Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity

• Published in: Nature communications Vol. 14; no. 1; pp. 1188 - 7
• Main Authors: Lee, Daehun, Jahanbani, Shahin, Kramer, Jack, Lu, Ruochen, Lai, Keji
• Format: Journal Article
• Language: English
• Published: London Nature Publishing Group UK 02.03.2023; Nature Publishing Group; Nature Portfolio
• Subjects: 639/166/987; 639/766/1130/2798; Acoustics; Bulk acoustic wave devices; Defects; Displacement; Energy dissipation; Finite element method; Humanities and Social Sciences; Mathematical models; Microelectromechanical systems; multidisciplinary; Quantum phenomena; Resonators; Room temperature; Science; Science (multidisciplinary); Sensitivity; Spatial discrimination; Spatial resolution

Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the nanoscale imaging of a freestanding super-high-frequency (3 – 30...