Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity - Lee, Daehun; Jahanbani, Shahin; Kramer, Jack; Lu, Ruochen; Lai, Keji (Nature communications, 2023)
Keywords: 639/166/987; 639/766/1130/2798; Acoustics; Bulk acoustic wave devices; Defects; Displacement; Energy dissipation; Finite element method; Humanities and Social Sciences; Mathematical models; Microelectromechanical systems; multidisciplinary; Quantum phenomena; Resonators; Room temperature; Science; Science (multidisciplinary); Sensitivity; Spatial discrimination; Spatial resolution