Applications
  publication-title: J. Electrochem. Soc.
  doi: 10.1149/1945-7111/ab6828
  contributor:
    fullname: Li
– volume: 20
  start-page: 092001
  year: 2009
  ident: ref_42
  article-title: Piezoelectric MEMS sensors: State-of-the-art and perspectives
  publication-title: Meas. Sci. Technol.
  doi: 10.1088/0957-0233/20/9/092001
  contributor:
    fullname: Tadigadapa
– volume: 209
  start-page: 260
  year: 2006
  ident: ref_66
  article-title: Dynamics of geckos running vertically
  publication-title: J. Exp. Biol.
  doi: 10.1242/jeb.01980
  contributor:
    fullname: Autumn
– volume: 20
  start-page: 10886
  year: 2020
  ident: ref_99
  article-title: Self-Synchronized, Continuous Body Weight Monitoring Using Flexible Force Sensors and Ground Reaction Force Signal Processing
  publication-title: IEEE Sens. J.
  doi: 10.1109/JSEN.2020.2994129
  contributor:
    fullname: Muzaffar
– volume: 10
  start-page: 1115
  year: 2001
  ident: ref_44
  article-title: Microelectromechanical systems (MEMS): Fabrication, design and applications
  publication-title: Smart Mater. Struct.
  doi: 10.1088/0964-1726/10/6/301
  contributor:
    fullname: Judy
– volume: 209
  start-page: 2990
  year: 2006
  ident: ref_65
  article-title: Dynamics of rapid vertical climbing in cockroaches reveals a template
  publication-title: J. Exp. Biol.
  doi: 10.1242/jeb.02322
  contributor:
    fullname: Goldman
– volume: 366
  start-page: 1575
  year: 2008
  ident: ref_61
  article-title: Gecko adhesion: Evolutionary nanotechnology
  publication-title: Philos. Trans. A Math. Phys. Eng. Sci.
  contributor:
    fullname: Autumn
– volume: 14
  start-page: 2145
  year: 2014
  ident: ref_49
  article-title: Microfluidic spinning of micro- and nano-scale fibers for tissue engineering
  publication-title: Lab Chip
  doi: 10.1039/C3LC51414E
  contributor:
    fullname: Jun
– volume: 11
  start-page: 7379
  year: 2019
  ident: ref_125
  article-title: Improved Piezoelectric Sensing Performance of P(VDF–TrFE) Nanofibers by Utilizing BTO Nanoparticles and Penetrated Electrodes
  publication-title: ACS Appl. Mater. Interfaces
  doi: 10.1021/acsami.8b19824
  contributor:
    fullname: Hu
– volume: 7
  start-page: 485
  year: 2010
  ident: ref_20
  article-title: Aerodynamic effects of flexibility in flapping wings
  publication-title: J. R. Soc. Interface
  doi: 10.1098/rsif.2009.0200
  contributor:
    fullname: Zhao
– volume: 19
  start-page: 194
  year: 2021
  ident: ref_138
  article-title: Functional diversity from generic encoding in insect campaniform sensilla
  publication-title: Curr. Opin. Physiol.
  doi: 10.1016/j.cophys.2020.11.004
  contributor:
    fullname: Dickerson
– volume: 86
  start-page: 1640
  year: 1998
  ident: ref_39
  article-title: Micromachined inertial sensors
  publication-title: Proc. IEEE
  doi: 10.1109/5.704269
  contributor:
    fullname: Yazdi
– volume: 13
  start-page: 397
  year: 1980
  ident: ref_50
  article-title: Ground reaction forces in distance running
  publication-title: J. Biomech.
  doi: 10.1016/0021-9290(80)90033-0
  contributor:
    fullname: Cavanagh
– ident: ref_129
  doi: 10.5772/198
– ident: ref_71
  doi: 10.1371/journal.pone.0081943
– ident: ref_112
– ident: ref_119
  doi: 10.3390/aerospace3010004
– volume: 33
  start-page: 114010
  year: 2022
  ident: ref_23
  article-title: Micro-force sensing techniques and traceable reference forces: A review
  publication-title: Meas. Sci. Technol.
  doi: 10.1088/1361-6501/ac83e1
  contributor:
    fullname: Yang
– ident: ref_136
  doi: 10.1109/TRANSDUCERS.2019.8808537
– volume: 45
  start-page: 2310
  year: 2012
  ident: ref_86
  article-title: A new bi-axial cantilever beam design for biomechanics force measurements
  publication-title: J. Biomech.
  doi: 10.1016/j.jbiomech.2012.06.005
  contributor:
    fullname: Lin
– volume: 10
  start-page: 036008
  year: 2015
  ident: ref_135
  article-title: MEMS sensors for assessing flow-related control of an underwater biomimetic robotic stingray
  publication-title: Bioinspir. Biomim.
  doi: 10.1088/1748-3190/10/3/036008
  contributor:
    fullname: Asadnia
– ident: ref_36
  doi: 10.1109/MEMSYS.2012.6170113
– volume: 33
  start-page: 273
  year: 2004
  ident: ref_137
  article-title: Load sensing and control of posture and locomotion
  publication-title: Arthropod Struct. Dev.
  doi: 10.1016/j.asd.2004.05.005
  contributor:
    fullname: Zill
– volume: 26
  start-page: 105006
  year: 2016
  ident: ref_27
  article-title: Rigid two-axis MEMS force plate for measuring cellular traction force
  publication-title: J. Micromech. Microeng.
  doi: 10.1088/0960-1317/26/10/105006
  contributor:
    fullname: Takahashi
– volume: 2
  start-page: 2000095
  year: 2020
  ident: ref_13
  article-title: Soft Spiral-Shaped Microswimmers for Autonomous Swimming Control by Detecting Surrounding Environments
  publication-title: Adv. Intell. Syst.
  doi: 10.1002/aisy.202000095
  contributor:
    fullname: Yoshida
– volume: 10
  start-page: 20120838
  year: 2013
  ident: ref_82
  article-title: Sticking like sticky tape: Tree frogs use friction forces to enhance attachment on overhanging surfaces
  publication-title: J. R. Soc. Interface
  doi: 10.1098/rsif.2012.0838
  contributor:
    fullname: Endlein
– volume: 22
  start-page: 055802
  year: 2011
  ident: ref_131
  article-title: Miniaturized multi-sensor for aquatic studies
  publication-title: Meas. Sci. Technol.
  doi: 10.1088/0957-0233/22/5/055802
  contributor:
    fullname: Birkelund
– volume: 90
  start-page: 163
  year: 1981
  ident: ref_108
  article-title: Measurements of Unsteady Periodic Forces generated by the Blowfly Flying in a Wind Tunnel
  publication-title: J. Exp. Biol.
  doi: 10.1242/jeb.90.1.163
  contributor:
    fullname: BUCKHOLZ
– volume: 25
  start-page: 698
  year: 1987
  ident: ref_59
  article-title: Small, triaxial force plate
  publication-title: Med. Biol. Eng. Comput.
  doi: 10.1007/BF02447343
  contributor:
    fullname: Lywood
– ident: ref_83
  doi: 10.1098/rspb.2016.2867
– volume: 11
  start-page: 22531
  year: 2019
  ident: ref_127
  article-title: MoS2-Decorated Laser-Induced Graphene for a Highly Sensitive, Hysteresis-free, and Reliable Piezoresistive Strain Sensor
  publication-title: ACS Appl. Mater. Interfaces
  doi: 10.1021/acsami.9b04915
  contributor:
    fullname: Chhetry
– volume: 217
  start-page: 2358
  year: 2014
  ident: ref_77
  article-title: Level locomotion in wood ants: Evidence for grounded running
  publication-title: J. Exp. Biol.
  contributor:
    fullname: Reinhardt
– volume: 10
  start-page: 2703
  year: 2019
  ident: ref_12
  article-title: Multi-functional soft-bodied jellyfish-like swimming
  publication-title: Nat. Commun.
  doi: 10.1038/s41467-019-10549-7
  contributor:
    fullname: Ren
– volume: 39
  start-page: 174
  year: 1975
  ident: ref_56
  article-title: Force platforms as ergometers
  publication-title: J. Appl. Physiol.
  doi: 10.1152/jappl.1975.39.1.174
  contributor:
    fullname: Cavagna
– volume: 405
  start-page: 681
  year: 2000
  ident: ref_87
  article-title: Adhesive force of a single gecko foot-hair
  publication-title: Nature
  doi: 10.1038/35015073
  contributor:
    fullname: Autumn
– volume: 220
  start-page: 1618
  year: 2017
  ident: ref_78
  article-title: Propulsion in hexapod locomotion: How do desert ants traverse slopes?
  publication-title: J. Exp. Biol.
  contributor:
    fullname: Reinhardt
– volume: 5
  start-page: 1303
  year: 2008
  ident: ref_19
  article-title: Phasing of dragonfly wings can improve aerodynamic efficiency by removing swirl
  publication-title: J. R. Soc. Interface
  doi: 10.1098/rsif.2008.0124
  contributor:
    fullname: Usherwood
– volume: 21
  start-page: 27
  year: 2000
  ident: ref_47
  article-title: Fabrication of microfluidic systems in poly(dimethylsiloxane)
  publication-title: Electrophoresis
  doi: 10.1002/(SICI)1522-2683(20000101)21:1<27::AID-ELPS27>3.0.CO;2-C
  contributor:
    fullname: McDonald
– volume: 268
  start-page: 87
  year: 1995
  ident: ref_110
  article-title: Muscle efficiency and elastic storage in the flight motor of Drosophila
  publication-title: Science
  doi: 10.1126/science.7701346
  contributor:
    fullname: Dickinson
– volume: 136
  start-page: 217
  year: 1989
  ident: ref_52
  article-title: Ground reaction forces at different speeds of human walking and running
  publication-title: Acta Physiol. Scand.
  doi: 10.1111/j.1748-1716.1989.tb08655.x
  contributor:
    fullname: Nilsson
– ident: ref_11
  doi: 10.1109/IROS.2011.6048792
– volume: 544
  start-page: 92
  year: 2017
  ident: ref_17
  article-title: Smart wing rotation and trailing-edge vortices enable high frequency mosquito flight
  publication-title: Nature
  doi: 10.1038/nature21727
  contributor:
    fullname: Bomphrey
– volume: 29
  start-page: 055003
  year: 2019
  ident: ref_92
  article-title: A MEMS-based measurement system for evaluating the force-length relationship of human induced pluripotent stem cell-derived cardiomyocytes adhered on a substrate
  publication-title: J. Micromech. Microeng.
  doi: 10.1088/1361-6439/ab093d
  contributor:
    fullname: Matsudaira
– volume: 29
  start-page: 124703
  year: 2020
  ident: ref_96
  article-title: Revealing stepping forces in sub-mg tiny insect walking
  publication-title: Chin. Phys. B
  doi: 10.1088/1674-1056/abb7ff
  contributor:
    fullname: Zheng
– volume: 521
  start-page: 460
  year: 2015
  ident: ref_3
  article-title: Science, technology and the future of small autonomous drones
  publication-title: Nature
  doi: 10.1038/nature14542
  contributor:
    fullname: Floreano
– ident: ref_104
– volume: 44
  start-page: 637
  year: 2011
  ident: ref_81
  article-title: Vertical ground reaction forces diminish in mice after botulinum toxin injection
  publication-title: J. Biomech.
  doi: 10.1016/j.jbiomech.2010.11.011
  contributor:
    fullname: Manske
– volume: 4
  start-page: 015002
  year: 2009
  ident: ref_15
  article-title: Size effects on insect hovering aerodynamics: An integrated computational study
  publication-title: Bioinspir. Biomim.
  doi: 10.1088/1748-3182/4/1/015002
  contributor:
    fullname: Liu
– volume: 13
  start-page: 61
  year: 1980
  ident: ref_107
  article-title: A two-component dynamic wind tunnel balance for mounted insects
  publication-title: J. Phys. E Sci. Instrum.
  doi: 10.1088/0022-3735/13/1/017
  contributor:
    fullname: Buckholz
– volume: 25
  start-page: 033001
  year: 2015
  ident: ref_40
  article-title: Micromachined high-g accelerometers: A review
  publication-title: J. Micromech. Microeng.
  doi: 10.1088/0960-1317/25/3/033001
  contributor:
    fullname: Narasimhan
– ident: ref_95
  doi: 10.1109/TRANSDUCERS.2019.8808200
– volume: 1837
  start-page: 012010
  year: 2021
  ident: ref_124
  article-title: Force/Displacement MEMS Based on Electromagnetic Field Principle for Tiny Insects Monitoring
  publication-title: J. Phys. Conf. Ser.
  doi: 10.1088/1742-6596/1837/1/012010
  contributor:
    fullname: Hricko
– volume: 7
  start-page: 1603
  year: 2010
  ident: ref_35
  article-title: Frequency response of lift control in Drosophila
  publication-title: J. R. Soc. Interface
  doi: 10.1098/rsif.2010.0040
  contributor:
    fullname: Graetzel
– volume: 15
  start-page: 056005
  year: 2020
  ident: ref_67
  article-title: Impact of slope on dynamics of running and climbing
  publication-title: Bioinspir. Biomim.
  doi: 10.1088/1748-3190/ab4467
  contributor:
    fullname: Brown
– volume: 212
  start-page: 2426
  year: 2009
  ident: ref_75
  article-title: Dynamics and kinematics of ant locomotion: Do wood ants climb on level surfaces?
  publication-title: J. Exp. Biol.
  doi: 10.1242/jeb.026880
  contributor:
    fullname: Reinhardt
– volume: 286
  start-page: 20191327
  year: 2019
  ident: ref_73
  article-title: Shear-sensitive adhesion enables size-independent adhesive performance in stick insects
  publication-title: Proc. R. Soc. B Biol. Sci.
  doi: 10.1098/rspb.2019.1327
  contributor:
    fullname: Labonte
– ident: ref_29
  doi: 10.1109/MEMSYS.2018.8346695
– volume: 2
  start-page: S16
  year: 2007
  ident: ref_32
  article-title: MEMS capacitive force sensors for cellular and flight biomechanics
  publication-title: Biomed. Mater.
  doi: 10.1088/1748-6041/2/1/S03
  contributor:
    fullname: Sun
– volume: 97
  start-page: 513
  year: 2009
  ident: ref_43
  article-title: Review: Semiconductor Piezoresistance for Microsystems
  publication-title: Proc. IEEE
  doi: 10.1109/JPROC.2009.2013612
  contributor:
    fullname: Barlian
– volume: 10
  start-page: 016013
  year: 2015
  ident: ref_94
  article-title: Stress distribution and contact area measurements of a gecko toe using a high-resolution tactile sensor
  publication-title: Bioinspir. Biomim.
  doi: 10.1088/1748-3190/10/1/016013
  contributor:
    fullname: Eric
– volume: 158
  start-page: 369
  year: 1991
  ident: ref_63
  article-title: Leg Design in Hexapedal Runners
  publication-title: J. Exp. Biol.
  doi: 10.1242/jeb.158.1.369
  contributor:
    fullname: Full
– volume: 14
  start-page: 036010
  year: 2019
  ident: ref_10
  article-title: Design and demonstration of a bio-inspired flapping-wing-assisted jumping robot
  publication-title: Bioinspir. Biomim.
  doi: 10.1088/1748-3190/aafff5
  contributor:
    fullname: Truong
– volume: 21
  start-page: 92
  year: 2021
  ident: ref_41
  article-title: Concepts, Roadmaps and Challenges of Ovenized MEMS Gyroscopes: A Review
  publication-title: IEEE Sens. J.
  doi: 10.1109/JSEN.2020.3012484
  contributor:
    fullname: Wang
– volume: 275
  start-page: 1329
  year: 2008
  ident: ref_70
  article-title: Pushing versus pulling: Division of labour between tarsal attachment pads in cockroaches
  publication-title: Proc. R. Soc. B Biol. Sci.
  doi: 10.1098/rspb.2007.1660
  contributor:
    fullname: Clemente
– ident: ref_101
  doi: 10.3390/s17102431
– volume: 54
  start-page: 118
  year: 2006
  ident: ref_1
  article-title: Wave CPG model for autonomous decentralized multi-legged robot: Gait generation and walking speed control
  publication-title: Robot. Auton. Syst.
  doi: 10.1016/j.robot.2005.09.021
  contributor:
    fullname: Inagaki
– volume: 54
  start-page: 612
  year: 1993
  ident: ref_53
  article-title: Contributions to variance in force-plate analysis of gait in dogs
  publication-title: Am. J. Vet. Res.
  doi: 10.2460/ajvr.1993.54.04.612
  contributor:
    fullname: Jevens
– volume: 2017
  start-page: 22
  year: 2017
  ident: ref_4
  article-title: A Survey of Bioinspired Jumping Robot: Takeoff, Air Posture Adjustment, and Landing Buffer
  publication-title: Appl. Bionics Biomech.
  doi: 10.1155/2017/4780160
  contributor:
    fullname: Zhang
– volume: 32
  start-page: 10522
  year: 2016
  ident: ref_97
  article-title: Elegant Shadow Making Tiny Force Visible for Water-Walking Arthropods and Updated Archimedes’ Principle
  publication-title: Langmuir
  doi: 10.1021/acs.langmuir.6b02922
  contributor:
    fullname: Zheng
– volume: 217
  start-page: 704
  year: 2014
  ident: ref_76
  article-title: Ultra-miniature force plate for measuring triaxial forces in the micronewton range
  publication-title: J. Exp. Biol.
  contributor:
    fullname: Reinhardt
– volume: 340
  start-page: 603
  year: 2013
  ident: ref_7
  article-title: Controlled Flight of a Biologically Inspired, Insect-Scale Robot
  publication-title: Science
  doi: 10.1126/science.1231806
  contributor:
    fullname: Ma
– volume: 156
  start-page: 215
  year: 1991
  ident: ref_64
  article-title: Mechanics of a Rapid Running Insect: 2-Legged, 4-Legged and 6-Legged Locomotion
  publication-title: J. Exp. Biol.
  doi: 10.1242/jeb.156.1.215
  contributor:
    fullname: Full
– volume: 72
  start-page: 1388
  year: 1998
  ident: ref_88
  article-title: Independent detection of vertical and lateral forces with a sidewall-implanted dual-axis piezoresistive cantilever
  publication-title: Appl. Phys. Lett
  doi: 10.1063/1.121064
  contributor:
    fullname: Chui
– volume: 24
  start-page: 065014
  year: 2014
  ident: ref_25
  article-title: MEMS two-axis force plate array used to measure the ground reaction forces during the running motion of an ant
  publication-title: J. Micromech. Microeng.
  doi: 10.1088/0960-1317/24/6/065014
  contributor:
    fullname: Takahashi
– volume: 16
  start-page: 709
  year: 2007
  ident: ref_24
  article-title: A Multiaxis Force Sensor for the Study of Insect Biomechanics
  publication-title: Microelectromech. Syst. J.
  doi: 10.1109/JMEMS.2007.893677
  contributor:
    fullname: Bartsch
– ident: ref_6
  doi: 10.3390/app10238607
– volume: 13
  start-page: 113
  year: 1980
  ident: ref_57
  article-title: Mechanical design, constructional details and calibration of a new force plate
  publication-title: J. Biomech.
  doi: 10.1016/0021-9290(80)90185-2
  contributor:
    fullname: Gola
– volume: 31
  start-page: 287
  year: 2013
  ident: ref_2
  article-title: Soft robotics: A bioinspired evolution in robotics
  publication-title: Trends Biotechnol.
  doi: 10.1016/j.tibtech.2013.03.002
  contributor:
    fullname: Kim
– volume: 325
  start-page: 1549
  year: 2009
  ident: ref_16
  article-title: Details of Insect Wing Design and Deformation Enhance Aerodynamic Function and Flight Efficiency
  publication-title: Science
  doi: 10.1126/science.1175928
  contributor:
    fullname: Young
– volume: 207
  start-page: 3515
  year: 2004
  ident: ref_90
  article-title: Distance and force production during jumping in wild-type and mutant Drosophila melanogaster
  publication-title: J. Exp. Biol.
  doi: 10.1242/jeb.01181
  contributor:
    fullname: Zumstein
– volume: 234
  start-page: 359
  year: 2015
  ident: ref_21
  article-title: An overview of micro-force sensing techniques
  publication-title: Sens. Actuators A Phys.
  doi: 10.1016/j.sna.2015.09.028
  contributor:
    fullname: Wei
– volume: 192
  start-page: 1213
  year: 2006
  ident: ref_68
  article-title: Biomechanics of smooth adhesive pads in insects: Influence of tarsal secretion on attachment performance
  publication-title: J. Comp. Physiol. A
  doi: 10.1007/s00359-006-0150-5
  contributor:
    fullname: Drechsler
– volume: 211
  start-page: 3333
  year: 2008
  ident: ref_69
  article-title: Comparison of smooth and hairy attachment pads in insects: Friction, adhesion and mechanisms for direction-dependence
  publication-title: J. Exp. Biol.
  doi: 10.1242/jeb.020941
  contributor:
    fullname: Bullock
– volume: 96
  start-page: 522
  year: 2016
  ident: ref_128
  article-title: Direct laser writing for creating porous graphitic structures and their use for flexible and highly sensitive sensor and sensor arrays
  publication-title: Carbon
  doi: 10.1016/j.carbon.2015.09.076
  contributor:
    fullname: Luo
– volume: 199
  start-page: 281
  year: 1996
  ident: ref_106
  article-title: Aerodynamic characteristics of the wings and body of a dragonfly
  publication-title: J. Exp. Biol.
  doi: 10.1242/jeb.199.2.281
  contributor:
    fullname: Okamoto
– ident: ref_34
  doi: 10.1109/BIOROB.2008.4762802
– volume: 67
  start-page: 1721
  year: 2013
  ident: ref_48
  article-title: A review on 3D micro-additive manufacturing technologies
  publication-title: Int. J. Adv. Manuf. Technol.
  doi: 10.1007/s00170-012-4605-2
  contributor:
    fullname: Vaezi
– volume: 213
  start-page: 1133
  year: 2010
  ident: ref_85
  article-title: The substrate as a skeleton: Ground reaction forces from a soft-bodied legged animal
  publication-title: J. Exp. Biol.
  doi: 10.1242/jeb.037796
  contributor:
    fullname: Lin
– volume: 22
  start-page: 055015
  year: 2012
  ident: ref_116
  article-title: Differential pressure sensor using a piezoresistive cantilever
  publication-title: J. Micromech. Microeng.
  doi: 10.1088/0960-1317/22/5/055015
  contributor:
    fullname: Takahashi
– ident: ref_72
  doi: 10.1371/journal.pone.0141269
– volume: 22
  start-page: 8282
  year: 2022
  ident: ref_22
  article-title: Designs of Compliant Mechanism-Based Force Sensors: A Review
  publication-title: IEEE Sens. J.
  doi: 10.1109/JSEN.2022.3161963
  contributor:
    fullname: Gan
– volume: 21
  start-page: 19806
  year: 2021
  ident: ref_132
  article-title: Pitot-static-tube-based waterflow sensor for marine biologging via inside sealing of an incompressible liquid
  publication-title: IEEE Sens. J.
  doi: 10.1109/JSEN.2021.3094565
  contributor:
    fullname: Kishimoto
– volume: 93
  start-page: 333
  year: 1981
  ident: ref_58
  article-title: Short Communication: A Simple Design for a Force-Plate to Measure Ground Reaction Forces
  publication-title: J. Exp. Biol.
  doi: 10.1242/jeb.93.1.333
  contributor:
    fullname: Heglund
– volume: 8
  start-page: 015228
  year: 2018
  ident: ref_91
  article-title: The study of dynamic force acted on water strider leg departing from water surface
  publication-title: AIP Adv.
  doi: 10.1063/1.5012578
  contributor:
    fullname: Sun
– volume: 11
  start-page: 854
  year: 2014
  ident: ref_74
  article-title: Insect adhesion on rough surfaces: Analysis of adhesive contact of smooth and hairy pads on transparent microstructured substrates
  publication-title: J. R. Soc. Interface
  doi: 10.1098/rsif.2014.0499
  contributor:
    fullname: Zhou
– volume: 199
  start-page: 2085
  year: 1996
  ident: ref_109
  article-title: The wake dynamics and flight forces of the fruit fly Drosophila melanogaster
  publication-title: J. Exp. Biol.
  doi: 10.1242/jeb.199.9.2085
  contributor:
    fullname: Dickinson
– volume: 13
  start-page: 415
  year: 2016
  ident: ref_93
  article-title: Measuring cell-generated forces: A guide to the available tools
  publication-title: Nat. Meth
  doi: 10.1038/nmeth.3834
  contributor:
    fullname: Polacheck
– volume: 14
  start-page: 046004
  year: 2019
  ident: ref_84
  article-title: A force-measuring and behaviour-recording system consisting of 24 individual 3D force plates for the study of single limb forces in climbing animals on a quasi-cylindrical tower
  publication-title: Bioinspir. Biomim.
  doi: 10.1088/1748-3190/ab1d11
  contributor:
    fullname: Ji
– ident: ref_105
– volume: 14
  start-page: 4
  year: 2005
  ident: ref_31
  article-title: Characterizing fruit fly flight behavior using a microforce sensor with a new comb-drive configuration
  publication-title: J. Microelectromech. Syst.
  doi: 10.1109/JMEMS.2004.839028
  contributor:
    fullname: Sun
– volume: 214
  start-page: 703
  year: 2011
  ident: ref_79
  article-title: Dynamics of gecko locomotion: A force-measuring array to measure 3D reaction forces
  publication-title: J. Exp. Biol.
  doi: 10.1242/jeb.051144
  contributor:
    fullname: Dai
– volume: 13
  start-page: 1094
  year: 2021
  ident: ref_126
  article-title: Biomimetic Soft Polymer Microstructures and Piezoresistive Graphene MEMS Sensors Using Sacrificial Metal 3D Printing
  publication-title: ACS Appl. Mater. Interfaces
  doi: 10.1021/acsami.0c21295
  contributor:
    fullname: Kamat
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Snippet Small insects perform agile locomotion, such as running, jumping, and flying. Recently, many robots, inspired by such insect performance, have been developed...
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SubjectTerms Commercialization
Design
Etching
flight force
force plate
Force plates
ground reaction force
Hydrogels
insect
Insects
Locomotion
Measurement
Measurement methods
Measuring instruments
MEMS
Microelectromechanical systems
probe sensor
Review
Robots
Semiconductors
Sensors
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Title MEMS-Based Micro Sensors for Measuring the Tiny Forces Acting on Insects
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