A Strategy for Alleviating Micro Arcing during HiPIMS Deposition of DLC Coatings - Vitelaru, Catalin; Parau, Anca Constantina; Constantin, Lidia Ruxandra; Kiss, Adrian Emil; Vladescu, Alina; Sobetkii, Arcadie; Kubart, Tomas (Materials, 2020)
Keywords: Ar+Ne+C2H2 gas mixture; carbon sputtering; diamond like carbon (DLC); high power impulse magnetron sputtering (HiPIMS); magnetron sputtering; mechanical properties; process optimization; magnetron sputtering; Ar+Ne+C2H2 gas mixture; high power impulse magnetron sputtering (HiPIMS), process optimization; carbon sputtering; diamond like carbon (DLC), mechanical properties