Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging - Han, Xiangguang; Huang, Mimi; Wu, Zutang; Gao, Yi; Xia, Yong; Yang, Ping; Fan, Shu; Lu, Xuhao; Yang, Xiaokai; Liang, Lin; Su, Wenbi; Wang, Lu; et al. (Microsystems & nanoengineering, 2023)
Keywords: 639/166/987; 639/301/357/995; Accuracy; Avionics; Control methods; Differential pressure; Electronic packaging; Engineering; Microelectromechanical systems; Packaging; Packaging design; Pressure; Pressure sensors; Resonant frequencies; Review; Review Article; Sensors; Trends; Electrical and electronic engineering; Electronic properties and materials