On the deactivation of the dopant and electronic structure in reactively sputtered transparent Al-doped ZnO thin films
We report on the possible origin of electrical heterogeneities in 4 at% Al-doped ZnO (AZO) reactively sputtered films. It is found through the Zn L3 and Al K edge x-ray absorption near-edge structure that a fraction of the Al dopant is deactivated by its positioning in octahedral conformation with o...
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Published in | Journal of physics. D, Applied physics Vol. 43; no. 13; p. 132003 |
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Main Authors | , , , , , |
Format | Journal Article |
Language | English |
Published |
Bristol
IOP Publishing
07.04.2010
Institute of Physics |
Subjects | |
Online Access | Get full text |
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