Nanometer-thick copper films with low resistivity grown on 2D material surfaces

Thin Copper (Cu) films (15 nm) are deposited on different 2D material surfaces through e-beam deposition. With the assist of van der Waals epitaxy growth mode on 2D material surfaces, preferential planar growth is observed for Cu films on both MoS 2 and WSe 2 surfaces at room temperature, which will...

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Bibliographic Details
Published inScientific reports Vol. 12; no. 1; pp. 1823 - 7
Main Authors Liu, Yu-Wei, Zhang, Dun-Jie, Tsai, Po-Cheng, Chiang, Chen-Tu, Tu, Wei-Chen, Lin, Shih-Yen
Format Journal Article
LanguageEnglish
Published London Nature Publishing Group UK 02.02.2022
Nature Publishing Group
Nature Portfolio
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