APA (7th ed.) Citation

Yang, D., Mannan, A., Murakami, F., & Tonouchi, M. (2022). Rapid, noncontact, sensitive, and semiquantitative characterization of buffered hydrogen-fluoride-treated silicon wafer surfaces by terahertz emission spectroscopy. Light, science & applications, 11(1), 334-12. https://doi.org/10.1038/s41377-022-01033-x

Chicago Style (17th ed.) Citation

Yang, Dongxun, Abdul Mannan, Fumikazu Murakami, and Masayoshi Tonouchi. "Rapid, Noncontact, Sensitive, and Semiquantitative Characterization of Buffered Hydrogen-fluoride-treated Silicon Wafer Surfaces by Terahertz Emission Spectroscopy." Light, Science & Applications 11, no. 1 (2022): 334-12. https://doi.org/10.1038/s41377-022-01033-x.

MLA (9th ed.) Citation

Yang, Dongxun, et al. "Rapid, Noncontact, Sensitive, and Semiquantitative Characterization of Buffered Hydrogen-fluoride-treated Silicon Wafer Surfaces by Terahertz Emission Spectroscopy." Light, Science & Applications, vol. 11, no. 1, 2022, pp. 334-12, https://doi.org/10.1038/s41377-022-01033-x.