Is Scanning Electron Microscopy/Energy Dispersive X-ray Spectrometry (SEM/EDS) Quantitative?

• Published in: Scanning Vol. 35; no. 3; pp. 141 - 168
• Main Authors: Newbury, Dale E., Ritchie, Nicholas W. M.
• Format: Journal Article
• Language: English
• Published: England Blackwell Publishing Ltd 01.05.2013; John Wiley & Sons, Inc
• Subjects: Accuracy; Constituents; EDS; elemental analysis; Energy dispersive; energy dispersive X-ray spectrometry; quantitative analysis; Scanning electron microscopy; SDD; SEM; silicon drift detector; Spectrometers; Spectrometry; Spectroscopy; Studies; Systematic errors; X-ray microanalysis; X-ray spectrometry

Summary Scanning electron microscopy/energy dispersive X‐ray spectrometry (SEM/EDS) is a widely applied elemental microanalysis method capable of identifying and quantifying all elements in the periodic table except H, He, and Li. By following the “k‐ratio” (unknown/standard) measurement protocol de...