Sputtered zinc oxide coatings: structural study and application to the photoprotection of the polycarbonate

Zinc oxide (ZnO) was deposited by sputtering on silicon substrates. The structure and the composition of these deposits were studied by X-ray diffraction and Rutherford backscattering spectrometry, respectively. It was found that the thin films are polycrystalline with an hexagonal würtzite structur...

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Bibliographic Details
Published inSurface & coatings technology Vol. 180; pp. 642 - 645
Main Authors Moustaghfir, A., Tomasella, E., Rivaton, A., Mailhot, B., Jacquet, M., Gardette, J.L., Cellier, J.
Format Journal Article
LanguageEnglish
Published Elsevier B.V 01.03.2004
Elsevier
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