Thin-film PMUTs: a review of over 40 years of research - Roy, Kaustav; Lee, Joshua En-Yuan; Lee, Chengkuo (Microsystems & nanoengineering, 2023)
Keywords: 639/166/987; 639/925/927/1007; Commercialization; Design; Engineering; Literature reviews; Manufacturing; Microelectromechanical systems; Piezoelectricity; Production methods; Research facilities; Review; Review Article; Reviews; Thin films; Electrical and electronic engineering; Electronic devices