Nonlinear vibration control with nanocapacitive sensor for electrostatically actuated nanobeam

• Published in: Journal of low frequency noise, vibration, and active control Vol. 37; no. 2; pp. 235 - 252
• Main Authors: Gong, Qingmei, Liu, Canchang, Xu, Yingzi, Ma, Chicheng, Zhou, Jilei, Jiang, Ruirui, Zhou, Changcheng
• Format: Journal Article
• Language: English
• Published: London, England SAGE Publications 01.06.2018; Sage Publications Ltd; SAGE Publishing
• Subjects: Amplitudes; Clamping; Computer simulation; Damping; Dynamic response; Euler-Bernoulli beams; Frequency response; Mathematical models; Multiscale analysis; Nanoelectromechanical systems; Nonlinear control; Nonlinear systems; Parameters; Sensors; Vibration; Vibration control; superharmonic resonance; Nonlinear vibration control; multiple scales method; primary resonance; nanobeam

The model of a clamped–clamped Euler–Bernoulli beam is presented in order to study nonlinear vibration control of electrostatically actuated nanobeam with nanocapacitive sensor, considering primary and superharmonic resonances. The capacitance of nanobeam capacitor changes with the nanobeam deformat...