Evaluation of Titanium Vacuum Chamber as Getter Pump

• Published in: E-journal of surface science and nanotechnology Vol. 20; no. 2; pp. 107 - 118
• Main Authors: Kamiya, Junichiro, Takano, Kazuhiro, Wada, Kaoru, Yuza, Hiromu
• Format: Journal Article
• Language: English
• Published: Tokyo The Japan Society of Vacuum and Surface Science 07.05.2022; Japan Science and Technology Agency
• Subjects: Accumulation; Baking; Diffusion; High temperature; High vacuum; NEG coating; Orifices; Oxide coatings; Photoelectrons; Pumping; Sputtering; Surface oxide film; Thermal diffusion; Titanium; Titanium oxides; Titanium vacuum chamber; Vacuum chambers; Vacuum furnaces

Methods for removing the surface oxide film have been investigated to make a titanium vacuum chamber itself act as a getter pump. The build-up test of the titanium chamber has been performed to investigate the effect of baking. The result showed that the higher the baking temperature the lower the p...