Cleaning interfaces in layered materials heterostructures

• Published in: Nature communications Vol. 9; no. 1; pp. 5387 - 12
• Main Authors: Purdie, D. G., Pugno, N. M., Taniguchi, T., Watanabe, K., Ferrari, A. C., Lombardo, A.
• Format: Journal Article
• Language: English
• Published: London Nature Publishing Group UK 19.12.2018; Nature Publishing Group; Nature Portfolio
• Subjects: 140/133; 147/3; 639/166/987; 639/301/1005/1007; 639/925/918/1052; Blistering; Blisters; Boron; Boron nitride; Chemical vapor deposition; Cleaning; Contaminants; Electronic devices; Electronic equipment; Graphene; Heterostructures; Humanities and Social Sciences; Interfaces; Layered materials; Materials science; multidisciplinary; Pollutant removal; Polymers; Polymethyl methacrylate; Science; Science (multidisciplinary)

Heterostructures formed by stacking layered materials require atomically clean interfaces. However, contaminants are usually trapped between the layers, aggregating into randomly located blisters, incompatible with scalable fabrication processes. Here we report a process to remove blisters from full...