Mechanical behavior study of microdevice and nanomaterials by Raman spectroscopy: a review

With the rapid development of micro/nano manufacturing technology and nanomaterials, the accurate measurement of the mechanical properties and behaviors at the micro-nano scale represents a new field of mechanical experiments. Raman spectroscopy, which is based on lattice dynamics theory, is applica...

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Bibliographic Details
Published inChinese science bulletin Vol. 59; no. 23; pp. 2811 - 2824
Main Authors Qiu, Wei, Kang, Yi-Lan
Format Journal Article
LanguageEnglish
Published Heidelberg Springer-Verlag 01.08.2014
Science China Press
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Summary:With the rapid development of micro/nano manufacturing technology and nanomaterials, the accurate measurement of the mechanical properties and behaviors at the micro-nano scale represents a new field of mechanical experiments. Raman spectroscopy, which is based on lattice dynamics theory, is applicable to the detection of the statistical information of the lattice structure deformation within the measuring points. Due to its peculiarities, such as non-destructiveness, convenience and high-resolution, this technology allows the on-line in situ measurement of residual stress in microstructures caused by processing and can also achieve the real-time deformation of graphene, carbon nanotubes and other nanomaterials under force loading. In recent years, mechanical measurements based on Raman spectroscopy technology have developed rapidly. In this review, Raman-based stress measurement theories for several commonly used materials are briefly described. Applications related to the residual stress measurements of microstructure and experimental investigations of the mechanical properties of low-dimensional nanomaterials are then reviewed. Finally, the development trend of this method is proposed.
Bibliography:Raman spectroscopy ; Residual stress inmicrodevice ; Mechanical property of nanomaterial;Experimental mechanics
Wei Qiu ,Yi-Lan Kang (Tianjin Key Laboratory of Modem Engineering Mechanics, Department of Mechanics, Tianjin University, Tianjin 300072, China)
With the rapid development of micro/nano manufacturing technology and nanomaterials, the accurate measurement of the mechanical properties and behaviors at the micronano scale represents a new field of mechanical experiments. Raman spectroscopy, which is based on lat tice dynamics theory, is applicable to the detection of the statistical information of the lattice structure deformation within the measuring points. Due to its peculiarities, such as non-destructiveness, convenience and highresolution, this technology allows the online in situ measurement of residual stress in microstructures caused by processing and can also achieve the realtime deformation of graphene, carbon nanotubes and other nanomaterials under force loading. In recent years, mechanical measurements based on Raman spectroscopy technology have developed rapidly. In this review, Ramanbased stress measurement theories for several commonly used materials are briefly described. Applications related to the residual stress measurements of microstructure and experimental investigations of the mechanical properties of lowdimensional nanomaterials are then reviewed. Finally, the development trend of this method is proposed.
11-1785/N
http://dx.doi.org/10.1007/s11434-014-0401-8
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SourceType-Scholarly Journals-1
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content type line 23
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ISSN:1001-6538
1861-9541
DOI:10.1007/s11434-014-0401-8