Study on the Mechanism of Solid-Phase Oxidant Action in Tribochemical Mechanical Polishing of SiC Single Crystal Substrate - Qi, Wanting; Cao, Xiaojun; Xiao, Wen; Wang, Zhankui; Su, Jianxiu (Micromachines (Basel), 2021)
Keywords: 6H-SiC; Chemical reactions; Decomposition; dry polishing; fixed abrasive; Flash point; Hydrogen peroxide; Material removal rate (machining); Mechanical polishing; Morphology; Oxidizing agents; Oxygen; Polyurethane resins; Potassium permanganate; Reaction products; Residual stress; Satellite communications; Silicon dioxide; Single crystals; Sodium carbonate; Sodium silicates; Solid phases; solid-phase oxidant; Substrates; Surface roughness; tribochemical mechanical polishing; United States--US; 6H-SiC; dry polishing; fixed abrasive; tribochemical mechanical polishing; solid-phase oxidant