Application of p and n-Type Silicon Nanowires as Human Respiratory Sensing Device - Fakhri, Elham; Sultan, Muhammad Taha; Manolescu, Andrei; Ingvarsson, Snorri; Svavarsson, Halldor Gudfinnur (Sensors (Basel, Switzerland), 2023)
Keywords: breath; Electric properties; Electrodes; Electron microscopes; Etching; humidity; Investigations; metal-assisted chemical etching; Nanoparticles; Nanowires; piezoresistance; Respiration; sensor; Sensors; Silicon; silicon nanowire arrays; Sleep apnea; Sleep apnea syndromes; breath; humidity; metal-assisted chemical etching; sensor; piezoresistance; silicon nanowire arrays