Manipulating the processing window of directed self-assembly in contact hole shrinking with binary block copolymer/homopolymer blending - Wu, Zhiyong; Luo, Jiacheng; Li, Luyang; Dong, Qingshu; Zhang, Xiaohui; Li, Zili; Liu, Yadong; Ji, Shengxiang; Li, Weihua; Zhang, Yan; Xiong, Shisheng (iScience, 2024)
Keywords: Chemistry; Materials science; Physics; Materials science; Chemistry; Physics