The Nanolithography Toolbox

• Published in: Journal of research of the National Institute of Standards and Technology Vol. 121; pp. 464 - 475
• Main Authors: Coimbatore Balram, Krishna, Westly, Daron A., Davanco, Marcelo I., Grutter, Karen E., Li, Qing, Michels, Thomas, Ray, Christopher H., Kasica, Richard J., Wallin, Christopher B., Gilbert, Ian J., Bryce, Brian A., Simelgor, Gregory, Topolancik, Juraj, Lobontiu, Nicolae, Liu, Yuxiang, Neuzil, Pavel, Svatos, Vojtech, Dill, Kristen A., Bertrand, Neal A., Metzler, Meredith, Lopez, Gerald, Czaplewski, David, Ocola, Leonidas, Srinivasan, Kartik A., Stavis, Samuel M., Aksyuk, Vladimir A., Liddle, James Alexander A., Krylov, Slava, Ilic, Robert R.
• Format: Journal Article
• Language: English
• Published: United States National Institute of Standards and Technology 2016; [Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology
• Subjects: nanoplasmonic; CAD; nanofabrication; nanoscale devices; nanophotonic; lithography; nanofluidic; nanoscale curved features; nanoscale design
• ISSN: 2165-7254; 1044-677X; 2165-7254
• DOI: 10.6028/jres.121.024

This article introduces in archival form the Nanolithography Toolbox, a platform-independent software package for scripted lithography pattern layout generation. The Center for Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST) developed the Nanolith...