APA (7th ed.) Citation

Roy, K., Lee, J. E., & Lee, C. (2023). Thin-film PMUTs: A review of over 40 years of research. Microsystems & nanoengineering, 9(1), 95-17. https://doi.org/10.1038/s41378-023-00555-7

Chicago Style (17th ed.) Citation

Roy, Kaustav, Joshua En-Yuan Lee, and Chengkuo Lee. "Thin-film PMUTs: A Review of over 40 Years of Research." Microsystems & Nanoengineering 9, no. 1 (2023): 95-17. https://doi.org/10.1038/s41378-023-00555-7.

MLA (9th ed.) Citation

Roy, Kaustav, et al. "Thin-film PMUTs: A Review of over 40 Years of Research." Microsystems & Nanoengineering, vol. 9, no. 1, 2023, pp. 95-17, https://doi.org/10.1038/s41378-023-00555-7.