A semi-empirical approach to calibrate simulation models for semiconductor devices
Semiconductor device optimization using computer-based prototyping techniques like simulation or machine learning digital twins can be time and resource efficient compared to the conventional strategy of iterating over device design variations by fabricating the actual device. Ideally, simulation mo...
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Published in | Scientific reports Vol. 13; no. 1; p. 10436 |
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Main Authors | , , |
Format | Journal Article |
Language | English |
Published |
London
Nature Publishing Group UK
27.06.2023
Nature Publishing Group Nature Portfolio |
Subjects | |
Online Access | Get full text |
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