Design and evaluation of a minienvironment for semiconductor manufacture processes

• Published in: Building and environment Vol. 37; no. 2; pp. 201 - 208
• Main Authors: Hu, S.C., Chuah, Y.K., Yen, M.C.
• Format: Journal Article
• Language: English
• Published: Elsevier Ltd 01.02.2002
• Subjects: Cleanroom; computational fluid dynamics; Contamination; Minienvironment; SMIF; SMIF; Cleanroom; Minienvironment; Contamination

A new minienvironment for controlling the process area from ambient air contamination was designed and evaluated. The new design has a buffer zone between the ambient and the process zones. A parametric study of this design using a Computational Fluid Dynamics (CFD) method was conducted for various...