APA (7th ed.) Citation

Han, X., Huang, M., Wu, Z., Gao, Y., Xia, Y., Yang, P., . . . Jiang, Z. (2023). Advances in high-performance MEMS pressure sensors: Design, fabrication, and packaging. Microsystems & nanoengineering, 9(1), 156-34. https://doi.org/10.1038/s41378-023-00620-1

Chicago Style (17th ed.) Citation

Han, Xiangguang, et al. "Advances in High-performance MEMS Pressure Sensors: Design, Fabrication, and Packaging." Microsystems & Nanoengineering 9, no. 1 (2023): 156-34. https://doi.org/10.1038/s41378-023-00620-1.

MLA (9th ed.) Citation

Han, Xiangguang, et al. "Advances in High-performance MEMS Pressure Sensors: Design, Fabrication, and Packaging." Microsystems & Nanoengineering, vol. 9, no. 1, 2023, pp. 156-34, https://doi.org/10.1038/s41378-023-00620-1.