Fundamental Study for a Graphite-Based Microelectromechanical System - Sone, Junji; Murakami, Mutsuaki; Tatami, Atsushi (Micromachines (Basel), 2018)
Keywords: Adhesion tests; cantilever; Cantilever beams; carbon-MEMS; Crystal structure; doubly clamped beam; Graphite; graphite sheet; HOPG; Laser beam cutting; Microelectromechanical systems; Pyrolytic graphite; Q values; resonance frequency; Thickness; cantilever; doubly clamped beam; resonance frequency; graphite sheet; carbon-MEMS; HOPG