Synergistic Effect of He for the Fabrication of Ne and Ar Gas-Charged Silicon Thin Films as Solid Targets for Spectroscopic Studies
Sputtering of silicon in a He magnetron discharge (MS) has been reported as a bottom-up procedure to obtain He-charged silicon films (i.e., He nanobubbles encapsulated in a silicon matrix). The incorporation of heavier noble gases is demonstrated in this work with a synergistic effect, producing inc...
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Published in | Nanomaterials (Basel, Switzerland) Vol. 14; no. 8; p. 727 |
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Abstract | Sputtering of silicon in a He magnetron discharge (MS) has been reported as a bottom-up procedure to obtain He-charged silicon films (i.e., He nanobubbles encapsulated in a silicon matrix). The incorporation of heavier noble gases is demonstrated in this work with a synergistic effect, producing increased Ne and Ar incorporations when using He-Ne and He-Ar gas mixtures in the MS process. Microstructural and chemical characterizations are reported using ion beam analysis (IBA) and scanning and transmission electron microscopies (SEM and TEM). In addition to gas incorporation, He promotes the formation of larger nanobubbles. In the case of Ne, high-resolution X-ray photoelectron and absorption spectroscopies (XPS and XAS) are reported, with remarkable dependence of the Ne 1s photoemission and the Ne K-edge absorption on the nanobubble's size and composition. The gas (He, Ne and Ar)-charged thin films are proposed as "solid" targets for the characterization of spectroscopic properties of noble gases in a confined state without the need for cryogenics or high-pressure anvils devices. Also, their use as targets for nuclear reaction studies is foreseen. |
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AbstractList | Sputtering of silicon in a He magnetron discharge (MS) has been reported as a bottom-up procedure to obtain He-charged silicon films (i.e., He nanobubbles encapsulated in a silicon matrix). The incorporation of heavier noble gases is demonstrated in this work with a synergistic effect, producing increased Ne and Ar incorporations when using He–Ne and He–Ar gas mixtures in the MS process. Microstructural and chemical characterizations are reported using ion beam analysis (IBA) and scanning and transmission electron microscopies (SEM and TEM). In addition to gas incorporation, He promotes the formation of larger nanobubbles. In the case of Ne, high-resolution X-ray photoelectron and absorption spectroscopies (XPS and XAS) are reported, with remarkable dependence of the Ne 1s photoemission and the Ne K-edge absorption on the nanobubble’s size and composition. The gas (He, Ne and Ar)-charged thin films are proposed as “solid” targets for the characterization of spectroscopic properties of noble gases in a confined state without the need for cryogenics or high-pressure anvils devices. Also, their use as targets for nuclear reaction studies is foreseen. |
Audience | Academic |
Author | Lucas, Stephane Ávila, José Hufschmidt, Dirk Jiménez de Haro, M Carmen Almanza-Vergara, G Eduardo Ferrer, F Javier Fernández, Asunción Godinho, Vanda López-Viejobueno, Jennifer Colaux, Julien L Asensio, M Carmen |
AuthorAffiliation | 3 Centro Nacional de Aceleradores (Univ. Seville, J. Andalucía, CSIC), Av. Tomas Alva Edison 7, 41092 Seville, Spain; fjferrer@us.es 6 Madrid Institute of Materials Science (ICMM), CSIC, Cantoblanco, 28049 Madrid, Spain 5 Laboratoire d’Analyse par Réactions Nucléaires (LARN), Namur Institute of Structured Matter (NISM), University of Namur, 61 Rue de Bruxeles, 5000 Namur, Belgium; julien.colaux@unamur.be (J.L.C.); stephane.lucas@unamur.be (S.L.) 4 Departamento de FAMN (Univ. Seville), Aptd. 1065, 41012 Seville, Spain 1 Instituto de Ciencia de Materiales de Sevilla (CSIC-Univ. Seville), Avda. Américo Vespucio 49, 41092 Seville, Spain; godinho@icmse.csic.es (V.G.); cjimenez@icmse.csic.es (M.C.J.d.H.); dirk@icmse.csic.es (D.H.); jennilop@ucm.es (J.L.-V.); gealmanzav@unal.edu.co (G.E.A.-V.) 2 Synchrotron SOLEIL, Universite Paris-Saclay, L’ Orme des Merisiers, BP48, 91190 Saint-Aubin, France; jose.avila@synchrotron-soleil.fr (J.Á.); mc.asensio@csic.es (M.C.A.) |
AuthorAffiliation_xml | – name: 1 Instituto de Ciencia de Materiales de Sevilla (CSIC-Univ. Seville), Avda. Américo Vespucio 49, 41092 Seville, Spain; godinho@icmse.csic.es (V.G.); cjimenez@icmse.csic.es (M.C.J.d.H.); dirk@icmse.csic.es (D.H.); jennilop@ucm.es (J.L.-V.); gealmanzav@unal.edu.co (G.E.A.-V.) – name: 2 Synchrotron SOLEIL, Universite Paris-Saclay, L’ Orme des Merisiers, BP48, 91190 Saint-Aubin, France; jose.avila@synchrotron-soleil.fr (J.Á.); mc.asensio@csic.es (M.C.A.) – name: 6 Madrid Institute of Materials Science (ICMM), CSIC, Cantoblanco, 28049 Madrid, Spain – name: 4 Departamento de FAMN (Univ. Seville), Aptd. 1065, 41012 Seville, Spain – name: 5 Laboratoire d’Analyse par Réactions Nucléaires (LARN), Namur Institute of Structured Matter (NISM), University of Namur, 61 Rue de Bruxeles, 5000 Namur, Belgium; julien.colaux@unamur.be (J.L.C.); stephane.lucas@unamur.be (S.L.) – name: 3 Centro Nacional de Aceleradores (Univ. Seville, J. Andalucía, CSIC), Av. Tomas Alva Edison 7, 41092 Seville, Spain; fjferrer@us.es |
Author_xml | – sequence: 1 givenname: Asunción orcidid: 0000-0002-7487-7054 surname: Fernández fullname: Fernández, Asunción organization: Instituto de Ciencia de Materiales de Sevilla (CSIC-Univ. Seville), Avda. Américo Vespucio 49, 41092 Seville, Spain – sequence: 2 givenname: Vanda orcidid: 0000-0003-1829-6674 surname: Godinho fullname: Godinho, Vanda organization: Instituto de Ciencia de Materiales de Sevilla (CSIC-Univ. Seville), Avda. Américo Vespucio 49, 41092 Seville, Spain – sequence: 3 givenname: José orcidid: 0000-0003-1027-5676 surname: Ávila fullname: Ávila, José organization: Synchrotron SOLEIL, Universite Paris-Saclay, L' Orme des Merisiers, BP48, 91190 Saint-Aubin, France – sequence: 4 givenname: M Carmen orcidid: 0000-0003-1850-8091 surname: Jiménez de Haro fullname: Jiménez de Haro, M Carmen organization: Instituto de Ciencia de Materiales de Sevilla (CSIC-Univ. Seville), Avda. Américo Vespucio 49, 41092 Seville, Spain – sequence: 5 givenname: Dirk surname: Hufschmidt fullname: Hufschmidt, Dirk organization: Instituto de Ciencia de Materiales de Sevilla (CSIC-Univ. Seville), Avda. Américo Vespucio 49, 41092 Seville, Spain – sequence: 6 givenname: Jennifer orcidid: 0000-0002-3147-3623 surname: López-Viejobueno fullname: López-Viejobueno, Jennifer organization: Instituto de Ciencia de Materiales de Sevilla (CSIC-Univ. Seville), Avda. Américo Vespucio 49, 41092 Seville, Spain – sequence: 7 givenname: G Eduardo surname: Almanza-Vergara fullname: Almanza-Vergara, G Eduardo organization: Instituto de Ciencia de Materiales de Sevilla (CSIC-Univ. Seville), Avda. Américo Vespucio 49, 41092 Seville, Spain – sequence: 8 givenname: F Javier orcidid: 0000-0003-1840-2553 surname: Ferrer fullname: Ferrer, F Javier organization: Departamento de FAMN (Univ. Seville), Aptd. 1065, 41012 Seville, Spain – sequence: 9 givenname: Julien L orcidid: 0000-0002-8940-2991 surname: Colaux fullname: Colaux, Julien L organization: Laboratoire d'Analyse par Réactions Nucléaires (LARN), Namur Institute of Structured Matter (NISM), University of Namur, 61 Rue de Bruxeles, 5000 Namur, Belgium – sequence: 10 givenname: Stephane surname: Lucas fullname: Lucas, Stephane organization: Laboratoire d'Analyse par Réactions Nucléaires (LARN), Namur Institute of Structured Matter (NISM), University of Namur, 61 Rue de Bruxeles, 5000 Namur, Belgium – sequence: 11 givenname: M Carmen surname: Asensio fullname: Asensio, M Carmen organization: Madrid Institute of Materials Science (ICMM), CSIC, Cantoblanco, 28049 Madrid, Spain |
BackLink | https://www.ncbi.nlm.nih.gov/pubmed/38668221$$D View this record in MEDLINE/PubMed |
BookMark | eNpdkkFv2yAUgK2p09plve08Ie2yw9KBAQOnKYqatlK1HZKdLQyPhMiBDJxKPe-PDzddlc4-GD0-vuf3eO-rsxADVNVHgq8oVfhb0CEShiUWtXhTXdRYqClTipydrM-ry5y3uDyKUMnpu-qcyqaRdU0uqj_LxwBp7fPgDbp2DsyAokO3gFxMaNgAWugueaMHH8O48wOQDhbNErrReTrf6LQGi5a-96YAq40PaOH7XUY6o2XsvUWrERnyk3C5LwlSzCbuS77lcLAe8ofqrdN9hsvn76T6tbhezW-n9z9v7uaz-6lhgg9Tg5lVREomsbLYiq4GwnHHCWWadbYGB6ITvBGkUdApJh3viOG1pJiOKJ1Ud0evjXrb7pPf6fTYRu3bp0BM61an0oceWiOKk0nSOKyYUbzrjJUl6AhIo21TXN-Prv2h24E1EIak-1fS1zvBb9p1fGgJwZwKgYvhy7Mhxd8HyEO789lA3-sA8ZBbiplQVCo6Jvv8H7qNhxRKr0aqUUqSwk2qqyO11qUCH1wsiU15LezGywHnS3xWpJxLycd-fD0eMOVGcgL38vsEt-N4tafjVfBPpyW_wP-Gif4FFxvMBg |
Cites_doi | 10.1016/j.matchemphys.2023.127674 10.1016/S0301-0104(02)00901-1 10.1103/PhysRevB.71.233107 10.1016/j.apsusc.2020.148273 10.1098/rspa.2023.0081 10.1016/j.diamond.2011.12.043 10.1038/s41598-022-05579-z 10.1063/5.0066626 10.1016/j.mseb.2004.05.014 10.1116/1.1593054 10.1063/1.5115449 10.1016/j.nimb.2010.10.007 10.1016/j.nimb.2012.12.006 10.1098/rspa.2020.0056 10.1016/j.jnucmat.2021.153497 10.1016/j.surfcoat.2020.125616 10.1016/j.surfcoat.2021.127808 10.1103/PhysRevB.77.104119 10.1016/j.apcatb.2018.04.064 10.1016/j.apsusc.2018.10.268 10.1016/j.matdes.2019.107691 10.1116/1.578634 10.1063/1.3582612 10.1016/j.apsusc.2023.156708 10.1016/j.micron.2018.02.004 10.1016/j.physb.2023.415616 10.1016/j.matdes.2019.108337 10.1088/1742-6596/425/19/192023 10.1140/epjd/s10053-023-00592-x 10.1103/PhysRevLett.92.115506 10.1021/acsomega.6b00270 10.1126/science.163.3868.627 10.1016/S0378-4363(84)80035-2 10.1007/978-1-4899-3680-6 10.1016/j.tsf.2004.11.108 10.1016/j.nme.2021.101091 10.1088/0957-4484/25/35/355705 10.1007/978-3-540-45298-0 10.1088/0957-4484/24/27/275604 10.1016/j.jnucmat.2015.11.057 10.1088/0029-5515/24/8/009 10.1063/1.59188 10.1088/0957-4484/26/7/075703 10.1140/epjp/s13360-020-00482-w 10.1016/j.nimb.2015.02.048 10.1088/0022-3727/40/7/044 10.1051/epjconf/202327911003 10.1103/PhysRevB.28.2485 10.1016/j.jnucmat.2015.12.017 10.1016/j.nimb.2015.09.035 10.1016/0022-3115(80)90205-6 10.1021/acsami.5b02356 10.1038/s42004-018-0026-y 10.1063/1.119524 10.1016/j.jnucmat.2004.04.129 10.1002/(SICI)1234-985X(199609)3:3<171::AID-HCR58>3.0.CO;2-D 10.1088/0022-3700/13/16/023 10.1103/PhysRevB.79.125409 10.1016/j.jnucmat.2009.05.011 10.1080/09500839.2017.1347724 |
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DBID | NPM AAYXX CITATION 7QF 7QO 7QQ 7SC 7SE 7SP 7SR 7TA 7TB 7U5 8BQ 8FD 8FE 8FG 8FH ABJCF ABUWG AFKRA AZQEC BBNVY BENPR BGLVJ BHPHI CCPQU D1I DWQXO F28 FR3 GNUQQ H8D H8G HCIFZ JG9 JQ2 KB. KR7 L7M LK8 L~C L~D M7P P64 PDBOC PIMPY PQEST PQQKQ PQUKI PRINS 7X8 5PM DOA |
DOI | 10.3390/nano14080727 |
DatabaseName | PubMed CrossRef Aluminium Industry Abstracts Biotechnology Research Abstracts Ceramic Abstracts Computer and Information Systems Abstracts Corrosion Abstracts Electronics & Communications Abstracts Engineered Materials Abstracts Materials Business File Mechanical & Transportation Engineering Abstracts Solid State and Superconductivity Abstracts METADEX Technology Research Database ProQuest SciTech Collection ProQuest Technology Collection ProQuest Natural Science Collection Materials Science & Engineering Collection ProQuest Central (Alumni) ProQuest Central UK/Ireland ProQuest Central Essentials Biological Science Collection ProQuest Central Technology Collection ProQuest Natural Science Collection ProQuest One Community College ProQuest Materials Science Collection ProQuest Central ANTE: Abstracts in New Technology & Engineering Engineering Research Database ProQuest Central Student Aerospace Database Copper Technical Reference Library SciTech Premium Collection (Proquest) (PQ_SDU_P3) Materials Research Database ProQuest Computer Science Collection ProQuest Materials Science Database Civil Engineering Abstracts Advanced Technologies Database with Aerospace Biological Sciences Computer and Information Systems Abstracts Academic Computer and Information Systems Abstracts Professional Biological Science Database Biotechnology and BioEngineering Abstracts Materials Science Collection Publicly Available Content Database ProQuest One Academic Eastern Edition (DO NOT USE) ProQuest One Academic ProQuest One Academic UKI Edition ProQuest Central China MEDLINE - Academic PubMed Central (Full Participant titles) Directory of Open Access Journals |
DatabaseTitle | PubMed CrossRef Publicly Available Content Database Materials Research Database ProQuest Central Student Technology Collection Technology Research Database Computer and Information Systems Abstracts – Academic Mechanical & Transportation Engineering Abstracts ProQuest Central Essentials Materials Science Collection ProQuest Computer Science Collection Computer and Information Systems Abstracts ProQuest Central (Alumni Edition) SciTech Premium Collection ProQuest One Community College ProQuest Natural Science Collection ProQuest Central China Materials Business File ProQuest Central Aerospace Database Copper Technical Reference Library Engineered Materials Abstracts Biotechnology Research Abstracts Natural Science Collection ProQuest Central Korea Biological Science Collection Materials Science Database Advanced Technologies Database with Aerospace ANTE: Abstracts in New Technology & Engineering ProQuest Materials Science Collection Civil Engineering Abstracts Aluminium Industry Abstracts ProQuest Biological Science Collection ProQuest One Academic Eastern Edition Electronics & Communications Abstracts ProQuest Technology Collection Ceramic Abstracts Biological Science Database ProQuest SciTech Collection METADEX Biotechnology and BioEngineering Abstracts Computer and Information Systems Abstracts Professional ProQuest One Academic UKI Edition Materials Science & Engineering Collection Solid State and Superconductivity Abstracts Engineering Research Database ProQuest One Academic Corrosion Abstracts MEDLINE - Academic |
DatabaseTitleList | CrossRef MEDLINE - Academic PubMed Publicly Available Content Database |
Database_xml | – sequence: 1 dbid: DOA name: Directory of Open Access Journals url: https://www.doaj.org/ sourceTypes: Open Website – sequence: 2 dbid: NPM name: PubMed url: https://proxy.k.utb.cz/login?url=http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed sourceTypes: Index Database – sequence: 3 dbid: 8FG name: ProQuest Technology Collection url: https://search.proquest.com/technologycollection1 sourceTypes: Aggregation Database |
DeliveryMethod | fulltext_linktorsrc |
Discipline | Engineering |
EISSN | 2079-4991 |
ExternalDocumentID | oai_doaj_org_article_c74a44816f094c95bbcd8c74f1e8cad6 A793558855 10_3390_nano14080727 38668221 |
Genre | Journal Article |
GeographicLocations | Spain Netherlands Berlin Germany Japan Germany |
GeographicLocations_xml | – name: Spain – name: Germany – name: Netherlands – name: Berlin Germany – name: Japan |
GrantInformation_xml | – fundername: Ministerio de Ciencia e Innovación grantid: PID2021-124439NB-I00 – fundername: Junta de Andalucía grantid: P20-00239 – fundername: Consejo Superior de Investigaciones Científicas grantid: 202160E029 – fundername: Junta de Andalucía, FEDER-EU grantid: P20-00239 – fundername: CSIC grantid: 202160E029 – fundername: MICIN/AEI/10.13039/501100011033, FEDER-EU grantid: PID2021-124439NB-I00; PID2021-123879OB-C21 – fundername: University of Seville grantid: VI PPIT-US – fundername: Spanish Ministry of Education grantid: PRX-18/0052 – fundername: SOLEIL grantid: 20170265 |
GroupedDBID | 53G 5VS 8FE 8FG 8FH AADQD AAFWJ AAHBH ABJCF ADBBV AENEX AFKRA AFPKN AFZYC ALMA_UNASSIGNED_HOLDINGS AOIJS BBNVY BCNDV BENPR BGLVJ BHPHI CCPQU D1I GROUPED_DOAJ HCIFZ HYE I-F IAO ITC KB. KQ8 LK8 M7P MODMG M~E NPM OK1 PDBOC PGMZT PIMPY PROAC RIG RPM AAYXX CITATION 7QF 7QO 7QQ 7SC 7SE 7SP 7SR 7TA 7TB 7U5 8BQ 8FD ABUWG AZQEC DWQXO F28 FR3 GNUQQ H8D H8G JG9 JQ2 KR7 L7M L~C L~D P64 PQEST PQQKQ PQUKI PRINS 7X8 5PM |
ID | FETCH-LOGICAL-c475t-c04d91884809d0d7b2e150b5134a4bd2efe7b7567169eb948f5b1c5283032e153 |
IEDL.DBID | RPM |
ISSN | 2079-4991 |
IngestDate | Thu Jul 04 20:57:22 EDT 2024 Tue Sep 17 21:28:17 EDT 2024 Sat Aug 17 05:20:47 EDT 2024 Wed Sep 25 00:09:06 EDT 2024 Tue May 28 06:11:56 EDT 2024 Thu Sep 26 18:03:59 EDT 2024 Sat Sep 28 08:12:49 EDT 2024 |
IsDoiOpenAccess | true |
IsOpenAccess | true |
IsPeerReviewed | true |
IsScholarly | true |
Issue | 8 |
Keywords | microstructural characterization magnetron sputtering gas-charged Si films Ne, Ar and He solid targets IBA analysis XPS and XAS spectroscopic analyses |
Language | English |
License | Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/). |
LinkModel | DirectLink |
MergedId | FETCHMERGED-LOGICAL-c475t-c04d91884809d0d7b2e150b5134a4bd2efe7b7567169eb948f5b1c5283032e153 |
Notes | ObjectType-Article-1 SourceType-Scholarly Journals-1 ObjectType-Feature-2 content type line 23 |
ORCID | 0000-0003-1840-2553 0000-0003-1027-5676 0000-0002-3147-3623 0000-0003-1850-8091 0000-0002-8940-2991 0000-0002-7487-7054 0000-0003-1829-6674 |
OpenAccessLink | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11053770/ |
PMID | 38668221 |
PQID | 3046998189 |
PQPubID | 2032354 |
ParticipantIDs | doaj_primary_oai_doaj_org_article_c74a44816f094c95bbcd8c74f1e8cad6 pubmedcentral_primary_oai_pubmedcentral_nih_gov_11053770 proquest_miscellaneous_3047938936 proquest_journals_3046998189 gale_infotracacademiconefile_A793558855 crossref_primary_10_3390_nano14080727 pubmed_primary_38668221 |
PublicationCentury | 2000 |
PublicationDate | 20240421 |
PublicationDateYYYYMMDD | 2024-04-21 |
PublicationDate_xml | – month: 4 year: 2024 text: 20240421 day: 21 |
PublicationDecade | 2020 |
PublicationPlace | Switzerland |
PublicationPlace_xml | – name: Switzerland – name: Basel |
PublicationTitle | Nanomaterials (Basel, Switzerland) |
PublicationTitleAlternate | Nanomaterials (Basel) |
PublicationYear | 2024 |
Publisher | MDPI AG MDPI |
Publisher_xml | – name: MDPI AG – name: MDPI |
References | Gurbich (ref_54) 2016; 371 Donnelly (ref_57) 1980; 93–94 Ovejero (ref_22) 2019; 171 Mikoushkin (ref_65) 2021; 539 Godinho (ref_38) 2014; 25 ref_13 Biswas (ref_10) 2004; 92 Liu (ref_18) 2007; 40 Lucas (ref_2) 1984; 127 Pyper (ref_60) 2021; 155 Mayer (ref_49) 1999; 475 Lucas (ref_44) 1983; 28 Gurbich (ref_51) 2011; 269 Pentecoste (ref_8) 2016; 470 Sahu (ref_14) 2020; 127 Barradas (ref_53) 1997; 71 Godinho (ref_28) 2016; 1 Hatton (ref_37) 2020; 476 Gai (ref_5) 2016; 470 Fleischer (ref_6) 1996; 3 Eriksson (ref_12) 1969; 163 Cheng (ref_64) 2024; 675 Sun (ref_3) 2019; 467–468 Uchida (ref_21) 2022; 12 Sauvage (ref_25) 2023; 301 Romberg (ref_46) 2003; 289 David (ref_61) 2011; 98 Aijaz (ref_41) 2012; 23 Hufschmidt (ref_30) 2020; 186 Shi (ref_16) 2005; 479 Lacroix (ref_26) 2018; 108 Carozzi (ref_29) 2019; 42 Manzke (ref_58) 1982; 111–112 Hitchcock (ref_62) 1980; 113 Schierholz (ref_24) 2015; 26 Pyper (ref_27) 2023; 479 Ferrer (ref_32) 2020; 135 Angus (ref_33) 2023; 279 Pyper (ref_59) 2017; 97 Brault (ref_63) 2023; 77 ref_34 Arms (ref_47) 2005; 71 ref_31 Walls (ref_45) 2009; 393 Ibrahim (ref_15) 2021; 426 Giarratano (ref_23) 2018; 235 Oliviero (ref_9) 2004; 112 Jacobsohn (ref_35) 2003; 21 Gai (ref_52) 2013; 296 Wicher (ref_40) 2023; 620 Dhaka (ref_56) 2008; 77 Godinho (ref_19) 2015; 7 Sakabe (ref_20) 2018; 1 Tiron (ref_42) 2021; 29 Godinho (ref_17) 2013; 24 Colaux (ref_50) 2015; 349 Avila (ref_55) 2013; 425 Sagara (ref_36) 2020; 388 ref_48 Cummings (ref_11) 2022; 560 ref_4 Petrov (ref_39) 1993; 11 Dhaka (ref_43) 2009; 79 Ullmaier (ref_1) 1984; 24 Nishijima (ref_7) 2004; 329–333 |
References_xml | – volume: 301 start-page: 127674 year: 2023 ident: ref_25 article-title: Microstructural characterization and thermal stability of He charged amorphous silicon films prepared by magnetron sputtering in helium publication-title: Mater. Chem. Phys. doi: 10.1016/j.matchemphys.2023.127674 contributor: fullname: Sauvage – volume: 289 start-page: 69 year: 2003 ident: ref_46 article-title: Condensation effects in K-shell excitation and de-excitation of solid neon publication-title: Chem. Phys. doi: 10.1016/S0301-0104(02)00901-1 contributor: fullname: Romberg – volume: 71 start-page: 233107 year: 2005 ident: ref_47 article-title: Excitons in bulk liquid 4He publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.71.233107 contributor: fullname: Arms – volume: 539 start-page: 148273 year: 2021 ident: ref_65 article-title: Effect of ion irradiation on GaAs core-level electron binding energies and band structure publication-title: Appl. Surf. Sci. doi: 10.1016/j.apsusc.2020.148273 contributor: fullname: Mikoushkin – volume: 479 start-page: 2023.0081 year: 2023 ident: ref_27 article-title: The density and pressure of helium nano-bubbles encapsulated in silicon publication-title: Proc. R. Soc. A doi: 10.1098/rspa.2023.0081 contributor: fullname: Pyper – volume: 23 start-page: 1 year: 2012 ident: ref_41 article-title: A strategy for increased carbon ionization in magnetron sputtering discharges publication-title: Diam. Relat. Mater doi: 10.1016/j.diamond.2011.12.043 contributor: fullname: Aijaz – volume: 12 start-page: 1742 year: 2022 ident: ref_21 article-title: Nanostructured Ge and GeSn films by high-pressure He plasma sputtering for high-capacity Li ion battery anodes publication-title: Sci. Rep. doi: 10.1038/s41598-022-05579-z contributor: fullname: Uchida – volume: 155 start-page: 214301 year: 2021 ident: ref_60 article-title: Environmental modifications of atomic properties: The ground and 1s2p excited states of compressed helium publication-title: J. Chem. Phys. doi: 10.1063/5.0066626 contributor: fullname: Pyper – volume: 112 start-page: 111 year: 2004 ident: ref_9 article-title: Characterization of neon implantation damage in silicon publication-title: Mater. Sci. Eng. B doi: 10.1016/j.mseb.2004.05.014 contributor: fullname: Oliviero – volume: 21 start-page: 1639 year: 2003 ident: ref_35 article-title: The role of trapped Ar atoms in the mechanical properties of boron carbide films deposited by dc-magnetron sputtering publication-title: J. Vac. Sci. Technol. A doi: 10.1116/1.1593054 contributor: fullname: Jacobsohn – volume: 127 start-page: 014901 year: 2020 ident: ref_14 article-title: Effect of helium incorporation on plasma parameters and characteristic properties of hydrogen free carbon films deposited using DC magnetron sputtering publication-title: J. Appl. Phys. doi: 10.1063/1.5115449 contributor: fullname: Sahu – volume: 269 start-page: 40 year: 2011 ident: ref_51 article-title: Measurements and evaluation of the cross-section for helium elastic scattering from nitrogen publication-title: Nucl. Instrum. Methods Phys. Res. B doi: 10.1016/j.nimb.2010.10.007 contributor: fullname: Gurbich – volume: 296 start-page: 87 year: 2013 ident: ref_52 article-title: Evaluated 12C(4He,4He)12C cross-section and its uncertainty publication-title: Nucl. Instrum. Methods Phys. Res. B doi: 10.1016/j.nimb.2012.12.006 contributor: fullname: Gai – volume: 476 start-page: 2020.0056 year: 2020 ident: ref_37 article-title: Inert gas bubble formation in magnetron sputtered thin-film CdTe solar cells publication-title: Proc. R. Soc. A doi: 10.1098/rspa.2020.0056 contributor: fullname: Hatton – volume: 560 start-page: 153497 year: 2022 ident: ref_11 article-title: Xenon bubbles formed by ion implantation in zirconium alloy films publication-title: J. Nucl. Mater. doi: 10.1016/j.jnucmat.2021.153497 contributor: fullname: Cummings – volume: 388 start-page: 125616 year: 2020 ident: ref_36 article-title: Characteristics of Ag thin films sputter deposited using Ar or Kr gas under different pressure publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2020.125616 contributor: fullname: Sagara – volume: 426 start-page: 127808 year: 2021 ident: ref_15 article-title: Influence of helium incorporation on growth process and properties of aluminum thin films deposited by DC magnetron sputtering publication-title: Surf. Coat. Technol. doi: 10.1016/j.surfcoat.2021.127808 contributor: fullname: Ibrahim – volume: 77 start-page: 104119 year: 2008 ident: ref_56 article-title: Xe and Ar nanobubbles in Al studied by photoemission spectroscopy publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.77.104119 contributor: fullname: Dhaka – volume: 235 start-page: 168 year: 2018 ident: ref_23 article-title: Nanoporous Pt-based catalysts prepared by chemical dealloying of magnetron-sputtered Pt-Cu thin films for the catalytic combustion of hydrogen publication-title: Appl. Catal. B Environ. doi: 10.1016/j.apcatb.2018.04.064 contributor: fullname: Giarratano – volume: 467–468 start-page: 1134 year: 2019 ident: ref_3 article-title: Effects of interfaces on the helium bubble formation and radiation hardening of an austenitic stainless steel achieved by additive manufacturing publication-title: Appl. Surf. Sci. doi: 10.1016/j.apsusc.2018.10.268 contributor: fullname: Sun – volume: 171 start-page: 107691 year: 2019 ident: ref_22 article-title: Exchange bias and two steps magnetization reversal in porous Co/CoO layers publication-title: Mater. Des. doi: 10.1016/j.matdes.2019.107691 contributor: fullname: Ovejero – ident: ref_31 – volume: 42 start-page: 94 year: 2019 ident: ref_29 article-title: Test of a 3He target for transfer reactions in inverse kinematics publication-title: Il Nuovo Cimento C contributor: fullname: Carozzi – volume: 111–112 start-page: 674 year: 1982 ident: ref_58 article-title: Density and pressure of helium in small bubbles in metals publication-title: J. Nucl. Matter contributor: fullname: Manzke – ident: ref_48 – volume: 11 start-page: 2733 year: 1993 ident: ref_39 article-title: Comparison of magnetron sputtering deposition conditions in neon, argon, krypton, and xenon discharges publication-title: J. Vac. Sci. Technol. A doi: 10.1116/1.578634 contributor: fullname: Petrov – volume: 98 start-page: 171903 year: 2011 ident: ref_61 article-title: In situ probing of helium desorption from individual nanobubbles under electron irradiation publication-title: Appl. Phys. Lett. doi: 10.1063/1.3582612 contributor: fullname: David – volume: 620 start-page: 156708 year: 2023 ident: ref_40 article-title: Carbon ion self–sputtering attained by sublimation of hot graphite target and controlled by pulse injection of a neon–helium gas mixture publication-title: Appl. Surf. Sci. doi: 10.1016/j.apsusc.2023.156708 contributor: fullname: Wicher – volume: 108 start-page: 49 year: 2018 ident: ref_26 article-title: The nanostructure of porous cobalt coatings deposited by magnetron sputtering in helium atmosphere publication-title: Micron doi: 10.1016/j.micron.2018.02.004 contributor: fullname: Lacroix – volume: 675 start-page: 415616 year: 2024 ident: ref_64 article-title: Improving the accuracy of ion implantation simulations through the use of DFT-MD methodology publication-title: Phys. B Condens. Matter doi: 10.1016/j.physb.2023.415616 contributor: fullname: Cheng – volume: 186 start-page: 108337 year: 2020 ident: ref_30 article-title: Low gas consumption fabrication of 3He solid targets for nuclear reactions publication-title: Mater. Des. doi: 10.1016/j.matdes.2019.108337 contributor: fullname: Hufschmidt – volume: 425 start-page: 192023 year: 2013 ident: ref_55 article-title: ANTARES, a scanning photoemission microscopy beamline at SOLEIL publication-title: J. Phys. Conf. Ser. doi: 10.1088/1742-6596/425/19/192023 contributor: fullname: Avila – volume: 77 start-page: 19 year: 2023 ident: ref_63 article-title: Theory and molecular simulations of plasma sputtering, transport and deposition processes publication-title: Eur. Phys. J. D. doi: 10.1140/epjd/s10053-023-00592-x contributor: fullname: Brault – volume: 92 start-page: 115506 year: 2004 ident: ref_10 article-title: Argon Nanobubbles in Al(111): A Photoemission Study publication-title: Phys. Rev. Lett. doi: 10.1103/PhysRevLett.92.115506 contributor: fullname: Biswas – volume: 1 start-page: 1229 year: 2016 ident: ref_28 article-title: Characterization and Validation of a-Si Magnetron-Sputtered Thin Films as Solid He Targets with High Stability for Nuclear Reactions publication-title: ACS Omega doi: 10.1021/acsomega.6b00270 contributor: fullname: Godinho – volume: 163 start-page: 627 year: 1969 ident: ref_12 article-title: Ion implantation studies in silicon publication-title: Science doi: 10.1126/science.163.3868.627 contributor: fullname: Eriksson – ident: ref_34 – volume: 127 start-page: 225 year: 1984 ident: ref_2 article-title: Helium in metals publication-title: Physica B+C doi: 10.1016/S0378-4363(84)80035-2 contributor: fullname: Lucas – ident: ref_4 doi: 10.1007/978-1-4899-3680-6 – volume: 479 start-page: 52 year: 2005 ident: ref_16 article-title: Helium-charged titanium films deposited by direct current magnetron sputtering publication-title: Thin Solid. Films doi: 10.1016/j.tsf.2004.11.108 contributor: fullname: Shi – volume: 29 start-page: 101091 year: 2021 ident: ref_42 article-title: Growth and characterization of W thin films with controlled Ne and Ar contents deposited by bipolar HiPIMS publication-title: Nucl. Mater. Energy doi: 10.1016/j.nme.2021.101091 contributor: fullname: Tiron – volume: 25 start-page: 355705 year: 2014 ident: ref_38 article-title: On the formation of the porous structure in nanostructured a-Si coatings deposited by dc magnetron sputtering at oblique angles publication-title: Nanotechnology doi: 10.1088/0957-4484/25/35/355705 contributor: fullname: Godinho – ident: ref_13 doi: 10.1007/978-3-540-45298-0 – volume: 24 start-page: 275604 year: 2013 ident: ref_17 article-title: A new bottom-up methodology to produce silicon layers with a closed porosity nanostructure and reduced refractive index publication-title: Nanotechnology doi: 10.1088/0957-4484/24/27/275604 contributor: fullname: Godinho – volume: 470 start-page: 84 year: 2016 ident: ref_5 article-title: Inert gas bubbles in bcc Fe publication-title: J. Nucl. Mater. doi: 10.1016/j.jnucmat.2015.11.057 contributor: fullname: Gai – volume: 24 start-page: 1039 year: 1984 ident: ref_1 article-title: The influence of helium on the bulk properties of fusion reactor structural materials publication-title: Nucl. Fusion doi: 10.1088/0029-5515/24/8/009 contributor: fullname: Ullmaier – volume: 475 start-page: 541 year: 1999 ident: ref_49 article-title: SIMNRA, a Simulation Program for the Analysis of NRA, RBS and ERDA publication-title: AIP Conf. Proc. doi: 10.1063/1.59188 contributor: fullname: Mayer – volume: 26 start-page: 075703 year: 2015 ident: ref_24 article-title: STEM–EELS analysis reveals stable high density He in nanopores of amorphous silicon coatings deposited by magnetron sputtering publication-title: Nanotechnology doi: 10.1088/0957-4484/26/7/075703 contributor: fullname: Schierholz – volume: 135 start-page: 465 year: 2020 ident: ref_32 article-title: Novel solid 4He targets for experimental studies on nuclear reactions: 6Li+4He differential cross-section measurement at incident energy of 5.5 MeV publication-title: Eur. Phys. J. Plus doi: 10.1140/epjp/s13360-020-00482-w contributor: fullname: Ferrer – volume: 349 start-page: 173 year: 2015 ident: ref_50 article-title: On the traceably accurate voltage calibration of electrostatic accelerators publication-title: Nucl. Instrum. Methods Phys. Res. B doi: 10.1016/j.nimb.2015.02.048 contributor: fullname: Colaux – volume: 40 start-page: 2150 year: 2007 ident: ref_18 article-title: Investigations of helium incorporated into a film deposited by magnetron sputtering publication-title: J. Phys. D Appl. Phys. doi: 10.1088/0022-3727/40/7/044 contributor: fullname: Liu – volume: 279 start-page: 11003 year: 2023 ident: ref_33 article-title: Measurement of the 86Kr(α,n)89Sr cross section at energies relevant for the weak r-process publication-title: EPJ Web Conf. doi: 10.1051/epjconf/202327911003 contributor: fullname: Angus – volume: 28 start-page: 2485 year: 1983 ident: ref_44 article-title: Theoretical interpretation of the vacuum ultraviolet reflectance of liquid helium and of the absorption spectra of helium microbubbles in aluminium publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.28.2485 contributor: fullname: Lucas – volume: 470 start-page: 44 year: 2016 ident: ref_8 article-title: Low energy and low fluence helium implantations in tungsten: Molecular dynamics simulations and experiments publication-title: J. Nucl. Mater. doi: 10.1016/j.jnucmat.2015.12.017 contributor: fullname: Pentecoste – volume: 371 start-page: 27 year: 2016 ident: ref_54 article-title: SigmaCalc recent development and present status of the evaluated cross-sections for IBA publication-title: Nucl. Instrum. Methods Phys. Res. B doi: 10.1016/j.nimb.2015.09.035 contributor: fullname: Gurbich – volume: 93–94 start-page: 767 year: 1980 ident: ref_57 article-title: Optical measurements of the density of helium in small bubbles in aluminium films publication-title: J. Nucl. Matter doi: 10.1016/0022-3115(80)90205-6 contributor: fullname: Donnelly – volume: 7 start-page: 13889 year: 2015 ident: ref_19 article-title: Fabrication of Optical Multilayer Devices from Porous Silicon Coatings with Closed Porosity by Magnetron Sputtering publication-title: ACS Appl. Mater. Interfaces doi: 10.1021/acsami.5b02356 contributor: fullname: Godinho – volume: 1 start-page: 24 year: 2018 ident: ref_20 article-title: Porous amorphous silicon film anodes for high capacity and stable all-solid-state lithium batteries publication-title: Commun. Chem. doi: 10.1038/s42004-018-0026-y contributor: fullname: Sakabe – volume: 71 start-page: 291 year: 1997 ident: ref_53 article-title: Simulated annealing analysis of Rutherford backscattering data publication-title: Appl. Phys. Lett. doi: 10.1063/1.119524 contributor: fullname: Barradas – volume: 329–333 start-page: 1029 year: 2004 ident: ref_7 article-title: Formation mechanism of bubbles and holes on tungsten surface with low-energy and high-flux helium plasma irradiation in NAGDIS-II publication-title: J. Nucl. Mater. doi: 10.1016/j.jnucmat.2004.04.129 contributor: fullname: Nishijima – volume: 3 start-page: 171 year: 1996 ident: ref_6 article-title: Noble gas inclusions in materials publication-title: Heterog. Chem. Rev. doi: 10.1002/(SICI)1234-985X(199609)3:3<171::AID-HCR58>3.0.CO;2-D contributor: fullname: Fleischer – volume: 113 start-page: 3269 year: 1980 ident: ref_62 article-title: Neon K-shell excitation by electron energy-loss spectroscopy publication-title: J. Phys. B Atom. Molec. Phys. doi: 10.1088/0022-3700/13/16/023 contributor: fullname: Hitchcock – volume: 79 start-page: 125409 year: 2009 ident: ref_43 article-title: Bimodal distribution of neon nanobubbles in aluminum publication-title: Phys. Rev. B doi: 10.1103/PhysRevB.79.125409 contributor: fullname: Dhaka – volume: 393 start-page: 102 year: 2009 ident: ref_45 article-title: Study by EELS of helium bubbles in a martensitic steel publication-title: J. Nucl. Mater. doi: 10.1016/j.jnucmat.2009.05.011 contributor: fullname: Walls – volume: 97 start-page: 295 year: 2017 ident: ref_59 article-title: Excited helium under high pressures in the bulk and in nanobubbles publication-title: Phil. Mag. Lett. doi: 10.1080/09500839.2017.1347724 contributor: fullname: Pyper |
SSID | ssj0000913853 |
Score | 2.2959924 |
Snippet | Sputtering of silicon in a He magnetron discharge (MS) has been reported as a bottom-up procedure to obtain He-charged silicon films (i.e., He nanobubbles... |
SourceID | doaj pubmedcentral proquest gale crossref pubmed |
SourceType | Open Website Open Access Repository Aggregation Database Index Database |
StartPage | 727 |
SubjectTerms | Absorption Analytical techniques Argon Carbon Dielectric films Electron microscopy Energy Fabrication Gas mixtures gas-charged Si films Gases Growth models Helium IBA analysis Ion beams magnetron sputtering microstructural characterization Ne, Ar and He solid targets Neon Nuclear reactions Photoelectric emission Photoelectrons Properties Rare gases Scanning electron microscopy Scanning microscopy Silicon Silicon films Silicon wafers Spectra Structure Synergistic effect Thin films X ray photoelectron spectroscopy XPS and XAS spectroscopic analyses |
SummonAdditionalLinks | – databaseName: Directory of Open Access Journals dbid: DOA link: http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwrV1Nb9QwELVQT3BA0PKR0iIjgThFjRM7to8Fsawq0cu2Um-WvwIrLU7VbA-c-ePMOOkqKw5cuK4tx-sZZ96Lx28Iea9UjDz6ACRHdyVXlSttcKz0jQXKDAGwCngb-dtlu7zmFzfiZlbqC3PCRnngceHOvOQWKARrOyAiXgvn8Da75B2Lytswim0zMSNT-R2sWQOBaMx0b4DXnyWbeiATqpJYQGYWg7JU_98v5FlE2s-WnIWfxTPydMKN9Hyc73PyKKZD8mSmJnhEfq9-4UW-rLxMR1Vi2nd0GSkAUwpAjy6su5u-0WHLZaQ2BRiTfrVDiQfv32Ogq_UGvCNRrOhJF-vNz4Haga76zTrQq5w3PuQBsXL9FrUw-1t43pSP-IJcL75cfV6WU42F0nMptqWveNBMKbCSDlWQro4AEZ1gDSy7C3XsonRStCiqE53mqhOOeVSEqRrs2rwkB6lP8TWhTgjZdSj5pgK3OrjggI25Vtuq8bb2BfnwsOrmdpTSMEBB0Dpmbp2CfEKT7PqgAHb-AdzCTG5h_uUWBfmIBjW4TcFq3k63DWCqKHhlzmUWlldCFOTkweZm2r-DwfNiIKJM6YK82zXDzsPjFJtif5_7wCCA9-Bhr0YX2c25UW0L0IsVRO05z96f2m9J6x9Z3RvwmGikrI7_xzK8IY9rQGF4_FWzE3KwvbuPp4Citu5t3jB_AMaWHOk priority: 102 providerName: Directory of Open Access Journals – databaseName: ProQuest Technology Collection dbid: 8FG link: http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1Lb9QwELZKucABlXfagowE4hRtnNixc0IFka6Q6GVbqbfIr5SVlmTZpIee-8c742SXrJC4xpbjZGY8M56Zbwj5qJT33FsHTk5Rx1wlJtbOsNhmGlxmUICJw2rknxf5_Ir_uBbXB2S-rYXBtMrtmRgOatdavCOfYQQPXAOmipk2eAtg-9mX9Z8Y-0dhnHVspvGIPGaIiYc14-X57rYF0S9BMQ2Z7xn4-bNGNy04FyqR2FBmopMCdP-_B_REQ-1nT07UUXlEno12JD0bCP-cHPjmBXk6QRd8Se4Xd1jYF5CY6YBSTNuazj0FQ5WC4UdLbTbjnR2OXHiqGwdr0nPdxRiIv_GOLpYr4JaGYodPWi5XvzuqO7poV0tHL0MeeRcWxE72PWJjtmt435if-Ipcld8vv83jsedCbLkUfWwT7gqmFFCtcImTJvVgMhrBMq65camvvTRS5Aiy403BVS0Ms4gQk2Q4NXtNDpu28W8JNULIukYIOOW4LpxxBrwzkxc6yaxObUQ-bf96tR6gNSpwSZA61ZQ6EfmKJNnNQUDs8KDd3FSjfFVWwv64YnkN_qothDEIeiB5zbyy2uUR-YwErVBskXn0WH0AW0UArOpMBqB5JURETrc0r0Z57qq_3BeRD7thkEQMr-jGt7dhDiwC9h-87M3AIrs9ZyrPwRRjEVF7zLP3UfsjzfJXQPsG-0xkUibH_9_XCXmSgr2Fga6UnZLDfnPr34G91Jv3QRQeAGqIF1Y priority: 102 providerName: ProQuest |
Title | Synergistic Effect of He for the Fabrication of Ne and Ar Gas-Charged Silicon Thin Films as Solid Targets for Spectroscopic Studies |
URI | https://www.ncbi.nlm.nih.gov/pubmed/38668221 https://www.proquest.com/docview/3046998189/abstract/ https://search.proquest.com/docview/3047938936 https://pubmed.ncbi.nlm.nih.gov/PMC11053770 https://doaj.org/article/c74a44816f094c95bbcd8c74f1e8cad6 |
Volume | 14 |
hasFullText | 1 |
inHoldings | 1 |
isFullTextHit | |
isPrint | |
link | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwnV3Na9swFH80HYzuMPY9b13QYGMnN3YkWfKxLU3DoKEsLfRm9OXWkNghSQ879x_vk2KHhN12tWRJ9nvSez-9p58AfkjpHHPGIsjJy5jJRMfK6jQ2VCFkRgOYWH8a-WqSjW_Z7zt-dwBZdxYmJO0bXZ3Us_lJXT2E3MrF3Ay6PLHB9dU5mixOhUgGPegJSncwelh_85SiEdpkuVPE9INa1Q0CCZmgsT6Cl1RmGdrFdM8UBcb-f9flHcO0nzS5Y4VGb-B16z6S080w38KBq9_Bqx1SwffwNP3rz_MFAmayIScmTUnGjqB_StDfIyOll-1WnS-ZOKJqi22SS7WKffz93lkyrWaoJDXxF3uSUTWbr4hakWkzqyy5Cenjq9Cgv8B-7SkxmwX216YlfoDb0cXN-Thur1qIDRN8HZuE2TyVEoWV28QKPXToKWqeUqaYtkNXOqEFzzy3jtM5kyXXqfHEMAn1VelHOKyb2n0GojkXZemZ36RlKrfaagRlOstVQo0amgh-dn-9WGwYNQpEIl5Qxa6gIjjzItnW8TzY4UGzvC9abSiMwPExmWYlwlSTc60914FgZeqkUTaL4JcXaOFnK0rNqPbQAQ7V814VpyLwy0vOIzjuZF6003hV-LAx4tFU5hF83xbjBPRRFVW75jHUwUbQ7cPOPm1UZDvmTtMikHvKs_dR-yWo84Hku9PxL___6lc4GqIL5mNfw_QYDtfLR_cNXai17kNPji778OLsYnL9px82IvphFj0D_wwgPQ |
link.rule.ids | 230,315,733,786,790,870,891,2115,12792,21416,27957,27958,33408,33409,33779,33780,43635,43840,53827,53829,74392,74659 |
linkProvider | National Library of Medicine |
linkToHtml | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1Lb9QwELagHKAHxJtAASOBOEXNw46dEyqIdIF2L7uVerP8SllpSbab7YEzf5wZJ7tkhcQ1thwn4_F84xl_Q8g7Kb1n3jpwcso6ZjIxsXYmjW2uwWUGA5g4vI18Pi0mF-zbJb8cDty6Ia1yuyeGjdq1Fs_IjzGCB65BKsuPq-sYq0ZhdHUooXGb3GE5mE68KV6d7s5YkPMSzFGf756Dd3_c6KYFl0ImAsvIjCxRIOz_d1se2aX9nMmREaoekPsDeqQnvbgfklu-eUQOR5yCj8nv2S-8zhf4l2nPTUzbmk48BXhKAe7RSpv1cFKHLVNPdeNgTHqquxjD71fe0dliCWukoVjXk1aL5c-O6o7O2uXC0XnIHu_CgFi_foOMmO0K3jdkJT4hF9WX-edJPFRaiC0TfBPbhLkylRJkVbrECZN5AIqGpznTzLjM114YwQuk1vGmZLLmJrXIC5Pk2DV_Sg6atvHPCTWci7pG4jfpmC6dcQZ8MlOUOsmtzmxE3m__ulr1hBoKHBGUjhpLJyKfUCS7PkiDHR606ys1aJWyAubHZFrU4KXakhuDVAeC1amXVrsiIh9QoAqVFaRm9XDnAKaKtFfqRAR6ecl5RI62MleDFnfq75qLyNtdM-gfBlV049ub0AcGAdQHL3vWL5HdnHNZFADA0ojIvcWz91H7Lc3iR-D4BlTGcyGSF_-f1xtydzI_P1NnX6ffX5J7GSAuDHVl6RE52Kxv_CtATBvzOqjFH3JZFoQ |
linkToPdf | http://utb.summon.serialssolutions.com/2.0.0/link/0/eLvHCXMwfV1Lb9QwELaglRAcEG8CBYwE4hRtHnbsnFALDctrVbGt1JvlV8pK22S72R4488eZSbzLrpC4xpYzycx4Zjzjbwh5I6X3zFsHQU5Zx0wmJtbOpLHNNYTMYAATh7eRv0-K8Rn7cs7PQ_1TF8oq13tiv1G71uIZ-QgzeBAapLIc1aEs4uRj9X5xFWMHKcy0hnYaN8m-YAUHCd8_Op6c_NicuCACJhinofo9h1h_1OimhQBDJgKbymzZpR6-_99NestK7VZQbpmk6h65G3xJejgw_z654ZsH5M4WwuBD8nv6Cy_39WjMdEAqpm1Nx56Cs0rB-aOVNstwbocjE09142BN-kl3MSbjL7yj09kcJKah2OWTVrP5ZUd1R6ftfOboaV9L3vULYjf7FeJjtgt4X6hRfETOquPTD-M49F2ILRN8FduEuTKVEjhXusQJk3lwGw1Pc6aZcZmvvTCCFwi0403JZM1NahElJslxav6Y7DVt458SajgXdY0wcNIxXTrjDERopih1klud2Yi8Xf91tRjgNRSEJcgdtc2diBwhSzZzEBS7f9AuL1TQMWUF0MdkWtQQs9qSG4PAB4LVqZdWuyIi75ChClUXuGZ1uIEApCIIljoUPdi85DwiB2ueq6DTnforgRF5vRkGbcQUi258e93PgUXAB4SXPRlEZENzLosC3LE0InJHeHY-anekmf3sEb_BR-O5EMmz_9P1itwCnVDfPk--Pie3M3C_MO-VpQdkb7W89i_AfVqZl0Ev_gA-cRwn |
openUrl | ctx_ver=Z39.88-2004&ctx_enc=info%3Aofi%2Fenc%3AUTF-8&rfr_id=info%3Asid%2Fsummon.serialssolutions.com&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Ajournal&rft.genre=article&rft.atitle=Synergistic+Effect+of+He+for+the+Fabrication+of+Ne+and+Ar+Gas-Charged+Silicon+Thin+Films+as+Solid+Targets+for+Spectroscopic+Studies&rft.jtitle=Nanomaterials+%28Basel%2C+Switzerland%29&rft.au=Fern%C3%A1ndez%2C+Asunci%C3%B3n&rft.au=Godinho%2C+Vanda&rft.au=%C3%81vila%2C+Jos%C3%A9&rft.au=Jim%C3%A9nez+de+Haro%2C+M.+Carmen&rft.date=2024-04-21&rft.issn=2079-4991&rft.eissn=2079-4991&rft.volume=14&rft.issue=8&rft.spage=727&rft_id=info:doi/10.3390%2Fnano14080727&rft.externalDBID=n%2Fa&rft.externalDocID=10_3390_nano14080727 |
thumbnail_l | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/lc.gif&issn=2079-4991&client=summon |
thumbnail_m | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/mc.gif&issn=2079-4991&client=summon |
thumbnail_s | http://covers-cdn.summon.serialssolutions.com/index.aspx?isbn=/sc.gif&issn=2079-4991&client=summon |