Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity
Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the nanoscale imaging of a freestanding super-high-frequency (3 – 30...
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| Published in | Nature communications Vol. 14; no. 1; pp. 1188 - 7 |
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| Main Authors | , , , , |
| Format | Journal Article |
| Language | English |
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London
Nature Publishing Group UK
02.03.2023
Nature Publishing Group Nature Portfolio |
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| Abstract | Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the nanoscale imaging of a freestanding super-high-frequency (3 – 30 GHz) lateral overtone bulk acoustic resonator with unprecedented spatial resolution and displacement sensitivity. Using transmission-mode microwave impedance microscopy, we have visualized mode profiles of individual overtones and analyzed higher-order transverse spurious modes and anchor loss. The integrated TMIM signals are in good agreement with the stored mechanical energy in the resonator. Quantitative analysis with finite-element modeling shows that the noise floor is equivalent to an in-plane displacement of 10 fm/√Hz at room temperatures, which can be further improved under cryogenic environments. Our work contributes to the design and characterization of MEMS resonators with better performance for telecommunication, sensing, and quantum information science applications.
Implementing MEMS resonators calls for detailed microscopic understanding of the devices and imperfections from microfabrication. Lee et al. imaged super-high-frequency acoustic resonators with a spatial resolution of 100 nm and a displacement sensitivity of 10 fm/√Hz. Individual overtones, spurious modes, and acoustic leakage are also visualized and analyzed. |
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| AbstractList | Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the nanoscale imaging of a freestanding super-high-frequency (3 – 30 GHz) lateral overtone bulk acoustic resonator with unprecedented spatial resolution and displacement sensitivity. Using transmission-mode microwave impedance microscopy, we have visualized mode profiles of individual overtones and analyzed higher-order transverse spurious modes and anchor loss. The integrated TMIM signals are in good agreement with the stored mechanical energy in the resonator. Quantitative analysis with finite-element modeling shows that the noise floor is equivalent to an in-plane displacement of 10 fm/√Hz at room temperatures, which can be further improved under cryogenic environments. Our work contributes to the design and characterization of MEMS resonators with better performance for telecommunication, sensing, and quantum information science applications.
Implementing MEMS resonators calls for detailed microscopic understanding of the devices and imperfections from microfabrication. Lee et al. imaged super-high-frequency acoustic resonators with a spatial resolution of 100 nm and a displacement sensitivity of 10 fm/√Hz. Individual overtones, spurious modes, and acoustic leakage are also visualized and analyzed. Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the nanoscale imaging of a freestanding super-high-frequency (3 – 30 GHz) lateral overtone bulk acoustic resonator with unprecedented spatial resolution and displacement sensitivity. Using transmission-mode microwave impedance microscopy, we have visualized mode profiles of individual overtones and analyzed higher-order transverse spurious modes and anchor loss. The integrated TMIM signals are in good agreement with the stored mechanical energy in the resonator. Quantitative analysis with finite-element modeling shows that the noise floor is equivalent to an in-plane displacement of 10 fm/√Hz at room temperatures, which can be further improved under cryogenic environments. Our work contributes to the design and characterization of MEMS resonators with better performance for telecommunication, sensing, and quantum information science applications. Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the nanoscale imaging of a freestanding super-high-frequency (3 – 30 GHz) lateral overtone bulk acoustic resonator with unprecedented spatial resolution and displacement sensitivity. Using transmission-mode microwave impedance microscopy, we have visualized mode profiles of individual overtones and analyzed higher-order transverse spurious modes and anchor loss. The integrated TMIM signals are in good agreement with the stored mechanical energy in the resonator. Quantitative analysis with finite-element modeling shows that the noise floor is equivalent to an in-plane displacement of 10 fm/√Hz at room temperatures, which can be further improved under cryogenic environments. Our work contributes to the design and characterization of MEMS resonators with better performance for telecommunication, sensing, and quantum information science applications.Implementing MEMS resonators calls for detailed microscopic understanding of the devices and imperfections from microfabrication. Lee et al. imaged super-high-frequency acoustic resonators with a spatial resolution of 100 nm and a displacement sensitivity of 10 fm/√Hz. Individual overtones, spurious modes, and acoustic leakage are also visualized and analyzed. Implementing MEMS resonators calls for detailed microscopic understanding of the devices and imperfections from microfabrication. Lee et al. imaged super-high-frequency acoustic resonators with a spatial resolution of 100 nm and a displacement sensitivity of 10 fm/√Hz. Individual overtones, spurious modes, and acoustic leakage are also visualized and analyzed. Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the nanoscale imaging of a freestanding super-high-frequency (3 - 30 GHz) lateral overtone bulk acoustic resonator with unprecedented spatial resolution and displacement sensitivity. Using transmission-mode microwave impedance microscopy, we have visualized mode profiles of individual overtones and analyzed higher-order transverse spurious modes and anchor loss. The integrated TMIM signals are in good agreement with the stored mechanical energy in the resonator. Quantitative analysis with finite-element modeling shows that the noise floor is equivalent to an in-plane displacement of 10 fm/√Hz at room temperatures, which can be further improved under cryogenic environments. Our work contributes to the design and characterization of MEMS resonators with better performance for telecommunication, sensing, and quantum information science applications.Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels, spurious modes, and imperfections from microfabrication. Here, we report the nanoscale imaging of a freestanding super-high-frequency (3 - 30 GHz) lateral overtone bulk acoustic resonator with unprecedented spatial resolution and displacement sensitivity. Using transmission-mode microwave impedance microscopy, we have visualized mode profiles of individual overtones and analyzed higher-order transverse spurious modes and anchor loss. The integrated TMIM signals are in good agreement with the stored mechanical energy in the resonator. Quantitative analysis with finite-element modeling shows that the noise floor is equivalent to an in-plane displacement of 10 fm/√Hz at room temperatures, which can be further improved under cryogenic environments. Our work contributes to the design and characterization of MEMS resonators with better performance for telecommunication, sensing, and quantum information science applications. |
| ArticleNumber | 1188 |
| Author | Lee, Daehun Kramer, Jack Lu, Ruochen Jahanbani, Shahin Lai, Keji |
| Author_xml | – sequence: 1 givenname: Daehun orcidid: 0000-0002-4297-0393 surname: Lee fullname: Lee, Daehun organization: Department of Physics, University of Texas at Austin – sequence: 2 givenname: Shahin orcidid: 0000-0003-1924-9909 surname: Jahanbani fullname: Jahanbani, Shahin organization: Department of Physics, University of Texas at Austin – sequence: 3 givenname: Jack orcidid: 0000-0002-8078-8138 surname: Kramer fullname: Kramer, Jack organization: Department of Electrical and Computer Engineering, University of Texas at Austin – sequence: 4 givenname: Ruochen orcidid: 0000-0003-0025-3924 surname: Lu fullname: Lu, Ruochen email: ruochen@utexas.edu organization: Department of Electrical and Computer Engineering, University of Texas at Austin – sequence: 5 givenname: Keji orcidid: 0000-0002-4218-0201 surname: Lai fullname: Lai, Keji email: kejilai@physics.utexas.edu organization: Department of Physics, University of Texas at Austin |
| BackLink | https://www.ncbi.nlm.nih.gov/pubmed/36864039$$D View this record in MEDLINE/PubMed |
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| CitedBy_id | crossref_primary_10_1088_2631_8695_ad3c13 crossref_primary_10_1021_acs_nanolett_3c02747 crossref_primary_10_1063_5_0170215 crossref_primary_10_1016_j_device_2024_100474 crossref_primary_10_1016_j_ymssp_2025_112574 |
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| Snippet | Implementing microelectromechanical system (MEMS) resonators calls for detailed microscopic understanding of the devices, such as energy dissipation channels,... Implementing MEMS resonators calls for detailed microscopic understanding of the devices and imperfections from microfabrication. Lee et al. imaged... |
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| SubjectTerms | 639/166/987 639/766/1130/2798 Acoustics Bulk acoustic wave devices Defects Displacement Energy dissipation Finite element method Humanities and Social Sciences Mathematical models Microelectromechanical systems multidisciplinary Quantum phenomena Resonators Room temperature Science Science (multidisciplinary) Sensitivity Spatial discrimination Spatial resolution |
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| Title | Nanoscale imaging of super-high-frequency microelectromechanical resonators with femtometer sensitivity |
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