Extending the spectrum of fully integrated photonics to submicrometre wavelengths

• Published in: Nature (London) Vol. 610; no. 7930; pp. 54 - 60
• Main Authors: Tran, Minh A., Zhang, Chong, Morin, Theodore J., Chang, Lin, Barik, Sabyasachi, Yuan, Zhiquan, Lee, Woonghee, Kim, Glenn, Malik, Aditya, Zhang, Zeyu, Guo, Joel, Wang, Heming, Shen, Boqiang, Wu, Lue, Vahala, Kerry, Bowers, John E., Park, Hyundai, Komljenovic, Tin
• Format: Journal Article
• Language: English
• Published: London Nature Publishing Group UK 06.10.2022; Nature Publishing Group
• Subjects: 639/624/1020/1093; 639/624/1075/1079; 639/624/399/1099; Atomic physics; Efficiency; Energy gap; Fabrication; High temperature; Humanities and Social Sciences; Integrated circuits; Lasers; Modulators; multidisciplinary; Photonics; Photons; Receivers & amplifiers; Science; Science (multidisciplinary); Semiconductors; Silicon; Silicon nitride; Thermal stability; Waveguides; Wavelengths
• ISSN: 0028-0836; 1476-4687; 1476-4687
• DOI: 10.1038/s41586-022-05119-9

Integrated photonics has profoundly affected a wide range of technologies underpinning modern society 1 – 4 . The ability to fabricate a complete optical system on a chip offers unrivalled scalability, weight, cost and power efficiency 5 , 6 . Over the last decade, the progression from pure III–V materials platforms to silicon photonics has significantly broadened the scope of integrated photonics, by combining integrated lasers with the high-volume, advanced fabrication capabilities of the commercial electronics industry 7 , 8 . Yet, despite remarkable manufacturing advantages, reliance on silicon-based waveguides currently limits the spectral window available to photonic integrated circuits (PICs). Here, we present a new generation of integrated photonics by directly uniting III–V materials with silicon nitride waveguides on Si wafers. Using this technology, we present a fully integrated PIC at photon energies greater than the bandgap of silicon, demonstrating essential photonic building blocks, including lasers, amplifiers, photodetectors, modulators and passives, all operating at submicrometre wavelengths. Using this platform, we achieve unprecedented coherence and tunability in an integrated laser at short wavelength. Furthermore, by making use of this higher photon energy, we demonstrate superb high-temperature performance and kHz-level fundamental linewidths at elevated temperatures. Given the many potential applications at short wavelengths, the success of this integration strategy unlocks a broad range of new integrated photonics applications.  Fully integrated photonics at submicrometre wavelengths is realized by a heterogeneous integration technology.