Evolutionary Computing and Optimal Design of MEMS - Di Barba, Paolo; Wiak, Slawomir (IEEE/ASME transactions on mechatronics, 2015)
Keywords: Comb-drive electrostatic microactuator; Computation; Design engineering; electro-thermo-elastic microactuator; Electrodes; Evolutionary; Evolutionary design method; field analysis and synthesis; finite-element method; Force; Magnetic levitation; magnetic micromirror; Mathematical analysis; Mathematical models; Microelectromechanical systems; microelectromechanical systems (MEMS); Micromechanical devices; multiobjective optimal shape design; Optimization; Sociology; Statistics; Comb-drive electrostatic microactuator; magnetic micromirror; microelectromechanical systems (MEMS); finite-element method; electro-thermo-elastic microactuator; field analysis and synthesis; multiobjective optimal shape design