APA (7th ed.) Citation

Qi, W., Cao, X., Xiao, W., Wang, Z., & Su, J. (2021). Study on the Mechanism of Solid-Phase Oxidant Action in Tribochemical Mechanical Polishing of SiC Single Crystal Substrate. Micromachines (Basel), 12(12), 1547. https://doi.org/10.3390/mi12121547

Chicago Style (17th ed.) Citation

Qi, Wanting, Xiaojun Cao, Wen Xiao, Zhankui Wang, and Jianxiu Su. "Study on the Mechanism of Solid-Phase Oxidant Action in Tribochemical Mechanical Polishing of SiC Single Crystal Substrate." Micromachines (Basel) 12, no. 12 (2021): 1547. https://doi.org/10.3390/mi12121547.

MLA (9th ed.) Citation

Qi, Wanting, et al. "Study on the Mechanism of Solid-Phase Oxidant Action in Tribochemical Mechanical Polishing of SiC Single Crystal Substrate." Micromachines (Basel), vol. 12, no. 12, 2021, p. 1547, https://doi.org/10.3390/mi12121547.