Thin-film PMUTs: a review of over 40 years of research

Thin-film PMUTs have been important research topics among microultrasound experts, and a concise review on their research progress is reported herein. Through rigorous surveying, scrutinization, and perception, it has been determined that the work in this field began nearly 44 years ago with the pri...

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Published inMicrosystems & nanoengineering Vol. 9; no. 1; pp. 95 - 17
Main Authors Roy, Kaustav, Lee, Joshua En-Yuan, Lee, Chengkuo
Format Journal Article
LanguageEnglish
Published London Nature Publishing Group UK 21.07.2023
Springer Nature B.V
Nature Publishing Group
Subjects
639/166/987
639/925/927/1007
Commercialization
Design
Engineering
Literature reviews
Manufacturing
Microelectromechanical systems
Piezoelectricity
Production methods
Research facilities
Review
Review Article
Reviews
Thin films
Electrical and electronic engineering
Electronic devices
Online AccessGet full text

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Abstract Thin-film PMUTs have been important research topics among microultrasound experts, and a concise review on their research progress is reported herein. Through rigorous surveying, scrutinization, and perception, it has been determined that the work in this field began nearly 44 years ago with the primitive development of functional piezoelectric thin-film materials. To date, there are three major companies commercializing thin-film PMUTs on a bulk scale. This commercialization illustrates the extensive contributions made by more than 70 different centers, research institutes, and agencies across 4 different continents regarding the vast development of these devices’ design, manufacturing, and function. This review covers these important contributions in a short yet comprehensive manner; in particular, this paper educates readers about the global PMUT outlook, their governing design principles, their manufacturing methods, nonconventional yet useful PMUT designs, and category-wise applications. Crucial comparison charts of thin-film piezoelectric material used in PMUTs, and their categorically targeted applications are depicted and discussed to enlighten any MEMS designer who plans to work with PMUTs. Moreover, each relevant section features clear future predictions based on the author’s past knowledge and expertise in this field of research and on the findings of a careful literature survey. In short, this review is a one-stop time-efficient guide for anyone interested in learning about these small devices.
AbstractList Thin-film PMUTs have been important research topics among microultrasound experts, and a concise review on their research progress is reported herein. Through rigorous surveying, scrutinization, and perception, it has been determined that the work in this field began nearly 44 years ago with the primitive development of functional piezoelectric thin-film materials. To date, there are three major companies commercializing thin-film PMUTs on a bulk scale. This commercialization illustrates the extensive contributions made by more than 70 different centers, research institutes, and agencies across 4 different continents regarding the vast development of these devices' design, manufacturing, and function. This review covers these important contributions in a short yet comprehensive manner; in particular, this paper educates readers about the global PMUT outlook, their governing design principles, their manufacturing methods, nonconventional yet useful PMUT designs, and category-wise applications. Crucial comparison charts of thin-film piezoelectric material used in PMUTs, and their categorically targeted applications are depicted and discussed to enlighten any MEMS designer who plans to work with PMUTs. Moreover, each relevant section features clear future predictions based on the author's past knowledge and expertise in this field of research and on the findings of a careful literature survey. In short, this review is a one-stop time-efficient guide for anyone interested in learning about these small devices.Thin-film PMUTs have been important research topics among microultrasound experts, and a concise review on their research progress is reported herein. Through rigorous surveying, scrutinization, and perception, it has been determined that the work in this field began nearly 44 years ago with the primitive development of functional piezoelectric thin-film materials. To date, there are three major companies commercializing thin-film PMUTs on a bulk scale. This commercialization illustrates the extensive contributions made by more than 70 different centers, research institutes, and agencies across 4 different continents regarding the vast development of these devices' design, manufacturing, and function. This review covers these important contributions in a short yet comprehensive manner; in particular, this paper educates readers about the global PMUT outlook, their governing design principles, their manufacturing methods, nonconventional yet useful PMUT designs, and category-wise applications. Crucial comparison charts of thin-film piezoelectric material used in PMUTs, and their categorically targeted applications are depicted and discussed to enlighten any MEMS designer who plans to work with PMUTs. Moreover, each relevant section features clear future predictions based on the author's past knowledge and expertise in this field of research and on the findings of a careful literature survey. In short, this review is a one-stop time-efficient guide for anyone interested in learning about these small devices.
Thin-film PMUTs have been important research topics among microultrasound experts, and a concise review on their research progress is reported herein. Through rigorous surveying, scrutinization, and perception, it has been determined that the work in this field began nearly 44 years ago with the primitive development of functional piezoelectric thin-film materials. To date, there are three major companies commercializing thin-film PMUTs on a bulk scale. This commercialization illustrates the extensive contributions made by more than 70 different centers, research institutes, and agencies across 4 different continents regarding the vast development of these devices’ design, manufacturing, and function. This review covers these important contributions in a short yet comprehensive manner; in particular, this paper educates readers about the global PMUT outlook, their governing design principles, their manufacturing methods, nonconventional yet useful PMUT designs, and category-wise applications. Crucial comparison charts of thin-film piezoelectric material used in PMUTs, and their categorically targeted applications are depicted and discussed to enlighten any MEMS designer who plans to work with PMUTs. Moreover, each relevant section features clear future predictions based on the author’s past knowledge and expertise in this field of research and on the findings of a careful literature survey. In short, this review is a one-stop time-efficient guide for anyone interested in learning about these small devices.
Abstract Thin-film PMUTs have been important research topics among microultrasound experts, and a concise review on their research progress is reported herein. Through rigorous surveying, scrutinization, and perception, it has been determined that the work in this field began nearly 44 years ago with the primitive development of functional piezoelectric thin-film materials. To date, there are three major companies commercializing thin-film PMUTs on a bulk scale. This commercialization illustrates the extensive contributions made by more than 70 different centers, research institutes, and agencies across 4 different continents regarding the vast development of these devices’ design, manufacturing, and function. This review covers these important contributions in a short yet comprehensive manner; in particular, this paper educates readers about the global PMUT outlook, their governing design principles, their manufacturing methods, nonconventional yet useful PMUT designs, and category-wise applications. Crucial comparison charts of thin-film piezoelectric material used in PMUTs, and their categorically targeted applications are depicted and discussed to enlighten any MEMS designer who plans to work with PMUTs. Moreover, each relevant section features clear future predictions based on the author’s past knowledge and expertise in this field of research and on the findings of a careful literature survey. In short, this review is a one-stop time-efficient guide for anyone interested in learning about these small devices.
ArticleNumber 95
Author Lee, Joshua En-Yuan
Roy, Kaustav
Lee, Chengkuo
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  surname: Lee
  fullname: Lee, Chengkuo
  email: elelc@nus.edu.sg
  organization: Department of Electrical and Computer Engineering, National University of Singapore, Center for Intelligent Sensor and MEMS (CISM), National University of Singapore
BackLink https://www.ncbi.nlm.nih.gov/pubmed/37484500$$D View this record in MEDLINE/PubMed
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Keywords Electrical and electronic engineering
Electronic devices
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Snippet Thin-film PMUTs have been important research topics among microultrasound experts, and a concise review on their research progress is reported herein. Through...
Abstract Thin-film PMUTs have been important research topics among microultrasound experts, and a concise review on their research progress is reported herein....
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SubjectTerms 639/166/987
639/925/927/1007
Commercialization
Design
Engineering
Literature reviews
Manufacturing
Microelectromechanical systems
Piezoelectricity
Production methods
Research facilities
Review
Review Article
Reviews
Thin films
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Title Thin-film PMUTs: a review of over 40 years of research
URI https://link.springer.com/article/10.1038/s41378-023-00555-7
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