Sensitivity enhancement of nonlinear micromechanical sensors using parametric symmetry breaking - Xu, Yutao; Yang, Qiqi; Song, Jiahao; Wei, Xueyong (Microsystems & nanoengineering, 2024)
Keywords: 639/166/987; 639/766; Bifurcations; Broken symmetry; Engineering; Frequency dependence; Frequency response; Frequency shift; Hysteresis; Linear vibration; Microelectromechanical systems; Nodes; Nonlinear response; Nonlinearity; Parameter sensitivity; Sensitivity enhancement; Sensors; Symmetry; Tracking